• Title/Summary/Keyword: M3W

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Dry Etching of GaAs and AlGaAs in Diffuion Pump-Based Capacitively Coupled BCl3 Plasmas (확산펌프 기반의 BCl3 축전결합 플라즈마를 이용한 GaAs와 AlGaAs의 건식 식각)

  • Lee, S.H.;Park, J.H.;Noh, H.S.;Choi, K.H.;Song, H.J.;Cho, G.S.;Lee, J.W.
    • Journal of the Korean Vacuum Society
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    • v.18 no.4
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    • pp.288-295
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    • 2009
  • We report the etch characteristics of GaAs and AlGaAs in the diffusion pump-based capacitively coupled $BCl_3$ plasma. Process variables were chamber pressure ($50{\sim}180$ mTorr), CCP power ($50{\sim}200\;W$) and $BCl_3$ gas flow rate ($2.5{\sim}10$ sccm). Surface profilometry was used for etch rate and surface roughness measurement after etching. Scanning electron microscopy was used to analyze the etched sidewall and surface morphology. Optical emission spectroscopy was used in order to characterize the emission peaks of the $BCl_3$ plasma during etching. We have achieved $0.25{\mu}m$/min of GaAs etch rate with only 5 sccm $BCl_3$ flow rate when the chamber pressure was in the range of 50{\sim}130 mTorr. The etch rates of AlGaAs were a little lower than those of GaAs at the conditions. However, the etch rates of GaAs and AlGaAs decreased significantly when the chamber pressure increased to 180 mTorr. GaAs and AlGaAs were not etched with 50 W CCP power. With $100{\sim}200\;W$ CCP power, etch rates of the materials increased over $0.3{\mu}m$/min. It was found that the etch rates of GaAs and AlGaAs were not always proportional to the increase of CCP power. We also found the interesting result that AlGaAs did not etched at 2.5 sccm $BCl_3$ flow rate at 75 mTorr and 100 W CCP power even though it was etched fast like GaAs with more $BCl_3$ gas flow rates. By contrast, GaAs was etched at ${{\sim}}0.3{\mu}m$/min at the 2.5 sccm $BCl_3$ flow rate condition. A broad molecular peak was noticed in the range of $500{\sim}700\;mm$ wavelength during the $BCl_3$ plasma etching. SEM photos showed that 10 sccm $BCl_3$ plama produced more undercutting on GaAs sidewall than 5 sccm $BCl_3$ plasma.

A Compact Metamaterial Chip Antenna with Ground Coupling Structure for Bluetooth Application (Ground Coupling 구조를 이용한 초소형 Metamaterial Bluetooth 칩 안테나)

  • Park, Young-Hwan;Lee, Kang-Hee;Ji, Jeong-Keun;Ryu, Ji-Woong;Kim, Gi-Ho;Seong, Won-Mo
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.20 no.9
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    • pp.930-935
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    • 2009
  • This paper describes a miniaturezed metamaterial BT chip antenna for mobile devices. The size of the proposed antenna is $3.0\;mm(W){\times}2.0\;mm(L){\times}1.2\;mm(H)$. And it is fabricated by chip type. The zeroth-order resonant properties are analyzed by magnitude and phase distributions of the surface current using surface current scanning system. The antenna offers omni-directional radiation patterns and measured 3D average gain is over - 1.7 dBi.

Effect of a Pulsed Nd:YAG laser irradiation on human gingival tissues (파동형 Nd:YAG 레이저조사가 인체 치은조직에 미치는 영향)

