Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
권호 표지
DOI QR코드

DOI QR Code

Study on Basic Characteristics of Hollow Piezoelectric Actuator for Driving Nanoscale Stamp

나노스템프 구동용 중공형 압전액추에이터 기본특성에 관한 연구

  • Park, Jung-Ho (Energy Plant Research Division, Korea Institute of Machinery & Materials) ;
  • Lee, Hu-Seung (Energy Plant Research Division, Korea Institute of Machinery & Materials) ;
  • Lee, Jae-Jong (Nano Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery & Materials) ;
  • Yun, So-Nam (Energy Plant Research Division, Korea Institute of Machinery & Materials) ;
  • Ham, Young-Bog (Energy Plant Research Division, Korea Institute of Machinery & Materials) ;
  • Jang, Sung-Cheol (Dept. of Aviation Mechatronics, Korea Aviation Polytechnic)
  • 박중호 (한국기계연구원 에너지플랜트연구본부) ;
  • 이후승 (한국기계연구원 에너지플랜트연구본부) ;
  • 이재종 (한국기계연구원 나노융합. 생산시스템연구본부) ;
  • 윤소남 (한국기계연구원 에너지플랜트연구본부) ;
  • 함영복 (한국기계연구원 에너지플랜트연구본부) ;
  • 장성철 (한국폴리텍항공대학 항공메카트로닉스과)
  • Received : 2010.12.16
  • Accepted : 2011.07.18
  • Published : 2011.09.01
Download PDF
⟨ Previous Next ⟩

Abstract

Nanoimprint lithography has been actively investigated. This method can replicate a nanopatterned master stamp onto a thin polymer film on a silicon substrate and so on. In this study, a square-shaped hollow piezoelectric actuator is presented, which is newly developed. This actuator is used for driving a nanoscale stamp in nanoimprint lithography instead of a conventional electric motor. The fabricated prototype actuator has 95 layers and side lengths of 23 mm and 18 mm for the outer and inner squares, respectively. By adopting a novel process instead of the conventional forming process for fabricating a one-layer actuator, the one-layer is composed of four rectangular segments produced by sawing a ceramic film with a thickness of 0.3 mm. The basic characteristics on displacement and generation force of the fabricated prototype actuator are experimentally investigated. Furthermore, the displacement characteristics obtained by using a PI controller are tested and discussed.

최근, MEMS/NEMS 기술을 이용하여 기능성 나노 구조물을 제작하기 위한 공정기술 중에, 마스터 스템프에 형성된 나노패턴을 웨이퍼 등에 복제할 수 있는 나노임프린트 리소그래피 기술이 활발히 연구되고 있다. 본 연구에서는 기존 멀티헤드방식 나노임프린팅 장비에서 사용되던 전동모터를 대신하여 플렉셔 메커니즘과 결합된 나노스템프를 구동하기 위한 사각 형상의 중공형 압전액추에이터를 설계, 제작하였으며, 제조공정이 다른 각각의 시제품의 변위, 발생력 및 응답특성에 관한 검토를 수행한다. 또한, 압전 액추에이터의 변위제어에 대한 제어수법을 간단히 소개하였으며, 제작한 프로토타입의 PI제어기에 의한 변위 제어결과를 소개한다.

Keywords

References

  1. Lee, J.-J., Park, S.-Y., Choi, K.-B. and Kim, G.-H., 2008, "Nano-Scale Patterning Using the Roll Typed UV-Nanoimprint Lithography Tool," Microelectronic Engineering, Vol. 85, No. 5-6, pp. 861-865. https://doi.org/10.1016/j.mee.2007.12.059
  2. Ishii, Y. and Taniguchi, J., 2007, "Fabrication of Three-Dimensional Nanoimprint Mold Using Inorganic Resit in Low Accelerating Voltage Electron Beam Lithography," Microelectronic Engineering, Vol. 84, pp. 912-915. https://doi.org/10.1016/j.mee.2007.01.133
  3. Park, S.-Y., Choi, K.-B., Kim, G.-H. and Lee, J.-J., 2009, "Nanoscale Patterning with the Double- Layered Soft Cylindrical Stamps by Means of UVNanoimprint Lithography," Microelectronic Engineering, Vol. 86, No. 4, pp. 604-607. https://doi.org/10.1016/j.mee.2008.12.074
  4. Hsueh, C.-H., et al, 2006, "Analyses of Mechanical Failure in Nanoimprint Processes," Materials Science and Engineering A 433, pp. 316-322. https://doi.org/10.1016/j.msea.2006.06.106
  5. Jang, H. S., Kim, G. H., Lee, J. J. and Choi, K. B., 2010, "Eliminating the Undercut Phenomenon in Interference Lithography for the Fabrication of Nano-Imprint Lithography Stamp," Current Applied Physics, Vol. 10, pp. 1436-1441. https://doi.org/10.1016/j.cap.2010.05.009
  6. Park, J.-H., Lee, H.-S., Lee, J.-J., Choi, K.-B. Yun, S.-N., Ham, Y.-B. and Wang, Y.-S., 2010, "Basic Characteristics of Hollow Piezoelectric Actuator for Positioning Nanoscale Stamp," Proceedings of ACTUATOR 2010, pp. 597-600.
  7. Park, S.-Y., Kim, G.-H., Choi, K.-B. and Lee, J.-J., 2010, "Fabrication of a 3D Stamp with the Microand Nano-Scale Patterens Through Combined NIL and Optical Lithography Processes," Microelectronic Engineering, Vol. 87, pp. 968-971. https://doi.org/10.1016/j.mee.2009.11.132