Study on Basic Characteristics of Hollow Piezoelectric Actuator for Driving Nanoscale Stamp
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Park, Jung-Ho
(Energy Plant Research Division, Korea Institute of Machinery & Materials)
Lee, Hu-Seung (Energy Plant Research Division, Korea Institute of Machinery & Materials) Lee, Jae-Jong (Nano Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery & Materials) Yun, So-Nam (Energy Plant Research Division, Korea Institute of Machinery & Materials) Ham, Young-Bog (Energy Plant Research Division, Korea Institute of Machinery & Materials) Jang, Sung-Cheol (Dept. of Aviation Mechatronics, Korea Aviation Polytechnic) |
1 | Park, S.-Y., Kim, G.-H., Choi, K.-B. and Lee, J.-J., 2010, "Fabrication of a 3D Stamp with the Microand Nano-Scale Patterens Through Combined NIL and Optical Lithography Processes," Microelectronic Engineering, Vol. 87, pp. 968-971. DOI ScienceOn |
2 | Lee, J.-J., Park, S.-Y., Choi, K.-B. and Kim, G.-H., 2008, "Nano-Scale Patterning Using the Roll Typed UV-Nanoimprint Lithography Tool," Microelectronic Engineering, Vol. 85, No. 5-6, pp. 861-865. DOI ScienceOn |
3 | Ishii, Y. and Taniguchi, J., 2007, "Fabrication of Three-Dimensional Nanoimprint Mold Using Inorganic Resit in Low Accelerating Voltage Electron Beam Lithography," Microelectronic Engineering, Vol. 84, pp. 912-915. DOI ScienceOn |
4 | Park, S.-Y., Choi, K.-B., Kim, G.-H. and Lee, J.-J., 2009, "Nanoscale Patterning with the Double- Layered Soft Cylindrical Stamps by Means of UVNanoimprint Lithography," Microelectronic Engineering, Vol. 86, No. 4, pp. 604-607. DOI ScienceOn |
5 | Hsueh, C.-H., et al, 2006, "Analyses of Mechanical Failure in Nanoimprint Processes," Materials Science and Engineering A 433, pp. 316-322. DOI ScienceOn |
6 | Jang, H. S., Kim, G. H., Lee, J. J. and Choi, K. B., 2010, "Eliminating the Undercut Phenomenon in Interference Lithography for the Fabrication of Nano-Imprint Lithography Stamp," Current Applied Physics, Vol. 10, pp. 1436-1441. DOI ScienceOn |
7 | Park, J.-H., Lee, H.-S., Lee, J.-J., Choi, K.-B. Yun, S.-N., Ham, Y.-B. and Wang, Y.-S., 2010, "Basic Characteristics of Hollow Piezoelectric Actuator for Positioning Nanoscale Stamp," Proceedings of ACTUATOR 2010, pp. 597-600. |
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