• Title/Summary/Keyword: MEMS 가속도계

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Prediction of the Performance Distributions and Manufacturing Yields of a MEMS Accelerometer (MEMS 가속도계의 성능분포 및 제조수율 예측)

  • Kim, Yong-Il;Yoo, Hong-Hee
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.35 no.7
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    • pp.791-798
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    • 2011
  • All mechanical-system parameters have uncertainty, and this uncertainty directly affects system performances and results in a decrease in the manufacturing outputs. In particular, since the size of a MEMS system is extremely small, the manufacturing tolerances of a MEMS system are relatively large when compared to the tolerances of a macro-scale system. High manufacturing tolerances result from an increase in the uncertainty of the system parameters, thereby affecting the performances and manufacturing yields. In this paper, the performance uncertainty of a MEMS accelerometer due to system parameter uncertainty is analyzed by using several uncertainty analysis methods. Finally, the performance distributions and manufacturing yields of the MEMS accelerometer are predicted.

Displacement Estimation using MEMS Accelerometer for Low Frequency Motion (저주파운동해석을 위한 MEMS 가속도계를 이용한 변위 추정)

  • Young, Tan She;Park, Soo-Hong
    • The Journal of the Korea institute of electronic communication sciences
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    • v.8 no.6
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    • pp.831-837
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    • 2013
  • MEMS accelerometer provides a low cost alternative in retrieving the acceleration signal for motion sensing. Theoretically, displacement can be calculated by double integrate the acceleration signal. However, in practical, it could not be done in straight forward manner due to several factors that exist in the real world. This experiment focuses on the processes from practical accelerometer signal acquisition till the result of double integration for low frequency vertical motion.

Optimal Design of a Convective MEMS Accelerometer (열대류형 초소형 가속도계의 최적 설계)

  • Park, Byoung-Kyoo;Kim, Joon-Won;Moon, Il-Kwon;Kim, Dong-Sik
    • Proceedings of the KSME Conference
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    • 2008.11a
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    • pp.1951-1956
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    • 2008
  • Various MEMS accelerometers are used in engineering applications including automobiles, mobile phones, military systems, and electronic devices. Among them, the thermal accelerometer employing the temperature difference induced by the convective flow inside the micro cavity has been a topic of interest. As the convective sensor does not utilize a solid proof mass, it is compact, lightweight, inexpensive to manufacture, sensitive and highly endurable to mechanical shock. However, the complexity of the convective flow and various design constraints make optimization of a device a crucial step before fabrication. In this work, optimization of a 2-axis thermal convective MEMS accelerometer is conducted based on 3-dimensional numerical simulation. Parametric studies are performed by varying the several design variables such as the heater shape/size, the cavity size and types of the gas medium and the position of temperature probes in the sensor. The results of optimal design are presented.

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Development and Verification of ELT System Using the MEMS Accelerometer (MEMS 가속도계를 적용한 ELT 시스템 개발과 검증)

  • Lee, Sang-Chul;Lee, Dong-Kyu;Kang, Ja-Young
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.38 no.3
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    • pp.294-299
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    • 2010
  • ELT(Emergency Locator Transmitter) is used to send distress signal in the event of an aircraft crash. It is very useful but the ELT may transmit wrong signal caused by misjudging between crash and hard-landing. The reason of this problem is the low accuracy of the mechanical G-switch currently in use. To improve the ELT, we developed an ELT system using the MEMS(Micro Electro-Mechanical Sensor) accelerometer. The ELT system consists of acceleration data acquisition/analysis system, program of crash recognition, and GPS receiving system for the position information of an aircraft crash site. A free-drop table was developed for verification of the ELT system. The free-drop table was designed to replicate the acceleration and the pulse duration of the hard landing and the crash. By using the free-drop table, we showed that the ELT system performed well.

Development of MEMS Accelerometer-based Smart Sensor for Machine Condition Monitoring (MEMS 가속도계 기반 기계 상태감시용 스마트센서 개발)

  • Son, Jong-Duk;Yang, Bo-Suk
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2007.05a
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    • pp.448-452
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    • 2007
  • Many industrial operations require continuous or nearly-continuous operation of machines, which if interrupted can result in significant financial loss. The condition monitoring of these machines has received considerable attention recent years. Rapid developments in semiconductor, computing, and communication with a remote site have led to a new generation of sensor called "smart" sensors which are capable of wireless communication with a remote site. The purpose of this research is the development of smart sensor using which can on-line perform condition monitoring. This system is addressed to detect conditions that may lead to equipment failure when it is running. Moreover it will reduce condition monitoring expense using low cost MEMS accelerometer. This sensor can receive data in real-time or periodic time from MEMS accelerometer. Furthermore, this system is capable for signal preprocessing task (High Pass Filter, Low Pass Filter and Gain Amplifier) and analog to digital converter (A/D) which is controlled by CPU. A/D converter that converts 10bit digital data is used. This sensor communicates with a remote site PC using TCP/IP protocols. Wireless LAN contain IEEE 802.11i-PSK or WPA (PSK, TKIP) encryption. Developed sensor executes performance tests for data acquisition accuracy estimations.

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Attitude Estimation Method through Attitude Comparison for Micro Aerial Vehicle (자세 비교를 통한 초소형 비행체의 자세 추정 기법)

  • 임종남;박찬국
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.34 no.8
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    • pp.63-70
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    • 2006
  • Due to the small size and weight of micro aerial vehicle (MAV), only miniaturized MEMS type sensors are applicable for MAV autonomous flight system. In this paper, we propose a accelerometer and gyro mixing algorithm to improve an attitude performance of MEMS type sensors. The performance of the proposed mixing algorithm is compared with the performance of fuzzy-based mixing algorithm through simulation. The simulation results show that the attitude compensation method through the attitude compensation has better performance than the fuzzy-based mixing method for MAV attitude estimation.

Efficiency Test for Low Electric Power Type and MEMS Based 3-axis Accelerometer (저전력 MEMS 기반 3축 가속도계의 성능 시험)

  • Lee, Byeung-Leul;Lee, Seung-Jae;Moon, Dae-Joong;Jung, Jin-Woo
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.18 no.1
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    • pp.160-165
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    • 2014
  • In this study, an efficiency test was performed by fabricating MEMS (Micro Electro Mechanical Systems) based 3-axis acceleration sensor modules and an earthquake monitoring system was composed. Data acquisition device (NI-9239) with a 24bit ADC (Analog to Digital Converter) was used for improving the performance of 3-axis acceleration sensor modules and filtered data (100Hz Low Pass Filter) was used for reducing noises. Also this paper focused on detecting meaningful vibration in the building by developing the earthquake monitoring software. If vector sum of 3-axis acceleration is greater than the preset value, the value will be recorded and saved to the file.