• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권4호
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• pp.261-268
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• 1999

Laser-induced thermochemical etching has been recognized as a new powerful method for processing a variety of materials, including metals, semiconductors, ceramics, insulators and polymers. This study presents characteristics of direct etching for Si substrate using focused argon ion laser beam in aqueous KOH and $CCl_2F_2$ gas. In order to determine process conditions, we first theoretically investigated the temperature characteristics induced by a CW laser beam with a gaussian intensity distribution on a silicon surface. Major process parameters are laser beam power, beam scan speed and reaction material. We have achieved a very high etch rate up to $434.7\mum/sec$ and a high aspect ratio of about 6. Potential applications of this laser beam etching include prototyping of micro-structures of MEMS(micro electro mechanical systems), repair of devices, and isolation of opto-electric devices.

• Journal of Information Processing Systems
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• 제1권1호
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• pp.49-54
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• 2005

With the recent advances in Micro Electro Mechanical System (MEMS) technology, low cost and low power consumption wireless micro sensor nodes have become available. However, energy-efficient routing is one of the most important key technologies in wireless sensor networks as sensor nodes are highly energy-constrained. Therefore, many researchers have proposed routing protocols for sensor networks, especially cluster-based routing protocols, which have many advantages such as reduced control messages, bandwidth re-usability, and improved power control. Some protocols use information on the locations of sensor nodes to construct clusters efficiently. However, it is rare that all sensor nodes know their positions. In this article, we propose another cluster-based routing protocol for sensor networks. This protocol does not use information concerning the locations of sensor nodes, but uses the remaining energy of sensor networks and the desirable number of cluster heads according to the circumstances of the sensor networks. From performance simulation, we found that the proposed protocol shows better performance than the low-energy adaptive clustering hierarchy (LEACH).

• KSII Transactions on Internet and Information Systems (TIIS)
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• 제6권11호
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• pp.2901-2919
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• 2012

Recent research in MEMS (Micro-Electro-Mechanical Systems) and wireless communication has enabled tracking of continuous objects, including fires, nuclear explosions and bio-chemical material diffusions. This paper proposes an energy-efficient scheme that detects and tracks different dynamic shapes of a continuous object (i.e., the inner and outer boundaries of a continuous object). EBCO (Efficient Boundary detection and tracking of Continuous Objects in WSNs) exploits the sensing capabilities of sensor nodes by automatically adjusting the sensing range to be either a boundary sensor node or not, instead of communicating to its neighboring sensor nodes because radio communication consumes more energy than adjusting the sensing range. The proposed scheme not only increases the tracking accuracy by choosing the bordering boundary sensor nodes on the phenomenon edge, but it also minimizes the power consumption by having little communication among sensor nodes. The simulation result shows that our proposed scheme minimizes the energy consumption and achieves more precise tracking results than existing approaches.

• Smart Structures and Systems
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• 제6권5_6호
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• pp.641-659
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• 2010

Structural Health Monitoring (SHM) gradually becomes a technique for ensuring the health and safety of civil infrastructures and is also an important approach for the research of the damage accumulation and disaster evolving characteristics of civil infrastructures. It is attracting prodigious research interests and the active development interests of scientists and engineers because a great number of civil infrastructures are planned and built every year in mainland China. In a SHM system the sheer number of accompanying wires, fiber optic cables, and other physical transmission medium is usually prohibitive, particularly for such structures as offshore platforms and long-span structures. Fortunately, with recent advances in technologies in sensing, wireless communication, and micro electro mechanical systems (MEMS), wireless sensor technique has been developing rapidly and is being used gradually in the SHM of civil engineering structures. In this paper, some recent advances in the research, development, and implementation of wireless sensors for the SHM of civil infrastructures in mainland China, especially in Dalian University of Technology (DUT) and Harbin Institute of Technology (HIT), are introduced. Firstly, a kind of wireless digital acceleration sensors for structural global monitoring is designed and validated in an offshore structure model. Secondly, wireless inclination sensor systems based on Frequency-hopping techniques are developed and applied successfully to swing monitoring of large-scale hook structures. Thirdly, wireless acquisition systems integrating with different sensing materials, such as Polyvinylidene Fluoride(PVDF), strain gauge, piezoresistive stress/strain sensors fabricated by using the nickel powder-filled cement-based composite, are proposed for structural local monitoring, and validating the characteristics of the above materials. Finally, solutions to the key problem of finite energy for wireless sensors networks are discussed, with future works also being introduced, for example, the wireless sensor networks powered by corrosion signal for corrosion monitoring and rapid diagnosis for large structures.

• 한국항행학회논문지
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• 제25권1호
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• pp.68-77
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• 2021

본 논문에서는 높은 동특성 환경에서 동작이 가능한 GPS/MEMS IMU 통합항법 수신모듈을 설계 및 제작하고, 그 결과를 확인하였다. 설계한 모듈은 RF 수신부, 관성측정부, 신호처리부, 상관기, 항법 S/W로 구성된다. RF 수신부는 저잡음증폭, 주파수 변환, 필터링, 자동이득조절 기능을 수행하고, 관성측정부는 3축 자이로스코프, 가속도계, 지자기센서가 적용된 MEMS급 IMU로부터 측정 데이터를 수집하여 항법S/W로 전달하는 인터페이스를 제공한다. 신호처리부 및 상관기는 FPGA 로직으로 구현하여 필터링 및 상관 값 계산을 수행하고, FPGA 내부 CPU를 사용하여 위성항법, 통합항법 S/W를 구현하였다. 제작된 모듈의 크기는 95.0 × 85.0 × 12.5 mm 이고, 무게는 110g을 확인하였으며, 동적성능 1200m/s, 가속도 10g의 환경에서 규격 이내의 항법정확도 성능을 확인하였다.

