• 제목/요약/키워드: Low temperature co-firing

검색결과 47건 처리시간 0.024초

저온소성 기판과 Cu와의 동시소성에 미치는 CuO의 첨가효과 (The Influence of CuO on Bonding Behaviors of Low-Firing-Substrate and Cu Conductor)

  • 박정현;이상진
    • 한국세라믹학회지
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    • 제31권4호
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    • pp.381-388
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    • 1994
  • A new process which co-fires the low-firing-substrate and copper conductor was studied to achieve good bond strength and low sheet resistance of conductor. Cupric oxide is used as the precursor of conductive material in the new method and the firing atmosphere of the new process is changed sequently in air H2N2. The addition of cupric oxide and variations of firing atmosphere permited complete binder-burnout in comparison with the conventional method and contributed to the improvement of resistance and bonding behaviors. The potimum conditions of this experiment to obtain the satisfactory resistance and bond strength are as follows (binder-burnout temperature in air; 55$0^{\circ}C$, reducing temperature in H2; 40$0^{\circ}C$ for 30 min, ratio of copper and cupric oxide; 60:40~30:70 wt%). The bonding mechanism between the substrate and metal was explained by metal diffusion layer in the interface and the bond strength mainly depended on the stress caused by the difference of shrinkage and thermal expansion coefficient between the substrate and metal.

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Tape Casting에 의한 fluormica계 제조 및 특성 저온 소결 기판의 제조 및 특성 (Fabrication and Characteristics of Low Temperature Firing Substrate by Tape Casting in Fluormica System)

  • 박대현;최정헌;강원호;김병익
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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    • pp.673-676
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    • 1999
  • We fabricated green sheet by tape casting method with fluormica glass-ceramic powders for fabrication of low temperature co-firing substrate. After ball milling with organic additives, we investigated green strength and density of green sheets which were casted by doctor blade machine. Green sheets were sintered at 700 ~ 1,00$0^{\circ}C$ for 1 ~3hrs. Microstructure, linear shrinkage and dielectric constant of substrates were surveyed.

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LTCC용 저/중유전율 유전체 후막의 동시소성 (Co-Firing of Low- and Middle- Permittivity Dielectric Tapes of Fabricating Low-Temperature Co-Fired Ceramics)

  • 최영진;박정현;고원준;박재환;남산;박재관
    • 한국재료학회지
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    • 제14권10호
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    • pp.731-736
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    • 2004
  • Herein, we report on the co-firing of a low-K wiring substrate and a middle-K functional substrate in LTCC. Firstly, we researched the sintering behavior and dielectric properties of the low-k wiring substrate comprised by alumina and glass frit with ${\varepsilon}_r$, of $\sim7$ and the middle-k functional substrate comprised by $Ba_{5}Nb_{4}O_{15}$ and glass frit with ${\varepsilon}_r$, of $20\sim30$. The warpage and delamination between the hetero layers of the low-K and the middle-K composition were also studied. In particular, physical matching of the hetero layers could be possible by adjusting of the sintering properties of the composition. We observed that an introduction of the glass frit to the low- and middle-K substrate gives rise to a minimization of an effect given by separation of the hetero layers, and modification of the fraction of the glass frit accompanied by a variation of the composition could control the sintering behavior and its beginning temperature. In the case of co-firing of the L03 as the low-K wiring substrate composition and the M03 as the middle-K functional substrate composition at $875^{\circ}C$, we could fabricate a desirable structure of hetero layers without any kinds of structural defects such as separation, warpage, delamination, pore trap, etc. We suppose that the co-firing techniques described in this study would provide a helpful method to fabricate a LTCC multi-functional for the next generation.

저온 동시 소성용 후막 NTC 서미스터의 전기적 특성에 미치는 무연계 프릿트 및 RuO2의 영향 (Effect of lead-free frit and RuO2 on the electrical properties of thick film NTC thermistors for low temperature co-firing)

  • 구본급
    • 한국결정성장학회지
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    • 제31권5호
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    • pp.218-227
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    • 2021
  • 저온 동시 소성용 후막 NTC 서미스터를 Mn1.5Ni0.4Co0.9Cu0.4O4 조성의 NTC 분말과 lead free frit 및 RuO2를 이용하여 제조한 페이스트를 96 % 알루미나 기판 위에 인쇄와 소결을 통해 제조한 후, 이 후막 NTC의 전기적 특성에 미치는 프릿트 및 RuO2의 영향을 연구하였다. 후막 NTC 서미스터의 저항은 동일한 온도에서 소결한 벌크 상에 비해 높게 나타났으나 저항-온도 특성에서 부 저항 온도 특성은 더 명확하게 직선적으로 나타남을 알 수 있었다. 한편, 소결온도 증가에 따라 면적저항은 감소하였고 프릿트 첨가량이 많을수록 면적저항은 높게 나타났다. 후막 NTC 서미스터의 B 정수는 3000 K 이상의 값 나타냈는데 그 중 프릿트를 5 wt% 첨가한 페이스트로 만든 후막 NTC를 900℃에서 소결한 시편의 B 정수가 가장 높게 나타남을 알 수 있었다. 또한, RuO2 첨가에 따라 면적저항의 감소가 나타남을 알 수 있었으며 RuO2를 5 wt% 첨가한 페이스트를 900℃에서 소결한 후막 NTC 서미스터의 면적저항 감소의 변화가 가장 뚜렷이 나타남을 알 수 있었다.

