• 한국화재소방학회논문지
• /
• 제33권6호
• /
• pp.114-119
• /
• 2019

우리는 LED등기구의 Printed circuit board (PCB)에서 화재의 원인으로 특정할 수 있는 금속 마이그레이션(Metallic migration) 현상을 발견하고, 본 연구를 진행하였다. 금속 마이그레이션 현상 가속화 실험인 물방울 시험을 소량의 물과 저전압(3 V)로 진행하고 절연되어있는 양극에서 직접적으로 금속 마이그레이션의 성장과 회로의 단락을 확인하였다. 그리고 전자주사현미경(SEM)을 통해 형태를 관찰하고 에너지 분산형 분광기(EDS)를 이용하여 성분을 분석한 결과, 절연된 부분에서 전극을 이루고 있는 구리의 성분을 검출하였다.

• 한국산업보건학회지
• /
• 제25권3호
• /
• pp.294-300
• /
• 2015

Objectives: The aim of this study is to identify physicochemical properties such as chemical composition, size, shape and crystal structure of powder byproducts generated from a metallization process and its 1st scrubber in the semiconductor industry. Methods: Powder samples were collected from inner chambers during maintenance of the W-plug process equipment (using tungsten hexafluoride as a precursor material) and its 1st scrubber. The chemical composition, size and shape of the powder particles were determined by field emission scanning electron microscopy (SEM) and transmission electron microscopy (TEM) equipped with an energy dispersive spectroscope (EDS). The crystal structure of the powders was analyzed by X-ray diffraction (XRD). Results: From the SEM-EDS and TEM-EDS analyses, O and W were mainly detected, which indicates the powder byproducts are tungsten trioxide ($WO_3$), whereas Al, F and Ti were detected as low peaks. The powder particles were spherical and nearly spherical, and the particle size collected from the process equipment and its 1st scrubber showed 10-20 nm (agglomerates: 55-90 nm) and 16-20 nm (agglomerates: 80-120 nm) as primary particles, respectively. The XRD patterns of the yellow powder byproducts exhibit five peaks at $23.8^{\circ}$ $33.9^{\circ}$ $41.74^{\circ}$ $48.86^{\circ}$ and $54.78^{\circ}$ which correspond to the (200), (220), (222), (400), and (420) planes of cubic $WO_3$. Conclusions: We elucidated the physicochemical characteristics of the powder byproducts collected from W-plug process equipment and its 1st scrubber. This study should provide useful information for the development of alternative strategies to improve the working environment and workers' health.

• 한국재료학회:학술대회논문집
• /
• 한국재료학회 2009년도 추계학술발표대회
• /
• pp.39.1-39.1
• /
• 2009

NiTi alloy is widely used innumerous biomedical applications (orthodontics, cardiovascular, orthopaedics, etc.) for its distinctive thermomechanical and mechanical properties such as shape memory effect, super elasticity, low elastic modulus and high damping capacity. However, NiTi alloy is still a controversial biomaterial because of its high Ni content which can trigger the risk of allergy and adverse reactions when Ni ion releases into the human body. In order to improve the corrosion resistance of the TiNi alloy and suppress the release of Ni ions, many surface modification techniques have been employed in previous literature such as thermal oxidation, laser surface treatment, sol-gel method, anodic oxidation and electrochemical methods. In this paper, the NiTi was electrochemically etched in various electrolytes to modify surface. The microstructure, element distribution, phase composition and roughness of the surface were investigatedby scanning electron microscopy (SEM), energy-dispersive X-ray spectrometry(EDS), X-ray diffractometry (XRD) and atomic force microscopy (AFM). Systematic controlling of nano and submicron surface features was achieved by altered density of hydro fluidic acid in etchant solution. Nanoscale surface topography, such as, pore density, pore width, pore height, surface roughness and surface tension were extensively analyzed as systematical variables.Importantly, bone forming cell, osteoblast adhesion was increased in high density of hydro fluidic treated surface structures, i.e., in greater nanoscale surface roughness and in high surface areas through increasing pore densities.All results delineate the importance of surface topography parameter (pores) inNiTi to increase the biocompatibility of NiTi in identical chemistry which is crucial factor for determining biomaterials.

