• 한국소음진동공학회논문집
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• 제21권2호
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• pp.106-111
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• 2011

In this paper, assumed mode method on Euler beam theory is employed and signal distortion is considered to obtain the performances of a MEMS accelerometer which are a sensitivity and measurable frequency range(MFR). Not only the sensitivities and MFR but also the variations of dynamic responses and natural frequencies of the MEMS accelerometer are investigated for several sets of beam properties such as length, width, thickness and Young's modulus. It is stated that the variations of beam properties significantly influence the performances of the MEMS accelerometer and the relationship between sensitivities and MFR is inversely proportional to each other.

• 대한기계학회논문집A
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• 제35권7호
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• pp.791-798
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• 2011

모든 기계 시스템의 변수는 불확실성을 가지고 이는 시스템 성능에 직접적인 영향을 미칠 뿐 아니라 생산성 감소를 야기한다. 특히 MEMS 시스템의 크기는 매우 작으므로 일반적인 기계 시스템에 비해 제조 공차는 상대적으로 커질 수 밖에 없다. 이 제조 공차에 의한 시스템 변수 불확실성은 MEMS 시스템의 성능과 제조 수율에 영향을 미친다. 본 연구에서는 두 가지의 불확실성 해석법을 이용하여 MEMS 가속도계의 시스템 변수 불확실성에 의한 성능의 불확실성 해석을 수행하고 성능분포 및 제조수율을 예측하였다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2004년도 ICCAS
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• pp.592-595
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• 2004

This paper presents a study on the development of a multi-sensing inertial sensor with a single mechanical structure, which can be used both as a gyroscope and an accelerometer. The proposed MEMS gyro-accelerometer is designed to detect the angular rate and the acceleration at the same time using two separate detection circuits for one proof mass. In this study, the detection and signal processing circuit for an effective signal processing of different inertial measurements is designed, fabricated, and tested. The experimental results show that the performances of the gyro-accelerometer have resolutions of 1mg and 0.025deg/sec and nonlinearities of less than 0.5% for the accelerometer and the gyroscope, respectively, which are similar results with those of sensors with different structures and different detection circuits. The size of the sensor is reduced almost by 50% comparing with the sensors of separated proof mass.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.1021-1022
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• 2010

• 한국전자통신학회논문지
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• 제8권6호
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• pp.831-837
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• 2013

MEMS 가속도계는 운동측정을 위하여 가속도신호를 해석하는 저비용의 방안이다. 이론적으로 변위는 가속도신호를 두 번 적분함으로서 계산될 수 있으나 실제적으로는 실제 존재하는 여러 가지 원인에 의해서 이 방법으로는 계산 될 수가 없다. 본 실험은 실제적인 가속도신호를 획득하여 저주파 운동해석을 위하여 처리하는 과정에 대하여 보여준다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1951-1956
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• 2008

Various MEMS accelerometers are used in engineering applications including automobiles, mobile phones, military systems, and electronic devices. Among them, the thermal accelerometer employing the temperature difference induced by the convective flow inside the micro cavity has been a topic of interest. As the convective sensor does not utilize a solid proof mass, it is compact, lightweight, inexpensive to manufacture, sensitive and highly endurable to mechanical shock. However, the complexity of the convective flow and various design constraints make optimization of a device a crucial step before fabrication. In this work, optimization of a 2-axis thermal convective MEMS accelerometer is conducted based on 3-dimensional numerical simulation. Parametric studies are performed by varying the several design variables such as the heater shape/size, the cavity size and types of the gas medium and the position of temperature probes in the sensor. The results of optimal design are presented.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2010년도 춘계학술대회 논문집
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• pp.626-627
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• 2010

• 전기학회논문지
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• 제64권9호
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• pp.1330-1336
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• 2015

It is necessary to study on acoustic and vibratory response of a MEMS resonant accelerometer before applying to military applications. In this paper, we analyze why the resonant accelerometer reacts to an acoustic wave and a high frequency vibration. And we describe experimental results on acoustic and vibratory response of the accelerometer. The accelerometer consists of a proof mass and a dual ended tuning fork. It is a differential resonant accelerometer with arranging a pair of accelerometers. The mode shape was analyzed to find out the input mode frequency by using a FEM simulation. Some experiments regarding the acoustic noise was carried out by using a tweeter and a microphone in the anechoic room. Results showed that the accelerometer reacted to the acoustic wave and vibration which had the input mode frequency as we had expected. We showed experimentally not only that the susceptibility of the accelerometer to an acoustic wave was 70 dB but also that the effectiveness of applying an acoustic absorber and a metal case was 20 dB, respectively. Also, we could minimize the vibratory response property of the accelerometer by installing a IMU with a silicone rubber mount pad.

• KEPCO Journal on Electric Power and Energy
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• 제6권4호
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• pp.405-411
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• 2020

In this paper, we designed the COS MEMS system for sensing the falling detection and explosive noise of fuse link in COS (Cut Out Switch) installing on the power distribution. This system analyzed the failure characteristics and an instantaneous breakdown of power distribution. Therefore, our system strengths the industrial competence and guaranties the stable power supply. In this paper, we applied BLE (Bluetooth Low Energy) technology which is suitable protocol for low data rate, low power consumption and low-cost sensor applications. We experimented with LSM6DSOX which is system-in-module featuring 3 axis digital accelerometer and gyroscope boosting in high-performance mode and enabling always-on low-power features for an optimal motion for the COS fuse holder. Also, we used the MP34DT05-A for gathering an ultra-compact, low power, omnidirectional, digital MEMS microphone built with a capacitive sensing element and an IC interface. The proposed COS MEMS system is developed based on nRF52 SoC (System on Chip), and contained a 3-axis digital accelerometer, a digital microphone, and a SD card. In this paper of experiment steps, we analyzed the performance of COS MEMS system with gathering the accelerometer raw data and the PDM (Pulse Data Modulation) data of MEMS microphone for broadcasting the failure of COS status.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 춘계학술대회논문집
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• pp.448-452
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• 2007

Many industrial operations require continuous or nearly-continuous operation of machines, which if interrupted can result in significant financial loss. The condition monitoring of these machines has received considerable attention recent years. Rapid developments in semiconductor, computing, and communication with a remote site have led to a new generation of sensor called "smart" sensors which are capable of wireless communication with a remote site. The purpose of this research is the development of smart sensor using which can on-line perform condition monitoring. This system is addressed to detect conditions that may lead to equipment failure when it is running. Moreover it will reduce condition monitoring expense using low cost MEMS accelerometer. This sensor can receive data in real-time or periodic time from MEMS accelerometer. Furthermore, this system is capable for signal preprocessing task (High Pass Filter, Low Pass Filter and Gain Amplifier) and analog to digital converter (A/D) which is controlled by CPU. A/D converter that converts 10bit digital data is used. This sensor communicates with a remote site PC using TCP/IP protocols. Wireless LAN contain IEEE 802.11i-PSK or WPA (PSK, TKIP) encryption. Developed sensor executes performance tests for data acquisition accuracy estimations.