  • Kang, Kyung-Dong;Kim, Chun-Suk;Kim, Hyung-Soo;Kim, Hyun-Seop;Kim, Byung-Ock;Han, Kyung-Yoon
    • Journal of Periodontal and Implant Science
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    • v.26 no.4
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    • pp.989-1002
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    • 1996
  • The purpose of this study was to determine the effect of a pulsed Nd:YAG laser irradiation on human gingival tissues. The patients, who were planned to be treated by clinical crown lengthening procedure and gingivectomy, were selected. All the patients received oral hygiene instruction, scaling and root planing at preoperation. The crest of gingival tissue on upper and lower anterior teeth was irradiated by a pulsed Nd:YAG laser(El. EN. EN060, Italy) with a fiber optic of 300 m in contact mode for 20 seconds. Gingival tissues were divided into 4 groups according to the laser power of 1.0W(10Hz, 100mJ), 2.0W(20Hz, 100mJ), 3.0W(30Hz, 100mJ) and 4.0W(40Hz, 100mJ). Immediately after the laser irradiation, the specimens were excised, fixed 10% neutral formalin, sectioned $4-6{\mu}m$ thick, stained by Hematoxylin-Eosin and Periodic Acid Schiff stain and observed under light microscope. The removed tissue depth and the coagulated layer depth due to a laser irradiation by a laser irradiation were measured on the microphotographs. The difference of measurements according to the different laser power was statistical1y analyzed by Kruskal Wallis Test with SAS program. The results were as follows : 1. In histologic findings of irradiated gingival tissues; a. In the irradiated gingival specimen with 1.0W laser power, some vesicles were observed in limited superficial layer of gingival epithelium. b. In the irradiated gingival specimen with 2.0W and 3.0W laser power, the epithelium was almost removed except for the traces of viable basal cell remnants at ret peg, and coagulation necrosis related with the thermal effect of laser was noted. c. In the irradiated gingival specimen with 4.0W laser power, complete removal of epithelium, partial removal of underlying connective tissue, and the coagulation necrosis of subjacent gingival tissue were shown. 2. The removed tissue depth was deeper in the irradiated specimens with higher power. There was a statistical significance in the difference of removed tissue depth between 1.0W group ($44.54{\pm}6.99um$) and 3.0W group ($99.75{\pm}6.64{\mu}m$), and between 1.0W group($44.54{\pm}6.99{\mu}m$) and 4.0W group($111.36{\pm}4.50{\mu}m$), and between 2.0W group($98.01{\pm}4.53{\mu}m$) and 4.0W group($111.36{\pm}4.50{\mu}m$)(P<0.05). 3. The coagulated layer depth was deeper in the irradiated specimens with higher power. There was a statistical significance in the difference of coagulated layer depth between 1.0W group($31.82{\pm}8.99{\mu}m$) and 3.0W group($55.99{\pm}20.94{\mu}m$), and between 1.0W group($31.82{\pm}8.99{\mu}m$) and 4.0W group($83.68{\pm}10.34{\mu}m$)(P<0.05). From this study, the results demonstrated that the effects of a pulsed Nd:YAG laser irradiation on gingival tissues seemed to depend on the laser power and that the irradiation with high power could be harmful to adjacent healthy tissue.

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Medium Composition of Enterobacter cloacae YJ-1 for Maximizing Hydrogen Production (수소생산 증진을 위한 Enterobacter cloacae YJ-1의 배지조성)

  • Lee Ki-Seok;Kang Chang-Min;Chung Seon-Yong
    • KSBB Journal
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    • v.20 no.5 s.94
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    • pp.350-354
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    • 2005
  • In order to maximize hydrogen production by Enterobacter cloacae YJ-1, anaerobic hydrogen producing bacteria, the medium composition was optimized. Glucose was better than other carbon sources in hydrogen production and its production was 975.4 mL/L at $2\%$ (w/v) for 48 h. Organic nitrogen sources were more effective than inorganic nitrogen sources and also yeast extract among organic nitrogens was the most effective in hydrogen production. Among metal ions, $Na_2MoO_4$ was most effective, and its production was 1753.3mL/L at $0.04\%$ (w/v). Addition of amino acid was very effective with compare to another components of medium, and cystein was most effective among them. Under the optimum medium obtained in batch culture, semi-batch culture in order to produce continuous hydrogen was run. The highest hydrogen production was earned at $3\%$(w/v) of glucose and the amount was 2215.4 mL/L.