• 전기학회논문지
• /
• 제59권4호
• /
• pp.743-748
• /
• 2010

Boron nitride (BN) and carbon nitride (CN) films, which have relatively low work functions and commonly exhibit negative electron affinity behaviors, were coated on carbon nanotubes (CNTs) by magnetron sputtering. The CNTs were directly grown on metal-tip (tungsten, approximately 500nm in diameter at the summit part) substrates by inductively coupled plasma-chemical vapor deposition (ICP-CVD). The variations in the morphology and microstructure of CNTs due to coating of the BN and CN films were analyzed by field-emission scanning electron microscopy (FE-SEM). The energy dispersive x-ray (EDX) spectroscopy and Raman spectroscopy were used to identify the existence of the coated layers (CN and BN) on CNTs. The electron-emission properties of the BN-coated and CN-coated CNT-emitters were characterized using a high-vacuum field emission measurement system, in terms of their maximum emission currents ($I_{max}$) at 1kV and turn-on voltage ($V_{on}$) for approaching $1{\mu}A$. The results showed that the $I_{max}$ current was significantly increased and the $V_{on}$ voltage were remarkably reduced by the coating of CN or BN films. The measured values of $I_{max}-V_{on}$ were as follows; $176{\mu}A$-500V for the 5nm CN-coated emitter and $289{\mu}A$-540V for the 2nm BN-coated emitter, respectively, while the $I_{max}-V_{on}$ of the as-grown (i.e., uncoated) emitter was $134{\mu}A$-620V. In addition, the CNT emitters coated with thin CN or BN films also showed much better long-term (up to 25h) stability behaviors in electron emission, as compared with the conventional CNT emitter.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2009년도 하계학술대회 논문집
• /
• pp.484-484
• /
• 2009

반도체 소자가 차세대 초미세 공정 기술 도입의 가속화를 통해 고속화 및 고집적화 되어 감에 따라 나노 (nano) 크기의 회로 선폭 미세화를 극복하고자 최적의 CMP (chemical mechanical polishing) 공정이 요구되어지고 있다. 최근, 금속배선공정에서 높은 전도율과 재료의 값이 싸다는 이유로 Cu를 사용하였으나, 디바이스의 구조적 특성을 유지하기 위해 높은 압력으로 인한 새로운 다공성 막(low-k)의 파괴와, 디싱과 에로젼 현상으로 인한 문제점이 발생하게 되었다. 이러한 문제점을 해결 하고자 본 논문에서는 Cu의 ECMP 적용을 위해 LSV (Linear sweep voltammetry)법을 통하여 알칼리 성문인 $NaNO_3$ 전해액과 산성성분인 $HNO_3$ 전해액의 전압 활성화에 의한 active, passive, transient, trans-passive 영역을 I-V 특성 곡선을 통해 알아보았고, 알칼리와 산성 성분의 전해액이 Cu 표면에 미치는 영향을 SEM (Scanning electron microscopy), EDS (Energy Dispersive Spectroscopy), XRD(X-ray Diffraction)를 통하여 전기화학적 특성을 비교 분석하였다.

• E2M - 전기 전자와 첨단 소재
• /
• 제16권9호
• /
• pp.64.2-65
• /
• 2003

A 4 nm layer of ZrOx (targeted x-2) was deposited on an interfacial layer(IL) of native oxide (SiO, t∼1.2 nm) surface on 200 mm Si wafers by a manufacturable atomic layer chemical vapor deposition technique at 30$0^{\circ}C$. Some as-deposited layers were subjected to a post-deposition, rapid thermal annealing at $700^{\circ}C$ for 5 min in flowing oxygen at atmospheric pressure. The experimental x-ray diffraction, x-ray photoelectron spectroscopy, high-resolution transmission electron microscopy, and high-resolution parallel electron energy loss spectroscopy results showed that a multiphase and heterogeneous structure evolved, which we call the Zr-O/IL/Si stack. The as-deposited Zr-O layer was amorphous $ZrO_2$-rich Zr silicate containing about 15% by volume of embedded $ZrO_2$ nanocrystals, which transformed to a glass nanoceramic (with over 90% by volume of predominantly tetragonal-$ZrO_2$(t-$ZrO_2$) and monoclinic-$ZrO_2$(m-$ZrO_2$) nanocrystals) upon annealing. The formation of disordered amorphous regions within some of the nanocrystals, as well as crystalline regions with defects, probably gave rise to lattice strains and deformations. The interfacial layer (IL) was partitioned into an upper Si $o_2$-rich Zr silicate and the lower $SiO_{x}$. The latter was sub-toichiometric and the average oxidation state increased from Si0.86$^{＋}$ in $SiO_{0.43}$ (as-deposited) to Si1.32$^{＋}$ in $SiO_{0.66}$ (annealed). This high oxygen deficiency in $SiO_{x}$ indicative of the low mobility of oxidizing specie in the Zr-O layer. The stacks were characterized for their dielectric properties in the Pt/{Zr-O/IL}/Si metal oxide-semiconductor capacitor(MOSCAP) configuration. The measured equivalent oxide thickness (EOT) was not consistent with the calculated EOT using a bilayer model of $ZrO_2$ and $SiO_2$, and the capacitance in accumulation (and therefore, EOT and kZr-O) was frequency dispersive, trends well documented in literature. This behavior is qualitatively explained in terms of the multi-layer nanostructure and nanochemistry that evolves.ves.ves.