박막 테이프캐스팅과 동시소성에 의한 연료극 지지형 SOFC 단전지 제조 (Fabrication of Anode-Supported SOFC Single Cells via Tape-Casting of Thin Tapes and Co-Firing)

  • 문환;김선동;현상훈;김호성
    • 한국세라믹학회지
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    • 제43권12호
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    • pp.788-797
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    • 2006
  • An anode-supported SOFC single cell having $5{\mu}m$ thin electrolyte was fabricated cost-effectively by tape casting, laminating, and co-filing of anode (NiO-YSZ), cathode (LSM-YSZ), and electrolyte (YSZ) components. The optimal slurry compositions of the green tapes for SOFC components were determined by an analysis of the mean diameter, the slurry viscosity, the tensile strength/strain of the green tapes, and their green microstructures. The single cells with a dense electrolyte and porous electrodes could be co-fired successfully at $1325\sim1350^{\circ}C$ by controlling the contents of pore former and the ratio of coarse YSZ and fine YSZ in the anode and the cathode. The single cell co-fired at $1350^{\circ}C$ showed $100.2mWcm^{-2}$ of maximum power density at $800^{\circ}C$ but it was impossible to apply it to operate at low temperature because of low performance and high ASR, which were attributed to formation of the secondary phases in the cathode and the interface between the electrolyte and the cathode.

원환형 적층 압전 액츄에이터의 전기적 특성 (Electrical Properties of Ring-type Multilayer Piezoelectric Actuator)

  • 김국진;류주현
    • 한국전기전자재료학회논문지
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    • 제20권10호
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    • pp.869-872
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    • 2007
  • In this study, in order to develop low temperature sintering ultrasonic nozzle, single-layer and multilayer ring-type piezoelectric actuators were manufactured using PMN-PNN-PZT ceramics, And then the electrical properties were investigated. A ring-type piezoelectric actuator was modeled by ATILA program using finite element method(FEM). The piezoelectric actuator dimension was $\Phi26.5$ (outer diameter), $\Phi12$ (inner diameter), 3.5 mm (thickness). By FEM analysis, resonant and anti-resonant frequencies were appeared as 56.7 kHz and 61.5 kHz. The displacement increased with the increases of the number of layer. Based on the result, ring-type multilayer piezoelectric actuators were manufactured at low co-firing temperature of $940^{\circ}C$. The resonant resistance decreased with the increases of the number of layer. And also, the capacitance increased with the increases of the number of layer. The mechanical quality factor (Qm) decreased with the increases of the number of layer.

Low-Firing Pb(Zr,Ti)O3-Based Multilayer Ceramic Actuators Using Ag Inner Electrode

  • Han, Hyoung-Su;Park, Eon-Cheol;Lee, Jae-Shin;Yoon, Jong-Il;Ahn, Kyoung-Kwan
    • Transactions on Electrical and Electronic Materials
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    • 제12권6호
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    • pp.249-252
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    • 2011
  • We investigated the low firing of $Li_2CO_3$ added $0.2Pb(Mg_{1/3}Nb_{2/3})O_3$ - 0.3Pb($Fe_{1/2}Nb_{1/2}$) - $0.5Pb(Zr_{0.475}Ti_{0.525})O_3$ (PMN-PFN-PZT) ceramics and multilayer actuators (MLAs) using Ag inner electrodes. It was found that 0.1 wt% $Li_2CO_3$ was quite effective in lowering the sintering temperature of PMN-PFN-PZT ceramics from $1,100^{\circ}C$ down to $900^{\circ}C$ without deteriorating their piezoelectric ceramics ($d_{33}$ = 425 pC/N and $k_p$ = 61.9%). However, excess $Li_2CO_3$ up to 0.3 wt% brings about unwanted problems such as the formation of a $LiPbO_2$ secondary phase and subsequent degradation in the piezoelectric properties. Using 0.1 wt% $Li_2CO_3$ added PMN-PFN-PZT ceramics, MLAs with Ag inner electrodes were successfully fabricated, resulting in a normalized strain of 580 pm/V at an electric field of 1.5 kV/mm.

고유전율/저유전율 LTCC 동시소성 기판의 휨 현상 (Warpage of Co-fired High K/Low K LTCC Substrate)

  • 조현민;김형준;이충석;방규석;강남기
    • 마이크로전자및패키징학회지
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    • 제11권3호
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    • pp.77-82
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    • 2004
  • 본 연구에서는 고유전율(K100) 및 저유전율(K7.8) LTCC(Low Temperature Co-fired Ceramics) 그린 시트를 이종 LTCC 기판으로 동시 소성하는 경우, 고유전율 LTCC 내의 유리 분말 함유량에 따라 발생하는 수축 거동 변화가 이종 LTCC기판의 휨 특성에 미치는 영향에 대하여 평가하였다. 유리 분말 함유량의 증가에 따른 고유전율 LTCC 그린시트의 수축률 및 유전 특성을 측정하였으며, 고유전율/저유전율 비대칭형 적층체의 소결 거동을 고온 현미경을 이용하여 실시간으로 측정하였다. $50\%$ 유리가 첨가된 K100 조성의 경우 수축 개시 온도 및 수축 구간의 범위 , 최종 수축률이 K7.8 조성과 유사하였으며, 동시 소성 시 가장 우수한 휨 특성을 나타내었다.

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