• The Transactions of the Korean Institute of Electrical Engineers D
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• v.50 no.9
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• pp.417-422
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• 2001

The brushless DC motor(BLDCM) is widely used in many applications. One of the application of the BLDCM is the stage which is one of process in the semiconductor manufacturing processes. Very high performance is required in the stage process. In this paper, the 1 degree of freedom positioning system for the basic technology of the stage is studied. The linearization method is proposed to make the controller design procedures easy by measuring the thrust force ripple using the strain gauge. And through the experiments, it is proved that the inner velocity control loop is necessary to make more precise positioning control system.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.6 no.2
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• pp.165-171
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• 2005

The ultrasonic piezo motor is a new type motor that has an excellent performance and many useful features that electromagnetic motors do not have. But, it suffers from severe system non-linearities and parameter variations especially during speed control. Therefore, it is difficult to accomplish satisfactory control performance by using the conventional PID controller. In this paper, to achieve the precise control for linear type ultrasonic motor was analyzed as a function of response time and change with a driving time. Also, we propose controller that combines STEP controller and PD controller that have error of ${\mu}m$ about liner type ultrasonic motor.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.135-136
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• 2006

A precise linear motion stage supported by magnetically preloaded air bearings is introduced where preloading magnetic actuators are combined with permanent magnets and coils to adjust air bearing clearance by controlling magnetic force actively. Each of the magnetic actuators has a permanent magnet generating nominal magnetic flux for required preload and a coil to perturb the magnetic force resulting adjustment of air-bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate nominal preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder is built for verifying this design concept. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed, and the result shows very good linearity.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.2 s.179
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• pp.43-50
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• 2006

Recently, with rapid development of semiconductor and flat panel display, the manufacturing equipments are required to have large travel range, high productivity, and high accuracy. In this paper, an ultra precision decoupled dual servo (DDS) system is proposed to meet these requirements. And a control scheme for the DDS is studied. The proposed DDS consists of a $XY{\Theta}$ fine stage for handling work-pieces precisely and a XY coarse stage for large travel range. The fine stage consists of four voice coil motors (VCM) and air bearing guides. The coarse stage consists of linear motors and air bearing guides. The DDS is mechanically decoupled between coarse stage and fine stage. Therefore, both stages must be controlled independently and the performance of the DDS is mainly determined by the fine stage. For high performance tracking, the controller of fine stage consists of time delay control (TDC) and perturbation observer while the controller of coarse stage is TDC alone. With these individual controllers, two kinds of dual-servo control strategies are suggested: master-slave type and parallel type. By simulations and experiments, the performances of two dual-servo control strategies are compared.

• Journal of Institute of Control, Robotics and Systems
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• v.22 no.4
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• pp.271-275
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• 2016

For machining systems like the motor driven linear stage which have high precision positioning with a long stroke, it is necessary to examine the repeatability of the reference position decision. Though piezo (PZT) actuator driven linear stages have high precision feed drivers and a short stroke, they have some limitations for reference position decisions if they have not been equipped with an accurate home sensor. This study was performed to examine the repeatability for home position decision of a EE-SX671 photo sensor as a home switch by using piezo actuator driven linear stages and capacitance probe.

• Proceedings of the KIEE Conference
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• 2002.11c
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• pp.309-312
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• 2002

Precision stage is essential device for semiconductor equipments, fiber optic assembly systems and micro machines. In this paper, we develop a piezo-electric inchworm type actuator for long stroke ultra precision linear stages, and implement a controller to interface with commercial motion controllers. It provides fast implementation of precise position control system substituting for rotary motor. In the future, using a laser interferometer as a position sensor, we plan to implement a nano meter precision stage.

• Journal of the Korean Institute of Intelligent Systems
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• v.9 no.5
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• pp.463-471
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• 1999

This paper presents a vector controlled induction motor is implemented by neural networks system compared with PI controller for the speed control. The design employed the training strategy with Neural Network Controller(NNC) and Neural Network Emulator(NNE) for speed. In order to update the weights of the controller First of all Emulator updates its parameters by identifying the motor input and output next it supplies the error path to the output stage of the controller using backpropagation algorithm, As Controller produces an adequate output to the system due to neural networks learning capability Vector controlled induction motor characteristics actual motor speed with based on neural network system follows the reference speed better than that of linear PI speed controller.

• 제어로봇시스템학회:학술대회논문집
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• 1990.10b
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• pp.1312-1315
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• 1990

Nanometer positioning control with high velocity and long stroke is discussed. A one-axis stage mechanism driven by an AC linear motor and guided by a rolling ball guide has been constructed. Coarse and fine position controls are designed by using nonlinear dynamics of the rolling guide. Switching from coarse positioning to fine positioning is studied.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.05a
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• pp.677-682
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• 2007

Recently, a precision stage is widely used in the fields of the nano technology. In this paper, the precision stage which consists of linear motor, vision system, light source system and controller, is designed and developed for nano imprint machine. Stiffness design considering resonance frequency is important for the precision stage. A virtual machine simulation is useful for machine development the early design stage. Kinematic and dynamic simulations of XYZ stage are performed. To consider the resonance frequency and vibration effects flexible multibody dynamics are utilized with FE modeling of the structural components.

• Journal of Electrical Engineering and Technology
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• v.1 no.1
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• pp.101-105
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• 2006

In this paper, a disk-type ultrasonic motor using a combination of radial and bending vibration modes is newly designed and fabricated. The characteristics of the test motor are also measured. By means of traveling elastic wave induced at the surface of circumference of the elastic disk, a steel bar in contact with the surface of circumference of the elastic disk bonded onto the piezoelectric ceramic disks is driven in both directions by changing the sine and cosine voltage inputs. The stator of the motor is composed of two sheets of piezoelectric ceramic disks to bond onto both surfaces of an elastic disk, respectively. As a result, the diameter of the elastic body is increased and the resonant frequency is decreased. The resonant frequency of the stator is about 92 kHz, which is composed with piezoelectric ceramic disks of 28 mm in diameter and 2 mm in thickness, and an elastic body of 32 mm in diameter and 2 mm in thickness. A driving voltage of 20 VPP Produces 200 rpm with a torque of 1Nm and an efficiency of about 10%.