• Title/Summary/Keyword: MEMS 가속도계

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Ground Test and Performance Evaluation of Miniaturized AHRS for Small-Scale UAV (소형무인항공기를 위한 소형 경량 AHRS의 지상시험 및 성능 평가)

  • Roh, Min-Shik;Song, Jun-Beom;Song, Woo-Jin;Kang, Beom-Soo
    • Journal of Advanced Navigation Technology
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    • v.15 no.2
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    • pp.181-188
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    • 2011
  • A small UAVs(Unmaned Aerial Vehicles) have limited by the payload capacity which requires miniaturization of a navigation system. In this paper, the performance of the lightweight and small sized AHRS(Attitude Heading Reference System), which is self-developed, is evaluated at low acceleration environment. The designed AHRS adopts the commercial low-cost MEMS sensors. A quaternion-based attitude calculation method, which eliminates singularity with relatively simple algebra, is used. In an attitude correction algorithm, the Kalman filter is used with accelerometers and magnetometers combined. The fabricated AHRS is also evaluated with reference to a COTS(Commercial Off-The-Shelf) AHRS which reports a number of successful applications to a small UAVs. The test results show that the measurements from the fabricated AHRS provide proper attitude output data with acceptable amount of differences(horizontal axis 0.5$^{\circ}$, vertical axis 1.5$^{\circ}$) in test environment.

Development of a MEMS Resonant Accelerometer Based on Robust Structural Design (강건 구조설계에 기반한 미소 공진형 가속도계의 개발)

  • Park, U-Sung;Boo, Sang-Pil;Park, Soo-Young;Kim, Do-Hyung;Song, Jin-Woo;Jeon, Jong-Up;Kim, Joon-Won
    • Journal of Sensor Science and Technology
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    • v.21 no.2
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    • pp.114-120
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    • 2012
  • This paper describes the design, fabrication and testing of a micromachined resonant accelerometer consisting of a symmetrical pair of proof masses and double-ended tuning fork(DETF) oscillators. Under the external acceleration along the input axis, the proof mass applies forces to the oscillators, which causes a change in their resonant frequency. This frequency change is measured to indicate the applied acceleration. Pivot anchor and leverage mechanisms are adopted in the accelerometer to generate larger force from a proof mass under certain acceleration, which enables increasing its scale factor. Finite element method analyses have been conducted to design the accelerometer and a silicon on insulator(SOI) wafer with a substrate glass wafer was used for fabricating it. The fabricated accelerometer has a scale factor of 188 Hz/g, which is shown to be in agreement with analysis results.

Velocity Control of Magnet-Type Automatic Pipe Cutting Machine and Measurement of Slipping Using MEMS-Type Accelerometer (자석식 자동 파이프 절단기의 정속제어와 MEMS 형 가속도계를 이용한 미끄럼 측정)

  • 김국환;이성환;임성수;이순걸
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.10a
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    • pp.475-478
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    • 2004
  • In this paper, a magnet-type automatic pipe cutting machine that binds itself to the surface of the pipe using magnetic force and executes unmanned cutting process is proposed. During pipe cutting process when the machine moves around the pipe laid vertical to the gravitational field, the gravity acting on the pipe cutting machine widely varies as the position of the machine varies. That is, with same driving force from the driving motor the cutting machine moves faster when it climbs down the surface of the pipe and moves slower when it climbs up to the top of the pipe. To maintain a constant velocity of the pipe cutting machine and improve the cutting quality, the authors adopted a conventional PID controller with a feedforward effort designed based on the encoder measurement of the driving motor. It is, however, impossible for the encoder at the motor to measure the absolute position and consequently the absolute velocity of the cutting machine in the case where the slip between the surface of the pipe and wheel of the cutting machine is not negligible. As an attempt to obtain a better estimation of the absolution angular position/velocity of the machine the authors proposes the use of the MEMS-type accelerometer which can measure static acceleration as well as dynamic acceleration. The estimated angular velocity of the cutting machine using the MEMS-type accelerometer measurement is experimentally obtained and it indicates the significant slipping of the machine during the cutting process.

