• Journal of the Korean Institute of Telematics and Electronics
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• v.26 no.12
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• pp.1995-2000
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• 1989

The ion beam system of 20keV C-W (Cockroft Walton) type composed of the AuGe alloy LMIS(Liquid Metal Ion Source) has been designed and constructed. For the fabrication of the ohmic contact to the n-GaAs, the ion beam extracted from the AuGe alloy source was implanted into the n-GaAs, and it was measured by contact resistivity. The stable AuGe ion beam(2.5\ulcorner/cm\ulcorner was obtained at the extraction voltage of 14.5kV. The measurements of the contact resistivity were done by the TLM (Transmission Line Model) method and the specific contact resistivity was found to be 2.4x10**-5 \ulcornercm\ulcornerfor the implanted sample by the 1.9x10**20/cm**3 and the annealed sample at 30\ulcorner for 2 min.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.1
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• pp.19-23
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• 2011

Recently, focused ion beam (FIB) applications have been investigated for the modification of VLSI circuit, the MEMS processing, and the localized ion doping, A multi aperture FIB system has been introduced as the demands of FIB applications for high speed and large area processing increase. A liquid metal ion source has problems, a large angular divergence and a metal contamination into a substrate. In this study, a gas ion source was introduced to replace a liquid metal ion source. The gas ion source generated inductively coupled plasma (ICP) in a quartz tube (diameter: 45 mm). Ar gas fed into the quartz was ionized by a 2 turned radio frequency antenna. The Ar ions were extracted by 2 extraction grids. The maximum extraction voltage was 10 kV. A numerical simulation was used to optimize the design of extraction grids and to predict an ion trajectory. As a result, the maximum ion current density was 38 $mA/cm^2$ and the spread of ion energy was 1.6 % for the extraction voltage.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.504-507
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• 2004

Previous studies on the liquid Gallium ion sources used an electro-chemically etched tungsten wire with a coil-type heater. Such a structure requires excessive power consumption in the course of heating the liquid metal. In this work, a new structure is proposed that replaces the coil-type heater. It uses a Gallium reservoir made of six pre-etched 250 $\mu\textrm{m}$ tungsten wires that surround the needle electrode. Gallium loading at the reservoir is observed to be much more stable, resulting in an improved beam stability.

• Journal of the Korean Chemical Society
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• v.38 no.2
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• pp.122-128
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• 1994

Macrocyclic ligand has been known to selectively bind with metal ions so that ability applied for the transport of metal ions across the emulsion liquid membrane in this study. The metal ions are transproted from the source phase to the receiving phase by the carrier of the organic phase. Several factors involved in the transport of metal ions acrose the emulsion membrane we reported here and these factors provided the informations for the selective seperation of some metal ion. Stability constants for cation-macrocyclic ligand and metal ion-anion receiving phase interaction are examined as parameters for the prediction of metal ion transport selectivities. $Pb^{2+}$ was transported higher rates than the other metal ions in the mixture solution. The interaction of metal ion to anion in receiving phase is important. $S_2O_3^{2-}$- in replacement of $NO_3^-$ in the receiving phase enhances the transport of $Pb^{2-}$since $Pb^{2-}-S_2O_3^{2-}$interaction is greater than $Pb^{2+}-NO_3^-$ interaction.

• Bulletin of the Korean Chemical Society
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• v.26 no.6
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• pp.930-934
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• 2005

A chloroform membrane system containing a given mixture of benzylaza-12-crown-4 and oleic acid is introduced for the selective and efficient transport of $Pb^{2+}$ ion. The transport was capable of moving metal ions ‘up-hill’. In the presence of ${S_2O_3}^{2-}$ion as a suitable metal ion acceptor in the receiving phase, the amount of lead ion transport across the liquid membrane after 150 minutes is (95.0 ${\pm}$ 1.7)%. The selectivity and efficiency of lead transport from aqueous solution containing $Tl^+,\;Ag^+,\;Mg^{2+},\;Ca^{2+},\;Co^{2+},$ $Ni^{2+},\;Cu^{2+},\;Zn^{2+},\;Hg^{2+}$ and $Cd^{2+}$were investigated. In the presence of thiosulfate as a suitable masking agent in the source phase, the interfering effects of $Ag^+\;and\;Cu^{2+}$ were diminished drastically.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.360-363
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• 2005

