Feedback Control for Expanding Range and Improving Lineraity of Microaccelerometers |
Park, Yong-Hwa
(서울대학교 전기컴퓨터공학부)
Park, Sang-Jun (서울대학교 전기컴퓨터공학부) Choi, Byung-Doo (서울대학교 전기컴퓨터공학부) Ko, Hyoung-Ho (서울대학교 전기컴퓨터공학부) Song, Tae-Yong (서울대학교 전기컴퓨터공학부) Lim, Genu-Won (서울대학교 전기컴퓨터공학부) Huh, Kun-Soo (한양대학교 기계공학부) Park, Jahng-Hyon (한양대학교 기계공학부) Cho, Dong-il (서울대학교 전기컴퓨터공학부) |
1 | Y. H. Cho, B. M. Kwak, A. P. Pisano, and R. T. Howe, 'Viscous energy dissipation in laterally oscillating planar microstructures: A theoretical and experimental study' Proc. IEEE Workshop on Microelectro-mech. Sys., pp. 93-99,1993 DOI |
2 | B. R. Munson 'Fundamentals of Fluid Mechanics', 2nd edition |
3 | S. Lee, S. Park, J. Kim, S. Yi, and D. Cho, 'Surface/bulk micromachined single-crystalline silicon micro-gyroscope', IEEE/ASME Journal of Microelectromechanical Systems, vol. 9, no. 4, pp. 557-567, 2000 DOI ScienceOn |
4 | C. Song, 'Commercial vision of silicon based inertial sensors', Proceeding of Transducer '97, vol. 2, pp. 839-842,1997 DOI |
5 | S. Lee, S. Park, and D. Cho, 'The surface/bulk micromachining(SBM) process: a new method for fabricating released microelectromechanical systems in single crystal silicon', IEEE/ASME Journal of Microelectromechanical Systems, vol. 8, no. 4, pp. 409-416, 1999 DOI ScienceOn |
6 | D. Cho, S. Lee, and S. Park, 'Surface/bulk micromachined high performance silicon microgyroscope' 2000 Solid-state Sensor and Actuator Workshop (Hilton Head), 2000 |