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Beam stability improvement of liquid metal ion source  

Hyun J. W. (광운대학교 전자물리학과)
Yim Youn Chan (광운대학교 전자물리학과)
Kim Seuong Soo (광운대학교 전자물리학과)
Oh Hyun Joo (서울산업대학교 기계공학과)
Park Cheol Woo (한국산업기술대학교 기계공학과)
Lee Jong Hang (한국산업기술대학교 기계공학과)
Choi Eun Ha (광운대학교 전자물리학과)
Seo Yunho (광운대학교 전자물리학과)
Kang Seung Oun (광운대학교 전자물리학과)
Publication Information
Journal of the Korean Vacuum Society / v.13, no.4, 2004 , pp. 182-188 More about this Journal
Abstract
Previous studies on the liquid Gallium ion sources used an electro-chemically etched tungsten wire with a coil-type heater. Such a structure requires excessive power consumption in the course of heating the liquid metal. In this work, a new structure is proposed that replaces the coil-type heater. It uses a Gallium reservoir made of six pre-etched 250$\mu\textrm{m}$ tungsten wires that surround the needle electrode. Gallium trading at the reservoir is observed to be much more stable, resulting in an improved beam stability.
Keywords
Electro-Chemical Etching; Gallium Reservoir; Loading; Beam Stability;
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