• 대한기계학회논문집A
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• 제35권9호
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• pp.1015-1020
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• 2011

최근, MEMS/NEMS 기술을 이용하여 기능성 나노 구조물을 제작하기 위한 공정기술 중에, 마스터 스템프에 형성된 나노패턴을 웨이퍼 등에 복제할 수 있는 나노임프린트 리소그래피 기술이 활발히 연구되고 있다. 본 연구에서는 기존 멀티헤드방식 나노임프린팅 장비에서 사용되던 전동모터를 대신하여 플렉셔 메커니즘과 결합된 나노스템프를 구동하기 위한 사각 형상의 중공형 압전액추에이터를 설계, 제작하였으며, 제조공정이 다른 각각의 시제품의 변위, 발생력 및 응답특성에 관한 검토를 수행한다. 또한, 압전 액추에이터의 변위제어에 대한 제어수법을 간단히 소개하였으며, 제작한 프로토타입의 PI제어기에 의한 변위 제어결과를 소개한다.

• 한국전기전자재료학회논문지
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• 제24권6호
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• pp.433-439
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• 2011

Poly Si TFTs (poly silicon thin film transistors) with p channel those are annealed HT (high temperature) with gate poly crystalline silicon and LT (low temperature) with metal gate electrode were fabricated on quartz substrate using the analyzed data and compared according to the activated grade silicon thin films and the size of device channel. The electrical characteristics of HT poly-Si TFTs increased those are the on current, electron mobility and decrease threshold voltage by the quality of particles of active thin films annealed at high temperature. But the on/off current ratio reduced by increase of the off current depend on the hot carrier applied to high gate voltage. Even though the size of the particles annealed at low temperature are bigger than HT poly-Si TFTs due to defect in the activated grade poly crystal silicon and the grain boundary, the characteristics of LT poly-Si TFTs were investigated deterioration phenomena those are decrease the electric off current, electron mobility and increase threshold voltage. The results of transconductance show that slope depend on the quality of particles and the amplitude depend on the size of the active silicon particles.

• KSTLE International Journal
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• 제6권2호
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• pp.33-38
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• 2005

Submicron-scale patterns made of polymethyl methacrylate (PMMA) were fabricated on silicon-wafer using a capillarity-directed soft lithographic technique. Polyurethane acrylate (PUA) stamps (Master molds) were used to fabricate the patterns. Patterns with three different aspect ratios were fabricated by varying the holding time. The patterns fabricated were the negative replica of the master mold. The patterns so obtained were investigated for their adhesion and friction properties at nano-scale using AFM. Friction tests were conducted in the range of 0-80 nN. Glass (Borosilicate) balls of diameter 1.25 mm mounted on cantilever (Contact Mode type NPS) were used as tips. Further, micro-friction tests were performed using a ball-on-flat type micro-tribe tester, under reciprocating motion, using a soda lime ball (1 mm diameter) under a normal load of 3,000 mN. All experiments were conducted at ambient temperature ($24{\pm}1^{\circ}C$) and relative humidity ($45{\pm}5\%$). Results showed that the patterned samples exhibited superior tribological properties when compared to the silicon wafer and non-patterned sample (PMMA thin film) both at the nano and micro-scales, owing to their increased hydrophobicity and reduced real area of contact. In the case of patterns it was observed that their morphology (shape factor and size factor) was decisive in defining the real area of contact.

• Advances in nano research
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• 제14권3호
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• pp.211-224
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• 2023

This work presents a modified analytical model for the bending behavior of axially functionally graded (AFG) carbon nanotubes reinforced composite (CNTRC) nanobeams. New higher order shear deformation beam theory is exploited to satisfy parabolic variation of shear through thickness direction and zero shears at the bottom and top surfaces.A Modified continuum nonlocal strain gradient theoryis employed to include the microstructure and the geometrical nano-size length scales. The extended rule of the mixture and the molecular dynamics simulations are exploited to evaluate the equivalent mechanical properties of FG-CNTRC beams. Carbon nanotubes reinforcements are distributed axially through the beam length direction with a new power graded function with two parameters. The equilibrium equations are derived with associated nonclassical boundary conditions, and Navier's procedure are used to solve the obtained differential equation and get the response of nanobeam under uniform, linear, or sinusoidal mechanical loadings. Numerical results are carried out to investigate the impact of inhomogeneity parameters, geometrical parameters, loadings type, nonlocal and length scale parameters on deflections and stresses of the AFG CNTRC nanobeams. The proposed model can be used in the design and analysis of MEMS and NEMS systems fabricated from carbon nanotubes reinforced composite nanobeam.

• Steel and Composite Structures
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• 제49권4호
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• pp.361-380
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• 2023

A size dependent bending behavior of piezoelectrical flexoelectric layered perforated functionally graded (FG) composite nanobeam rested on an elastic foundation is investigated analytically. The composite beam is composed of regularly cutout FG core and two piezoelectric face sheets. The material characteristics is graded through the core thickness by power law function. Regular squared cutout perforation pattern is considered and closed forms of the equivalent stiffness parameters are derived. The modified nonlocal strain gradient elasticity theory is employed to incorporate the microstructure as well as nonlocality effects into governing equations. The Winkler as well as the Pasternak elastic foundation models are employed to simulate the substrate medium. The Hamiltonian approach is adopted to derive the governing equilibrium equation including piezoelectric and flexoelectric effects. Analytical solution methodology is developed to derive closed forms for the size dependent electromechanical as well as mechanical bending profiles. The model is verified by comparing the obtained results with the available corresponding results in the literature. To demonstrate the applicability of the developed procedure, parametric studies are performed to explore influences of gradation index, elastic medium parameters, flexoelectric and piezoelectric parameters, geometrical and peroration parameters, and material parameters on the size dependent bending behavior of piezoelectrically layered PFG nanobeams. Results obtained revealed the significant effects both the flexoelectric and piezoelectric parameters on the bending behavior of the piezoelectric composite nanobeams. These parameters could be controlled to improve the size dependent electromechanical as well as mechanical behaviors. The obtained results and the developed procedure are helpful for design and manufacturing of MEMS and NEMS.

