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http://dx.doi.org/10.3795/KSME-A.2011.35.9.1015

Study on Basic Characteristics of Hollow Piezoelectric Actuator for Driving Nanoscale Stamp  

Park, Jung-Ho (Energy Plant Research Division, Korea Institute of Machinery & Materials)
Lee, Hu-Seung (Energy Plant Research Division, Korea Institute of Machinery & Materials)
Lee, Jae-Jong (Nano Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery & Materials)
Yun, So-Nam (Energy Plant Research Division, Korea Institute of Machinery & Materials)
Ham, Young-Bog (Energy Plant Research Division, Korea Institute of Machinery & Materials)
Jang, Sung-Cheol (Dept. of Aviation Mechatronics, Korea Aviation Polytechnic)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.35, no.9, 2011 , pp. 1015-1020 More about this Journal
Abstract
Nanoimprint lithography has been actively investigated. This method can replicate a nanopatterned master stamp onto a thin polymer film on a silicon substrate and so on. In this study, a square-shaped hollow piezoelectric actuator is presented, which is newly developed. This actuator is used for driving a nanoscale stamp in nanoimprint lithography instead of a conventional electric motor. The fabricated prototype actuator has 95 layers and side lengths of 23 mm and 18 mm for the outer and inner squares, respectively. By adopting a novel process instead of the conventional forming process for fabricating a one-layer actuator, the one-layer is composed of four rectangular segments produced by sawing a ceramic film with a thickness of 0.3 mm. The basic characteristics on displacement and generation force of the fabricated prototype actuator are experimentally investigated. Furthermore, the displacement characteristics obtained by using a PI controller are tested and discussed.
Keywords
Piezoelectric Actuator; Nanoimprint Lithography; Hollow Actuator; Nanoscale Stamp;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
Times Cited By SCOPUS : 0
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