Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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A Development of the Low Energy Large Aperture Electron Beam Generator

저에너지 대면적 전자빔 발생장치 개발(II)

  • Woo, Sung-Hun (School of Electrical and Electronic Engineering of Yeungnam University) ;
  • Lee, Kwang-Sik (School of Electrical and Electronic Engineering of Yeungnam University) ;
  • Lee, Dong-In (School of Electrical and Electronic Engineering of Yeungnam University) ;
  • Cho, Chu-Hyun (Applied Electrophysic) ;
  • Choi, Young-Wook (Applied Electrophysic) ;
  • Lee, Hong-Sik (Applied Electrophysic) ;
  • Abroyan, M. (Applied Electrophysic)
  • 우성훈 (영남대학교 전기전자공학부) ;
  • 이광식 (영남대학교 전기전자공학부) ;
  • 이동인 (영남대학교 전기전자공학부) ;
  • 조주현 (한국전기연구소 전기물리연구팀) ;
  • 최영욱 (한국전기연구소 전기물리연구팀) ;
  • 이홍식 (한국전기연구소 전기물리연구팀) ;
  • Published : 1998.07.20
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Abstract

We have established a pulsed electron beam generation system with an energy of 200[keV], pulse repetition rate of 200[Hz], and several tens of [${\mu}s$] pulse width. The system is characterized by a cold cathode that is simpler than the hot cathode. Target object does not need to be scanned because of large aperture electron beam of 300[$cm^2$]. Electron source is secondary electrons that are generated when the ions from the glow discharge collide on the cathode surface. In this paper, the discharge current characteristics are investigated experimentally as a function of He gas pressure in order to obtain stable glow discharge. And computer simulations are carried out as a preliminary study for the development of low energy large aperture electron beam generator. The variation of electon beam current is investigated as a function of rising time of high voltage when 20[kV] potential is applied in 20[mTorr] pressure.

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