• Particle and aerosol research
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• v.5 no.3
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• pp.95-109
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• 2009

A low temperature plasma process has been widely used for semiconductor fabrication and can also be applied for the preparation of solar cell, MEMS or NEMS, but they are notorious in the point of particle contamination. The nano-sized particles can be generated in the low temperature plasma process and they can induce several serious defects on the performance and quality of microelectronic devices and also on the cost of final products. For the preparation of high quality thin films of high efficiency by the low temperature plasma process, it is desirable to increase the deposition rate of thin films with reducing the particle contamination in the plasmas. In this paper, we introduced the studies on the generation and growth of nanoparticles in the low temperature plasmas and tried to introduce the recent interesting studies on nanoparticle generation in the plasma reactors.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.2
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• pp.112-115
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• 2011

To stabilize the electric characteristic of Silicon Thin Film Transistor, reducing the current leakage is most important issue. To reduce the current leakage, many ideas were suggested. But the increase of mask layer also increased the cost. On this research Bird's Beak process was use to present element. Using Silvaco simulator, it was proven that it was able to reduce current leakage without mask layer. As a result, it was possible to suggest the structure that can reduce the current leakage to 1.39nA without having mask layer increase. Also, I was able to lead the result that electric characteristic (on/off current ratio) was improved compare from conventional structure.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.702-707
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• 2005

The equations of motion of the structure, which is a small scale cantilever beam considering electrostatic force, squeeze film damping and van der Waals force are obtained employing Galerkin's method based on Euler beam theory. The influence of each force is investigated fur changing the size of a small scale cantilever beam which assumed uniform shape. Also the forces which are affected by the required size of a small scale cantilever beam for manufacturing are forecasted.

• Advances in nano research
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• v.12 no.6
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• pp.617-627
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• 2022

In the current study, the nonlinear impact of the Von-Kármán theory on the vibrational response of nonhomogeneous structures of functionally graded (FG) nano-scale tubes is investigated according to the nonlocal theory of strain gradient theory as well as high-order Reddy beam theory. The inhomogeneous distributions of temperature-dependent material consist of ceramic and metal phases in the radial direction of the tube structure, in which the thermal stresses are applied due to the temperature change in the thickness of the pipe structure. The general motion equations are derived based on the Hamilton principle, and eventually, the acquired equations are solved and modeled by the Meshless approach as well as a computer simulation via intelligent mathematical methodology. The attained results are helpful to dissect the stability of the MEMS and NEMS.

• Advances in nano research
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• v.15 no.3
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• pp.203-213
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• 2023

The possibility of energy harvesting as well as vibration of a three-layered beam consisting of two piezoelectric layers and one core layer made of nonpiezoelectric material is investigated using nonlocal strain gradient theory. The three-layered nanobeam is resting on an elastic foundation. Hamilton's principle is used to derive governing equations and associated boundary conditions. The generalized differential quadrature method (GDQM) was used to discretize the equations, and the Newmark beta method was used to solve them. The size-dependency of the elastic foundation is considered using two-phase elasticity. The equations, as well as the solution procedure, are validated utilizing some compassion studies. This work can be a basis for future studies on energy harvesting of small scales.

• Journal of the Korean Society for Nondestructive Testing
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• v.32 no.4
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• pp.393-400
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• 2012

In recent years, nano-structured thin film systems are often applied in industries such as MEMS/NEMS device, optical coating, semiconductor or like this. Thin films are used for many and varied purpose to provide resistance to abrasion, erosion, corrosion, or high temperature oxidation and also to provide special magnetic or dielectric properties. Quite a number of articles to evaluate the characterization of thin film structure such as film density, film grain size, film elastic properties, and film/substrate interface condition were reported. Among them, the evaluation of film adhesive to substrate has been of great interest. In this study, we fabricated the polymeric thin film system with different adhesive conditions to evaluate the adhesive condition of the thin film. The nano-structured thin film system was fabricated by spin coating method. And then V(z) curve technique was applied to evaluate adhesive condition of the interface by measuring the surface acoustic wave(SAW) velocity by scanning acoustic microscope(SAM). Furthermore, a nano-scratch technique was applied to the systems to obtain correlations between the velocity of the SAW propagating within the system including the interface and the shear adhesive force. The results show a good correlation between the SAW velocities measured by acoustic spectroscope and the critical load measured by the nano-scratch test. Consequently, V(z) curve method showed potentials for characterizing the adhesive conditions at the interface by acoustic microscope.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.496-501
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• 2007

Recently, as MEMS and NEMS devices have been widely used in the various engineering applications, the characteristics of nanoscale systems are investigated in the limelight. However, as opposed to a macroscale system, the identification of the state of nanoscale systems is extremely hard because they can include only the order of $10^{3}\sim10^{5}$ molecules, which requires highly expensive and accurate experimental apparatus for an investigation. This limitations make the study on nanoscale system use computer simulations. Therefore, it is strongly required to identify the state of nanoscale system simulated in computer simulation. In these molecular dynamics(MD) study, we suggest that the potential energy of individual molecule can be used as criterion for defining the state of clusters or nanoscale systems. In addition, we compared the phase state from the potential energy with one from the radial distribution function(RDF) for verification. The comparison showed that the intermolecular potential energy can be used as a criteria distinguishing the phase state of nanoscale systems (This study will be published soon in the KSME transaction of the section B).