Sonolysis of Trichloroethylene in a Continuous Flow Reactor with the Multi Ultrasound Irradiation (연속식 다중 초음파 반응조에서 TCE의 초음파 분해)

  • Lee, Min-Ju;Oh, Je-Ill
    • Journal of Korean Society of Environmental Engineers
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    • v.31 no.6
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    • pp.419-427
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    • 2009
  • To test applicability for continuous flow treatment of ultrasound technology, sonolysis of TCE aqueous solution using 584 kHz multi irradiation reactor was performed under batch and continuous flow conditions. Under batch condition (3 and 4 sides irradiation, 600 W), first order degradation rate constant of TCE was higher under 4 sides than 3 sides irradiation conditions, while the generation of $H_2O_2$ and chloride was similar under both irradiation conditions. Under continuous flow condition with 4 sides irradiation, removal efficiencies of TCE in steady-state were decreased from 83 to 48% with increasing flow rate from 67 to 300 mL/min at 600 W, and were increased from 14 to 75% with increasing acoustic power from 100 to 600 W at 100 mL/min. Removal efficiency of TCE in groundwater was decreased 10% compared to in distilled water at 100 mL/min and 600 W.

Standardization of MPEG Multimedia Middleware

  • Kim, Hendry-And-munchurl
    • The Magazine of the IEIE
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    • v.32 no.9 s.256
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    • pp.74-83
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    • 2005
  • Recently, MPEG (Moving Picture Experts Group) has started a new standardization activity called MPEG Multimedia Middleware (M3W). This activity covers the standardization for a middleware rrith a set of APIs. The standard middleware, called M3W, will support independent multimedia applications for hardware and software such as operating systems so that the portability and interoperability of multimedia applications are greatly improved. In this article, we will introduce the recent works on M3W standardization including the rationale that motivates the activity with the advantages of having the standardized middleware for multimedia application, component technologies being considered for the M3W, and the current status of the standardization.

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Stuides on the Cutting Methods of the Self-feeding Type Combine -on the Mixed Cutting Method (1)-on the Mixed Cutting Method(I) (자탈형 콤바인의 예취작업법에 관한 연구 -혼합예취법을 중심으로 (제1보)-)

  • 최복연
    • Magazine of the Korean Society of Agricultural Engineers
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    • v.18 no.2
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    • pp.4096-4104
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    • 1976
  • This experiment was carried out to investigate the efficient turning method which will be able to use every cutting methods, to calculate the width of the center field which must transpose from rotary cutting method to return cutting method, to investigate the effects of L/W and unit field on the operation efficiency. The results are summarized as follows: 1. In case of cutting in the outer field, the efficient turning method is the "$\alpha$" type turning method (half U-shaped turning method) at the first rotation, is the "$\beta$" type turning method (T-shaped turning method) at the second to fourth rotation. 2. In case of cutting in the inner field, the efficient turning method which takes the least turning time is the "a" type turning method ($\Delta$-shaped turning method). 3. The width of the center field (W') changes by the length-width ratio (L/W) and width (W), W' is 9.0m in case that L/W is 2.5 and W is 30m. 4. The larger L/W and area of unit field (A) become, the more operation efficiency (E) increases, and the limits that E is affected signicantly by L/W is 2 to 3.5 and A is within 5,000$m^2$. within 5,000$m^2$.

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A Study on the Marginal Fit of Dental Prosthesis According to the W/P Ratio of Investment (매몰재의 혼수비가 치관 보철물 변연의 적합성에 미치는 영향에 관한 연구)

