Dry Etching of GaAs and AlGaAs in Diffuion Pump-Based Capacitively Coupled BCl3 Plasmas
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Lee, S.H.
(School of Nano Engineering/Nano Manufacturing Center, Inje University)
Park, J.H. (School of Nano Engineering/Nano Manufacturing Center, Inje University) Noh, H.S. (School of Nano Engineering/Nano Manufacturing Center, Inje University) Choi, K.H. (School of Nano Engineering/Nano Manufacturing Center, Inje University) Song, H.J. (School of Nano Engineering/Nano Manufacturing Center, Inje University) Cho, G.S. (School of Nano Engineering/Nano Manufacturing Center, Inje University) Lee, J.W. (School of Nano Engineering/Nano Manufacturing Center, Inje University) |
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