• Tribology and Lubricants
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• v.19 no.4
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• pp.230-236
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• 2003

In applications such as MEMS and NEMS devices, the adhesion force and contact load may be of the same order of magnitude and the static friction coefficient can be very large. Such large coefficient may result in unacceptable and possibly catastrophic adhesion, stiction, friction and wear. To obtain the static friction coefficient of contacting real surfaces without the assumption of an empirical coefficient value, numerical simulations of the contact load, tangential force, and adhesion force are preformed. The surfaces in dry contact are statistically modeled by a collection of spherical asperities with Gaussian height distribution. The asperity micro-contact model utilized in calculation (the ZMC model), considers the transition from elastic deformation to fully plastic flow of the contacting asperity. The force approach of the modified DMT model using the Lennard-Jones attractive potential is applied to characterize the intermolecular forces. The effect of the surface topography on the static friction coefficient is investigated for cases rough, intermediate, smooth, and very smooth, respectively. Results of the static friction coefficient versus the external force are presented for a wide range of plasticity index and surface energy, respectively. Compared with those obtained by the GW and CEB models, the ZMC model is more complete in calculating the static friction coefficient of rough surfaces.

• Electronics and Telecommunications Trends
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• v.27 no.1
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• pp.1-18
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• 2012

미래 사회는 나노기술(NT)을 바탕으로 IT-ET-BT 기술이 융합된 유비쿼터스 사회로 진화하고 있으며, 미래 산업 사회로의 전환을 위해서는 성능개선이 아닌 성능한계 돌파의 패러다임 전환이 가능한 임계성능의 나노 소재/신소자의 개발이 절실히 요구되고 있다. 또한 차세대 단말기는 휴대성의 편리함, 융복합화/다기능화, 인간 친화형이 요구되고, flexible/stretchable/bendable한 형태로 발전하고 있는 상황이다. 나노 피에조트로닉스(nanopiezotronics) 기술은 역학적 에너지를 전기적 에너지로 변환하는 나노 발전 소자(nanogenerator)의 원리를 기반으로 하며 나노선, 나노벨트와 같은 1차원적 나노구조 소재의 압전성과 반전도성이 결합된 특성을 이용한 신기능의 미래 IT 융합 나노 전자/에너지 소자를 구현하는 기술로서 미래 유망 기술로 부각되고 있다. 현재 기술 수준은 압전 전계 효과 트랜지스터, 압전-다이오드, 압전 센서, 압전 나노 발전 소자 등과 같은 prototype 소자를 제작하는 수준에 머무르고 있으나 향후 초고감도 압전 센서, 자가발전 MEMS/NEMS 및 나노 시스템, 스마트 웨어러블 시스템, 건강 모니터링 시스템, 인체 삽입형 소자, portable 및 투명 유연 전자소자 등의 다양한 미래 융합 나노 소자 및 시스템에 광범위한 활용이 가능하며, 향후 신기능의 소자/부품/시스템 창출을 위한 기술로 자리매김할 것으로 전망된다. 본고에서는 압전 나노선, 나노튜브, 나노섬유 등의 1차원적 나노구조체 기반의 nanopiezotronics 기술과 최근의 연구결과들을 소개한다.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.31 no.5
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• pp.435-447
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• 2007

Recently, as MEMS and NEMS devices have been widely used in the various engineering applications, the characteristics of nanoscale systems are investigated in the limelight. However, as opposed to a macroscale system, the identification of the state of nanoscale systems is extremely hard because they can include only the order of $10^3{\sim}10^5$ molecules, which requires highly expensive and accurate experimental apparatus for an investigation. This limitations make the study on nanoscale system use computer simulations. Therefore, it is strongly required to identify the state of nanoscale system simulated in computer simulation. In this molecular dynamics(MD) study, we suggest that the potential energy of individual molecule can be used as criterion for defining the state of clusters or nanoscale systems. In addition, we compared the phase state from the potential energy with one from the radial distribution function(RDF) for verification. The comparison showed that the intermolecular potential energy can be used as a criteria distinguishing the phase state of nanoscale systems.