• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권12호
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• pp.785-790
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• 1999

This research has been carried out to develop a low-energy large-aperture pulsed electron beam generator (LELA), 200keV 1A, for industrial applications. One of the most important feature of this electron beam generator is large electron beam cross section of $190cm^2$. Low energy electron beam generators have been used for water cleaning, flue gas cleaning, and pasteurization, etc. In these applications the cross sectionof the e-beam is related to reaction efficiency. Another important feature of this LELA EB generator is easy maintenance because of its simple structure and relatively low vacuum operation compared to the conventional EB generators. The conventional EB generators need to be scanned because the small cross section thermal electron emitters are used in the conventional EB generators which have small EB cross section. In this research, we use the secondary electrons generated by ion bombardment on the HV cathode surface as a electron source. Therefore we can make any shape of EB cross section without scanning.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.378.1-378.1
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• 2016

나노바이오연구분야에서 ToF-SIMS를 이용하여 lipid와 metabolite같은 저 분자의 생체물질을 측정하는데 널리 이용되어 왔다. 최근에는 고 분자량의 생체물질을 측정하기 위해서 C60, water cluster, argon cluster등의 다양한 종류의 클러스터 이온빔들이 개발되어 왔다. [1,2] 하지만 tissue샘플을 클러스터 이온빔을 이용하여 분석한 결과에서도 m/z 1500이상의 고분자를 측정한 결과는 거의 없다. 바이오샘플의 charging을 상쇄하기위해 low energy electron beam (~20 eV)을 사용하는데, low energy electron beam이 샘플에 damage를 주기 때문이다. [3] 본 연구에서는 electron fluence (electrons/cm2)가 증가함에 따라 PC(16:0/18:1(9Z)와 Ganglioside GM1의 intensity가 감소함을 알았고, low energy electron beam에 의해 생체 물질이 damage를 받을 수 있음을 확인하였다. 따라서 tissue 샘플을 SUS기판에 샘플링하고 Ar-GCIB를 이용하면 charging없이 tissue imaging을 성공적으로 수행할 수 있고, m/z 2000이상의 고 분자량의 생체물질을 측정할 수 있음을 확인하였다.

• Journal of Welding and Joining
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• 제15권3호
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• pp.79-87
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• 1997

This study was performed to evaluate basic characteristics of electron beam welding process for a 9% Ni steel plate. The principal welding process parameters, such as working distance, accelerating voltage, beam current and welding speed were investigated. The AB (Arata Beam) test method was also applied to characterize beam size and energy density of the electron beam welding process. The electron beam size was found to decrease with the increase of accelerating voltage and the decrease of working distance. So, in case of high voltage (150kV), spot size and energy density of electron beam were revealed to be 0.9mm and $6.5\times10^5W/\textrm{cm}^2$ respectively. The accelerating voltage among the welding parameters was found to be the most important factor governing the penetration depth. When the accelerating voltage of electron beam was low ($\leq$90kV), beam current and welding speed did not affect on the penetration depth significantly. However, in case of high voltage ($\geq$120kV), the depth of penetration increased very sensitively with the increase of beam current and the decrease of welding speed.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 E
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• pp.2170-2172
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• 1999

A low energy large aperture(LELA) pulsed electron beam generator of a cold cathode type has been developed for environmental applications, for example, waste water cleaning, flue gas cleaning, and pasteurization etc. The operational principle is based on the emission of secondary electrons from cold cathode when ions in the plasma hit the cathode, which are accelerated toward exit window by the gradient of an electric potential. We have fabricated the LELA electron beam generator with the peak energy of 200keV and beam diameter of 200mm and obtained the large aperture electron beam in air. The electron beam current density has been investigated as a function of glow discharge current, accelerating voltage and radial distribution in front of the exit window foil. The plasma density and electron temperature have been measured in order to confirm the relation with the electron beam current density. We are going to upgrade the LELA electron beam generator in the electron energy, electron beam current and stability of operation for various applications.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2003년도 춘계전력전자학술대회 논문집(2)
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• pp.942-948
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• 2003

This paper about the small electron beam irradiator for solar cell's efficiency. Many things are studied by method to increase conversion efficiency of solar cell. We selected electron beam by method for conversion efficiency of solar cell. Energy bands of this electron beam irradiator is 80keV(max.). And, solar cells that apply in this paper are crystal Si. Average efficiency of solar cell that applies in this experiment is 10$\%$. This system manufactured low energy electron beam irradiator. And, electron beam irradiation to solar cell in vacuum chamber of this irradiator. Irradiation area is 20*20 [mm2] by 40[keV].