본 연구에서는 인듐 액체금속이온원을 제작하여 빔 특성에 대해 연구를 하였으며, 기존의 연구를 하였던 갈륨 액체금속 이온원의 빔특성과 비교분석 하였다. 빔특성 분석을 위해 빔 안정도, 전류-전압특성곡선, 에너지 퍼짐을 측정하였다. 액체금속이온원에 사용되는 액체금속 저장소 및 바늘전극(tip)은 $500{\mu}m$의 직경을 갖는 텅스텐을 사용하였으며, 국내에서 제작된 제품을 사용하였다. 액체금속 저장소의 구조는 이전에 구상하여 연구가 이루어진 6개의 pre-etching된 텅스텐와이어(wire)가 묶여진 형태를 사용하였다.

• Journal of the Korean Chemical Society
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• v.38 no.2
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• pp.129-135
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• 1994

Acyclic polyether dicarboxylic acid have been studied as metal cation carriers in a bulk liquid membrane system. The proton-ionizable ligands feature allows the coupling of a cation transport to reverse proton transport. This feature offers promise for the effective separation and concentration of metal cations with the metal cation transport being driven by a pH gradient. Metal cation transport increased regularly with increasing hydroxide($H^-$) concentration of source phase and with proton($H^+$) concentration of receiving phase. Competitive transport by the acyclic polyether dicarboxylic acids is selective for calcium ion over other alkaline-earth cations.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.88-88
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• 2010

The liquid metal ion sources(LMIS) in FIB system have many advantages of high current density, high brightness, and low ion energy spread. Most FIB systems use LMIS because the beam spot size of LMIS is smaller than of gas field ionization sources(GFIS). LMIS basically consists of a emitter(needle, anode), a reservoir(gallium) and a extractor(cathode). But several LMIS have new electrode called the suppressor. We investigated characteristics of LMIS with a suppressor. The characteristics of the threshold voltage and current-voltage (I-V) were observed under the varying extracting voltage with floated suppressor voltage, and under the varying suppressor voltages with fixed extractor voltage. We also simulated LMIS with the suppressor through CST(Computer Simulation Technology). We can explain characteristics of LMIS with a suppressor using the electric field.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.283-283
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• 2010

The liquid metal ion sources(LMIS) in FIB system have many advantages of high current density, high brightness and low ion energy spread. Most FIB systems use LMIS because the ion beam spot size of LMIS is smaller than other ion sources. LMIS is basically emitted by an extractor but the new electrode called the suppressor is able to control the emission current. We investigated characteristics LMIS with a suppressor, the function of the suppressor in LMIS, the change of the electric field by the suppressor and the advantages of using the suppressor. The characteristics of the threshold voltage and current-voltage (I-V) were observed under the varying extracting voltage with floated suppressor voltage, and under the varying suppressor voltages with fixed extractor voltage. We also simulated LMIS with the suppressor through CST(Computer Simulation Technology). The emission current increases as the suppressor voltage decreases because the suppressor voltage which restrains the electric field goes down, The threshold voltage increases as the suppressor voltage increases. We can explain characteristics and functions of LMIS with a suppressor using the electric field.

• Journal of the Korean Vacuum Society
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• v.13 no.4
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• pp.182-188
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• 2004

Previous studies on the liquid Gallium ion sources used an electro-chemically etched tungsten wire with a coil-type heater. Such a structure requires excessive power consumption in the course of heating the liquid metal. In this work, a new structure is proposed that replaces the coil-type heater. It uses a Gallium reservoir made of six pre-etched 250$\mu\textrm{m}$ tungsten wires that surround the needle electrode. Gallium trading at the reservoir is observed to be much more stable, resulting in an improved beam stability.