  • Hwang, Kyung-Sook
    • Journal of Technologic Dentistry
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    • v.18 no.1
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    • pp.67-72
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    • 1996
  • This test is verifying for influence of W/P ratio of investment upon dental prosthesis Firstly we made 40 MOD die and divide 4 groups, each group take 0.2 different w/p ratio grade such as 0.35, 0.37, 0.39 and 0.41. The method of data analysis applied were by ANOVA, Tukey test and Mann-Whiney and Kruskal Wallis test. The finding of this study were as follows : 1. The 0.37 w/p ratio group showed most accurte margin due to $15.8{\mu}m$ gap between margin and die which keep up with manufacture's instruction and 0.35 w/p ratio group was followed as second accuracy group o 새 $48.3{\mu}m$ gap between margin and die, 0.39 w/p ratio group showed $101{\mu}m$ gap and 0.41 w/p ratio group showed $129.8{\mu}m$ gap. 2. As to the relationship of the margin accuracy between 4 different grade of w/p ratio groups, each group was statistically significant(P<0.01). Also the all groups were statistically significant except between 0.35 and 0.37 groups between 0.39 and 0.41 groups, and between 0.35 and 0.39 groups. 3. A consequence of Mann-Whitney & Kruskal-Wallis test for marginal accuracy between 4 different grade of w/p ratio was statistically significant as same as above ANOVA test result. Also Tukey test for verifying similarity from each group showed same as above.

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MORDERN METHODS FOR TUNNEL (지하철 터널 굴착공법)

  • Heo, Jin
    • Journal of the Korean Professional Engineers Association
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    • v.14 no.3
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    • pp.9-21
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    • 1981
  • The rationalization for Tunnel Drifting is based on the high productivity which is achievable due to Continuous work with a Jumbo Drill, resulting in a much higher efficiency them the Conventional method of blasting, mucking and supporting services. Large projects of over 4,000m Tunnel Drifting are condidated to justify the use of a Jumbo Drill with a combination of superior explosives, machinery and techniques. During a Tunnel Drifting test, Gulita, Nabit and slurry made by Nitro Nobel were employed with following results. 1, Conditions: a. Granite Rock with Two free face b. Burden (W), 2m c. Diameter of hole, 42mm d. Depth of hole 3.5m e. Hole pitch 0.6m f. Charged Explosive per hole Gelatin Dynamite 4 pieces (112.5${\times}$4ea)+Guuita 5 pieces(110g${\times}$5ea) g. Simal-taneous Detonation h. After the blasting resultant rock size was Less 40% of the 0.3m Lumps. 2. Calculation results W=q/Wn=100cm‥‥‥Burden in simultaneous blasting 0.865kg(7.7ea)/hole ‥‥‥Amount of charge but hole pitch is 1.5W-2W The estimated cost of using a Jumbo Drill for the Construction of a 3,000,000 bbL sub-surface oil storage would be as follows: This calculation is based on the Jumbo Drill advancing 3.6m per blasting cycle. Unit cost/bbL Excavation $3.13 The attached sheet shows ideal Drilling pattern with Burn Cut & Smooth blasting method. In conclusion, it is my opinion that this method will assure safety and save cost and improve our technical know-how.

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Characteristics and classification of landform relieves on mountains and valleys with bedrock types (기반암별 산지와 곡지의 지형 기복 특성과 유형)

  • Lee, Gwang-Ryul
    • Journal of The Geomorphological Association of Korea
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    • v.21 no.4
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    • pp.1-17
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    • 2014
  • This study analyzed characteristics of landform relieves on 12 bedrock whole(W) areas and 24 mountain(M) and valley(V) areas. Based on this result, characteristics and relations between bedrocks and landform relief were classified as follows. 1) gneiss-height M and granite-height W, M, V areas show active stream incision for uplift. However these areas have relatively low relief and grade compared to high altitude, because effect of denudation don't pass on whole slope. 2) gneiss-height W, V, gneiss-mid M, schist M, granite-mid M, volcanic rock W, M, sedimentary rock-height(conglomerate) W, M, V, sedimentary rock-mid (sandstone and shale) M, limestone W, M areas have active stream erosion and mass movement, but landform relieves are on the high side, because these have resistant bedrock and geological structure against weathering and erosion. 3) gneiss-mid W, V, schist W, V, granite-mid W, V, volcanic rock V, sedimentary rock-mid W, V, sedimentary rock-low(shale) M, limestone V areas landform relieves are on the low side, because these have weak resistance and active weathering, mass movement, erosion, transportation and deposit. 4) gneiss-low W, M, V, granite-low W, M, V, sedimentary rock-low W, V areas landform relieves are very low, because these don't have active erosion and mass movement as costal area with low altitude.