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A Study on Acoustic and Vibratory Response of a MEMS Resonant Accelerometer (공진형 MEMS 가속도계의 음향가진 반응특성 연구)

  • Lee, Sang Woo;Lee, Hyung Sub;Yu, Myeong-Jong;Kim, Do Hyung
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.64 no.9
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    • pp.1330-1336
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    • 2015
  • It is necessary to study on acoustic and vibratory response of a MEMS resonant accelerometer before applying to military applications. In this paper, we analyze why the resonant accelerometer reacts to an acoustic wave and a high frequency vibration. And we describe experimental results on acoustic and vibratory response of the accelerometer. The accelerometer consists of a proof mass and a dual ended tuning fork. It is a differential resonant accelerometer with arranging a pair of accelerometers. The mode shape was analyzed to find out the input mode frequency by using a FEM simulation. Some experiments regarding the acoustic noise was carried out by using a tweeter and a microphone in the anechoic room. Results showed that the accelerometer reacted to the acoustic wave and vibration which had the input mode frequency as we had expected. We showed experimentally not only that the susceptibility of the accelerometer to an acoustic wave was 70 dB but also that the effectiveness of applying an acoustic absorber and a metal case was 20 dB, respectively. Also, we could minimize the vibratory response property of the accelerometer by installing a IMU with a silicone rubber mount pad.

Structural Health Monitoring of Harbor Structures using Imote2-Platformed Smart Wirless Sensor Node (Imote2 플랫폼 기반 스마트 무선센서노드를 이용한 항만구조물 건전성 모니터링)

  • Park, Jae-Hyung;Lee, So-Young;Kim, Jeong-Tae
    • Proceedings of the Computational Structural Engineering Institute Conference
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    • 2011.04a
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    • pp.307-310
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    • 2011
  • 본 연구에서는 항만 구조물의 구조건전성 모니터링을 위한 Imote2 센서 플랫폼 기반의 스마트 무선센서의 적용성을 평가하였다. 이를 위해 먼저, 고민감도 MEMS 가속도계를 탑재한 Imote2 센서 플랫폼 기반스마트 무선센서를 설계하였다. 둘째, 스마트 무선센서노드의 독자적인 구조 상태 모니터링을 위한 내장소프트웨어를 설계하였다. 마지막으로, 모형 케이슨 구조물의 진동실험을 통해 개발된 스마트 무선센서의 성능을 검증하였다.

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Design of a Compact GPS/MEMS IMU Integrated Navigation Receiver Module for High Dynamic Environment (고기동 환경에 적용 가능한 소형 GPS/MEMS IMU 통합항법 수신모듈 설계)

  • Jeong, Koo-yong;Park, Dae-young;Kim, Seong-min;Lee, Jong-hyuk
    • Journal of Advanced Navigation Technology
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    • v.25 no.1
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    • pp.68-77
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    • 2021
  • In this paper, a GPS/MEMS IMU integrated navigation receiver module capable of operating in a high dynamic environment is designed and fabricated, and the results is confirmed. The designed module is composed of RF receiver unit, inertial measurement unit, signal processing unit, correlator, and navigation S/W. The RF receiver performs the functions of low noise amplification, frequency conversion, filtering, and automatic gain control. The inertial measurement unit collects measurement data from a MEMS class IMU applied with a 3-axis gyroscope, accelerometer, and geomagnetic sensor. In addition, it provides an interface to transmit to the navigation S/W. The signal processing unit and the correlator is implemented with FPGA logic to perform filtering and corrrelation value calculation. Navigation S/W is implemented using the internal CPU of the FPGA. The size of the manufactured module is 95.0×85.0×.12.5mm, the weight is 110g, and the navigation accuracy performance within the specification is confirmed in an environment of 1200m/s and acceleration of 10g.

Performance Evaluation of Imote2-Platformed Wireless Smart Sensor Node for Health Monitoring of Harbor Structures (항만구조물 건전성 모니터링을 위한 Imote2 플랫폼 기반 스마트 무선센서노드의 성능 평가)

  • Park, Jae-Hyung;Kim, Jeong-Tae;Lee, So-Young
    • Journal of Korean Society of Coastal and Ocean Engineers
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    • v.23 no.1
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    • pp.26-33
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    • 2011
  • In this study, a high-sensitive smart wireless sensor based on an Imote2 sensor platform is developed for structural health monitoring of harbor structures. To achieve the objective, the following approaches are implemented. Firstly, the smart wireless sensor based on the high-performance Imote2 sensor platform is designed to measure acceleration with high sensitivity from structures. Secondly, embedded software is designed for autonomous structural health monitoring. Finally, the performance of the smart wireless sensor is estimated from experimental tests on a lab-scaled caisson structure.