• KIEE International Transactions on Electrophysics and Applications
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• 제5C권6호
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• pp.264-269
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• 2005

The electrostatic comb drive actuator is one of the main building blocks in the field of micro electro-mechanical systems (MEMS). Most of the comb actuators presented previously have fingers that are rectangular in shape which produce a stable, constant force output during actuation. The use of sawtooth fixed fingers in a comb drive, which were presumed to produce an increasing force output with displacement due to the increased number of regions where fringing force, the driving force of comb actuators, appear. The dimensions of the sawtooth were derived from finite element analysis (FEA) of simplified finger models with sawtooth type fingers of various dimension and were compared to the rectangular finger model that showed that the sawtooth type fingers have $7\~9$ times stronger driving force. Finally, comb drive actuators with sawtooth type and rectangular fingers were fabricated and although the gap was bigger, the comb actuator with sawtooth type fingers showed about 1.7 times greater electrostatic force than the one with rectangular fingers at equal driving voltages. In conclusion, using the proposed sawtooth type comb fingers in a comb drive makes it possible to increase its displacement or reduce the driving voltage.

• 한국기계가공학회지
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• 제20권9호
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• pp.104-109
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• 2021

Tactile sensors and integrated circuits that detect external stimuli have been developed for use in various industries. Most tactile sensors have been developed using the MEMS(micro electro-mechanical systems) process in which metal electrodes and strain sensors are applied to a silicon substrate. However, tactile sensors made of highly brittle silicon lack flexibility and are prone to damage by external forces. Flexible tactile sensors based on polydimethylsiloxane and using a multi-walled carbon nano-tube mixture as a pressure-sensitive material are currently being developed as an alternative to overcome these limitations. In this study, a manufacturing process of pressure-sensitive materials with low initial electrical resistance is developed and applied to the fabrication of flexible tactile sensors. In addition, flexible tactile sensors are developed with pressure-sensitive materials dispensed on a substrate with flexible mechanical properties. Finally, a study is conducted on the change in electrical resistance of pressure-sensitive materials according to the modulus of elasticity of the substrate.

• 한국전기전자재료학회논문지
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• 제27권1호
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• pp.61-69
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• 2014

In this paper, we have researched semiconductor optical filters to solve the problem of the high failure rate that are recognize bad of financial account, jam of financial account and the ATM service interruption due to failure of accurate location information among the operation of the ATM (automatic teller machine) systems. A semiconductor optical filters that have high resolution and less diffuse, high transmittance are able to detect the information of financial account surface accurately. Therefore, it is a stable filter that is able to minimize the incidence of disability. In this paper, we drew the determinants by element for implement an excellent semiconductor optical filters. Based on this, we had to be able to implement the semiconductor optical filter that is able to be mounted on the actual ATM system through future studies.

• 대한임베디드공학회논문지
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• 제17권4호
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• pp.239-247
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• 2022

The existing studies on the localization in the GNSS (Global Navigation Satellite System) denied environment usually exploit low-cost MEMS IMU (Micro Electro Mechanical Systems Inertial Measurement Unit) sensors to replace the GNSS signals. However, the navigation system still requires GNSS signals for the normal environment. This paper presents an integrated GNSS/INS (Inertial Navigation System) navigation system which combines GNSS and multiple IMU sensors using extended Kalman filter in partially GNSS-denied environments. The position and velocity of the INS and GNSS are used as the inputs to the integrated navigation system. The Mahalanobis distance is used for novelty detection to detect the outlier of GNSS measurements. When the abnormality is detected in GNSS signals, GNSS data is excluded from the fusion process. The performance of the proposed method is evaluated using MATLAB/Simulink. The simulation results show that the proposed algorithm can achieve a higher degree of positioning accuracy in the partially GNSS-denied environment.

• 한국지구과학회지
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• 제34권6호
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• pp.588-601
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• 2013

최근 지구물리 물리탐사 분야에서 경사각과 방위각 정보는 시추공 물리검층 및 물리탐사 자료보정을 위한 시추공 편차검층, 이동형 실시간 자료획득 시스템, 기타 지구물리 모니터링 시스템 등 다양하게 활용되면서 그 중요성이 높아지고 있다. 특히 최근 셰일가스의 개발이 가능하게 한 방향시추 기술에서도 경사각과 방위각 정보는 필수일 정도로 그 응용범위가 매우 넓다. 따라서 여러 분야에 응용될 수 있는 경사각과 방위각 측정 시스템의 초소형 옥외 저전력 운용이 절실해졌다. 본 논문에서는 최신 CMOS 저전력, 고성능 MCU 및 멤스(MEMS) 자세방위기준장치(AHRS)를 도입하여 초소형, 저전력으로 제작된 다용도 야외시험용 실시간 경사각과 방위각 연속 측정 시스템 개발 연구의 결과를 제시하고자 한다. 시스템은 최소 지름 42 mm의 존데 내에 설치될 수 있도록 초슬림 형태로 제작되었으며 실시간 데이터 획득이 가능할 뿐만 아니라 엔코더, DGPS 연동으로 운용 확장이 가능하여 다양한 응용이 기대된다.