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http://dx.doi.org/10.5302/J.ICROS.2004.10.11.1082

Feedback Control for Expanding Range and Improving Lineraity of Microaccelerometers  

Park, Yong-Hwa (서울대학교 전기컴퓨터공학부)
Park, Sang-Jun (서울대학교 전기컴퓨터공학부)
Choi, Byung-Doo (서울대학교 전기컴퓨터공학부)
Ko, Hyoung-Ho (서울대학교 전기컴퓨터공학부)
Song, Tae-Yong (서울대학교 전기컴퓨터공학부)
Lim, Genu-Won (서울대학교 전기컴퓨터공학부)
Huh, Kun-Soo (한양대학교 기계공학부)
Park, Jahng-Hyon (한양대학교 기계공학부)
Cho, Dong-il (서울대학교 전기컴퓨터공학부)
Publication Information
Journal of Institute of Control, Robotics and Systems / v.10, no.11, 2004 , pp. 1082-1088 More about this Journal
Abstract
This paer presents a feedback-controlled, MEMS-fabricated microaccelerometer($\mu$XL). The $\mu$XL has received much commercial attraction, but its performance is generally limited. To improve the open-loop performance, a feedback controller is designed and experimentally evaluated. The feedback controller is applied to the x/y-axis $\mu$XL fabricated by sacrificial bulk micromachining(SBM) process. Even though the resolution of the closed-loop system is slightly worse than open-loop system, the bandwidth, linearity, and bias stability are stability are significantly improved. The noise equivalent resolution of open-loop system is 0.615 mg and that of closed-loop system is 0.864 mg. The bandwidths of open-loop and closed-loop system are over 100Hz. The input range, non-linearity and bias stability are improved from $\pm10\;g\;to\;\pm18g$, from 11.1%FSO to 0.86%FSO, and from 0.221 mg to 0.128 mg by feedback control, respectively.
Keywords
microaccelerometer; feedback control; modeling; simulation;
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