• Composites Research
• /
• 제17권1호
• /
• pp.10-17
• /
• 2004

본 연구에서는 이관능성 에폭시(DGEBA)와 polymethylmethacrylate(PMMA)를 블랜딩하여 열적 특성과 기계적 계면특성을 측정하였다. 열적 특성은 DSC, DMA, 그리고 TGA를 이용하였으며, 블랜드의 기계적 계면특성을 측정하기 위해 contact angle로 표면자유에너지를 조사하였고, 파괴인성은 $K_{IC}$로 측정하고 $K_{IC}$ 실험 후 파괴단면을 SEM을 이용하여 관찰하였다. 실험 결과, 경화 온도와 유리전이 온도는 PMMA의 첨가에 의해 증가하는 것을 확인할 수 있었다. 또한 블랜드의 표면자유에너지는 PMMA의 저함량에서 높은 값을 나타내었고, 이는 비극성 요소의 증가와 극성 요소의 존재에 의한 것으로 판단된다. 블랜드의 파괴인성 측정 결과 5 phr에서 최대값을 나타내었다. 이는 DGEBA/PMMA 간의 상용성 또는 거대분자 사슬에서 물리적 결합의 증가에 기인하는 것으로 판단된다.

• 분석과학
• /
• 제9권1호
• /
• pp.20-25
• /
• 1996

암석 및 토양 등의 지질시료에 미량으로 존재하는 우라늄과 토륨을 파장분산형 X-선 형광분석법을 사용하여 정량하였다. X-선관의 target 물질로 사용되는 Rh의 산란선을 내부 표준물질로 사용하였다. 토륨의 경우는 50초, 그리고 우라늄의 경우는 400초 동안 측정하였을 때, 우라늄과 토륨의 X-선 형광분석결과는 중성자방사화분석 및 유도결합플라즈마 원자방출분광분석의 결과와 큰 차이를 보이지 않았으며 10% 이내의 정밀도와 15% 이내의 정확도를 보여 주었다.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
• /
• pp.94-94
• /
• 2013

The Cr-Zr-N films have much improved mechanical properties and very smooth surface roughness. However, in spite of their outstanding properties, the Cr-Zr-N coatings revealed their mechanical properties deteriorated severely with increasing Zr content at $500^{\circ}C$ ecause of very rapid oxidation. Recently oxynitride films have been widely studied due to their excellent unique mechanical properties and oxidation resistance. In this work, CrZr-O-N films with various O contents were synthesized by unbalanced magnetron sputtering with Cr-Zr segment targets (Cr:Zr volume ratios is 1：1) and all films were prepared in a nitrogen rich mixture of N2 and O2. Characteristics such as crystalline structure, hardness and chemical composition as a function of the O content were investigated by X-ray diffraction (XRD), field emission scanning electron microscope (FE-SEM), microhardness testing system and energy dispersive spectroscopy (EDS). Results showed that the thin films had dense and compact microstructure as O content in the films increases. The microstructure of the thin films consisted of mainly crystalline Cr (Zr)N phase and Cr2O3 phase. The maximum hardness and elastic modulus of the films was measured to be approximately 33.2 GPa and 280.6 GPa from the films with low content of O elements. Detailed experimental results will be presented.

• 보존과학회지
• /
• 제16권
• /
• pp.104-109
• /
• 2004

경상북도 상주 성동리 고분군에서 출토된 유리구슬에 대한 화학적 특성은 SEM-EDS 분석법을 이용하여 분석한 결과, 시대의 흐름에 따라 조성, 색상, 형태적 변화가 나타난다. 기원후 4세기인 삼국시대는 포타쉬유리와 소다유리로 나타나며 포타쉬유리는 $Al_2O_3$와 CaO가 모두 $5\%$이하인 청색 계통, 소다유리는 $Al_2O_3$가 $5\%$이상으로 청색 계통과 검은 줄이 있는 적색으로 나타난다. 기원후 17세기인 조선시대는 포타쉬유리과 알칼리혼합유리로 나타나며 포타쉬유리는 CaO(lime)가 $11.7\%$로 높은 투명한 황색이다. 이번 연구에서 처음으로 조사된 '코일유리' 라는 특이한 구슬 형태는 알칼리혼합유리로 $Na_2O$와 $K2_O$ 성분이 모두 $5\%$이상이며 $Na_2O$보다 $K_2O$의 성분이 높다. 또한 포타쉬유리와 소다유리와 비하여 CaO와 $Al_2O_3$의 함량이 높게 나타난다.