• Advances in nano research
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• 제16권3호
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• pp.289-301
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• 2024

In this work, an analytical model employing a new higher-order shear deformation beam theory is utilized to investigate the bending behavior of axially randomly oriented functionally graded carbon nanotubes reinforced composite nanobeams. A modified continuum nonlocal strain gradient theory is employed to incorporate both microstructural effects and geometric nano-scale length scales. The extended rule of mixture, along with molecular dynamics simulations, is used to assess the equivalent mechanical properties of functionally graded carbon nanotubes reinforced composite (FG-CNTRC) beams. Carbon nanotube reinforcements are randomly distributed axially along the length of the beam. The equilibrium equations, accompanied by nonclassical boundary conditions, are formulated, and Navier's procedure is used to solve the resulting differential equation, yielding the response of the nanobeam under various mechanical loadings, including uniform, linear, and sinusoidal loads. Numerical analysis is conducted to examine the influence of inhomogeneity parameters, geometric parameters, types of loading, as well as nonlocal and length scale parameters on the deflections and stresses of axially functionally graded carbon nanotubes reinforced composite (AFG CNTRC) nanobeams. The results indicate that, in contrast to the nonlocal parameter, the beam stiffness is increased by both the CNTs volume fraction and the length-scale parameter. The presented model is applicable for designing and analyzing microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) constructed from carbon nanotubes reinforced composite nanobeams.

• 한국전산구조공학회논문집
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• 제20권3호
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• pp.287-292
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• 2007

일반적으로 고전적인 탄성이론에서 매크로 스케일의 구조물의 물성은 구조물의 사이즈에 영향을 받지 않는다. 그 이유는 구조물 전체 체적에 대한 표면의 비율이 매우 작기 때문에 표면의 효과를 무시할 수 있기 때문이다. 그러나, 구조물 전체의 부피에 대한 표면의 비율이 커지게 되면 표면의 효과가 매우 중요한 역할을 하게 되며 지배적으로 나타나게 된다. 특히 나노 박막이나 나노 빔 등 나노 스케일의 구조물에서는 표면효과의 영향을 반드시 고려하여야만 한다. 분자 동역학 시뮬레이션은 이러한 나노 스케일의 구조물 역학적 해석을 위해서 그간 사용되어 온 일반적인 방법이었으나, 과도하게 요구되는 계산시간과 전산자원의 한계로 인해 여전히 수 나노 초 동안에 $10^6{\sim}10^9$개의 원자들에 대한 시뮬레이션이 가능한 정도이다. 따라서 실제적으로 MEMS/NEMS 분야에서 사용되는 서브마이크 스케일에서 마이크로 스케일의 구조물의 분자동역학 시뮬레이션을 통한 해석은 가능하나 설계를 목적으로 했을 때는 현실적이지 못하다. 따라서 본 연구에서는 이러한 분자 동역학 시뮬레이션 기법의 단점을 보완하고자 나노 스케일의 매우 작은 구조물에서 지배적으로 나타나는 표면효과를 고려할 수 있는 연속체 기반의 모델을 제시하고자 한다. 특히 본 논문에서는 박막구조물의 해석을 위하여 고전적인 Kirchhoff 평판이론을 바탕으로 표면효과를 고려할 수 있도록 하는 연속체 모델을 제안하고 이를 바탕으로 유한요소해석을 수행하여 그 해석 결과를 분자 동역학 시뮬레이션 결과와 비교하였다.

• 전기화학회지
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• 제14권3호
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• pp.163-170
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• 2011

첨가제 농도, 전류밀도, 도금용액 pH가 Ni 박막의 잔류응력, 표면형상, 미세조직에 미치는 영향을 관찰하기 위하여 chloride 도금용액으로부터 나노결정립 Ni 박막이 제조되었다. Ni 박막에서 잔류응력은 첨가제인 saccharin의 농도가 증가함에 따라 인장응력모드(약 150 MPa)로부터 압축응력모드(약 -100 MPa)로의 천이가 관찰되었다. Ni 박막의 미세구조는 도금용액 내에 saccharin의 유무에 따라 변화되었다. Saccharin이 첨가되지 않은 도금용액으로부터 전기도금된 Ni 박막은 주로 FCC(111) 과 FCC(200) 상들로 구성되어 있다. 그러나 Saccharin이 첨가된 도금용액으로부터 전기도금된 Ni 박막은 FCC(111), FCC(200), FCC (311) 상[때로는 FCC (220)]들로 구성되어 있다. 전류밀도는 Ni 박막의 잔류응력에 영향을 미치는 것으로 관찰되었다. $2.5\sim2.5{\mu}10mA{\cdot}cm^{-2}$의 전류밀도에서 가장 낮은 압축응력 값(약 -100 MPa)을 나타내었다. 도금용액의 pH 도 역시 Ni 박막의 잔류응력에 영향을 미쳤다. 한편, 도금용액에 saccharin의 첨가는 Ni 박막의 결정립 크기에 영향을 나타내었다. Saccharin이 첨가되지 않은 경우 Ni 박막의 결정립 크기가 약 60 nm로 측정되었으며, saccharin 함량이 0.0005 M 이상 첨가된 경우 Ni 박막의 결정립 크기가 24~38 nm로 측정되었다. Ni 박막의 표면 형상은 saccharin이 첨가됨에 따라 nodular 형상으로부터 매끄러운 (smooth) 형상으로 변화되었다.