A Study on the Fabrication of the Lateral Accelerometer using SOG(Silicon On Glass) Process (SOG(Silicon On Glass)공정을 이용한 수평형 미소가속도계의 제작에 관한 연구)

  • Choi, Bum-Kyoo;Chang, Tae-Ha;Lee, Chang-Kil;Jung, Kyu-Dong;Kim, Jong-Pal
    • Journal of Sensor Science and Technology
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    • v.13 no.6
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    • pp.430-435
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    • 2004
  • The resolution of the accelerometer, fabricated with MEMS technology is mainly affected by mechanical and electrical noise. To reduce mechanical noise, we have to increase mass of the structure part and quality factor related with the degree of vacuum packaging. On the other hand, to increase mass of the structure part, the thickness of the structure must be increased and ICP-RIE is used to fabricate the high aspect ratio structure. At this time, footing effect make the sensitivity of the accelerometer decreasing. This paper presents a hybrid SOG(Silicon On Glass) Process to fabricate a lateral silicon accelerometer with differential capacitance sensing scheme which has been designed and simulated. Using hybrid SOG Process, we could make it a real to increase the structural thickness and to prevent the footing effect by deposition of metal layer at the bottom of the structure. Moreover, we bonded glass wafer to structure wafer anodically, so we could realize the vacuum packaging at wafer level. Through this way, we could have an idea of controlling of quality factor.

Feedback Control for Expanding Range and Improving Lineraity of Microaccelerometers (가속도계의 동작범위 확장와 선형성 향상을 위한 피드백 제어)

  • Park, Yong-Hwa;Park, Sang-Jun;Choi, Byung-Doo;Ko, Hyoung-Ho;Song, Tae-Yong;Lim, Genu-Won;Huh, Kun-Soo;Park, Jahng-Hyon;Cho, Dong-il
    • Journal of Institute of Control, Robotics and Systems
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    • v.10 no.11
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    • pp.1082-1088
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    • 2004
  • This paer presents a feedback-controlled, MEMS-fabricated microaccelerometer($\mu$XL). The $\mu$XL has received much commercial attraction, but its performance is generally limited. To improve the open-loop performance, a feedback controller is designed and experimentally evaluated. The feedback controller is applied to the x/y-axis $\mu$XL fabricated by sacrificial bulk micromachining(SBM) process. Even though the resolution of the closed-loop system is slightly worse than open-loop system, the bandwidth, linearity, and bias stability are stability are significantly improved. The noise equivalent resolution of open-loop system is 0.615 mg and that of closed-loop system is 0.864 mg. The bandwidths of open-loop and closed-loop system are over 100Hz. The input range, non-linearity and bias stability are improved from $\pm10\;g\;to\;\pm18g$, from 11.1%FSO to 0.86%FSO, and from 0.221 mg to 0.128 mg by feedback control, respectively.

Guidance Filter Design Based on Strapdown Seeker and MEMS Sensors (스트랩다운 탐색기 및 MEMS 센서를 이용한 유도필터 설계)

  • Yun, Joong-Sup;Ryoo, Chang-Kyung;Song, Taek-Lyul
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.37 no.10
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    • pp.1002-1009
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    • 2009
  • Precision guidance filter design for a tactical missile with a strapdown seeker aided by low-cost strapdown sensors has been addressed in this paper. The low-cost strapdown sensors consist of an IMU with 3-axis accelerometers and gyroscopes, 3-axis magnetometers, and a barometer. Missile's position, velocity, attitude, and bias error of the barometer are considered as state variables. Since the state and measurement equations are highly nonlinear, we adopt UKF(Unscented Kalman Filter). The proposed guidance filter has a function of a navigation filter if target position error is not considered. In the case that the target position error is introduced, the proposed filter can effectively estimate the relative states of the missile to the true target. For specific engagement scenarios, we can observe that observability problems occur.