A Study on the Etching Mechanism of (Ba,Sr)$TiO_3$ Thin Films using MEICP
(MEICP에 의한 (Ba,Sr)$TiO_3$ 박막의 식각 메커니즘에 관한 연구)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2000.04b
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- pp.52-55
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- 2000