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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• pp.507-510
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• 2004

Oblique ion-induced secondary electron emission coefficient(${\gamma}$) with low energy ..and work function ${\phi}_{\omega}$(${\theta}$ = 0 and ${\theta}$ = 20) of the MgO thin film in AC-PDPs has been measured by ${\gamma}$-FIB system. The MgO thin film has been deposited from sintered material under electron beam evaporation method. The energy of $He^+$ ions used has been ranged from 50eV to 150eV. Oblique ion beam has been chosen to be 10 degree, 20 degree and 30 degree. It is found that the higher secondary electron emission coefficient(${\gamma}$) has been achieved by the higher oblique ion beam up to inclination angle of 30 degree than the perpendicular incident ion beam.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 하계학술대회 논문집 E
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• pp.1767-1769
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• 1998

We have established a pulsed electron beam generation system with an energy of 200[keV], pulse repetition rate of 200[Hz], and several tens of [${\mu}s$] pulse width. The system is characterized by a cold cathode that is simpler than the hot cathode. Target object does not need to be scanned because of large aperture electron beam of 300[$cm^2$]. Electron source is secondary electrons that are generated when the ions from the glow discharge collide on the cathode surface. In this paper, the discharge current characteristics are investigated experimentally as a function of He gas pressure in order to obtain stable glow discharge. And computer simulations are carried out as a preliminary study for the development of low energy large aperture electron beam generator. The variation of electon beam current is investigated as a function of rising time of high voltage when 20[kV] potential is applied in 20[mTorr] pressure.

• 한국산학기술학회논문지
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• 제9권1호
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• pp.23-28
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• 2008

마이크로칼럼에 사용되는 전자렌즈는 MEMS 공정으로 정밀하게 가공되어 기존의 전자칼럼에 비하여 광학수차를 최소화 할 수 있으며, 이는 전자칼럼의 성능 향상에 주요한 요소로 작용한다. 습식 식각과 건식 식각에 의해 형성되는 전자렌즈의 모양과 배열조합에 따른 전자 광학계 연구는 중요한 의미가 있다. 마이크로칼럼은 전자방출원, source 렌즈, deflector, focus 렌즈(Einzel 렌즈)로 구성되는데, 전자빔의 특성에 가장 큰 영향을 주는 source 렌즈의 구성 요소 중 extractor와 limiting aperture의 모양에 따른 전자빔 특성을 조사하여 마이크로칼럼 제작에 있어서 최적화된 전자렌즈 조합을 도출하였다.

• Journal of Radiation Protection and Research
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• 제46권1호
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• pp.8-13
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• 2021

Background: Salmonella enteritidis (SE) was the main cause of the pandemic of foodborne salmonellosis. The surface of eggs' shells can be contaminated with this bacterium; however, washing them with sodium hypochlorite solution not only reduces their flavor but also heavily impacts the environment. An alternative to this is surface sterilization using low-energy electron beam. It is known that irradiation with 1 kGy resulted in a significant 3.9 log reduction (reduction factor of 10,000) in detectable SE on the shell. FAO/IAEA/WHO indicates irradiation of any food commodity up to an overall average dose of 10 kGy presents no toxicological hazard. On the other hand, the Food and Drug Administration has deemed a dose of up to 3 kGy is allowable for eggs. However, the maximum dose permitted to be absorbed by an edible part (i.e., internal dose) is 0.1 Gy in Japan and 0.5 Gy in European Union. Materials and Methods: The electron beam (EB) depth dose distribution in the eggshell was calculated by the Monte Carlo method. The internal dose was also estimated by Monte Carlo simulation and experimentation. Results and Discussion: The EB depth dose distribution for the eggshells indicated that acceleration voltages between 80 and 200 kV were optimal for eggshell sterilization. It was also found that acceleration voltages between 80 and 150 kV were suitable for reducing the internal dose to ≤ 0.10 Gy. Conclusion: The optimum irradiative conditions for sterilizing only eggshells with an EB were between 80 and 150 kV.

• 조명전기설비학회논문지
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• 제13권3호
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• pp.40-47
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• 1999

본 연구에서는 개발하고자 하는 저에너지 대면적 전자빔 발생장치는 원리로서 발생원인 글로우 발전에 의한 플라즈마로부터 이온을 음극으로 가속, 충돌하게 하여 그때 발생하는 2차전자를 전자빔원으로 하여 전자를 가속·제어하는데 바탕을 두고 있으며, 본 연구에서는 이러한 원리를 기본으로 이론적 해석을 통한 고효율의 저에너지 대면적 전자빔 발생장치개발의 설계 및 제작에 대해서 연구하였으며, 또한 빔 에너지의 안전성과 방전조건을 고려한 최적의 방전 파라메타를 설정하여 대면적의 균일한 빔 인출을 가능케 하였다.