Characteristics of Disk-type Linear Ultrasonic Motor for Application to x-y Stage |
Lim Kee-Joe
(School of Electrical and Computer Engineering, Chungbuk National University)
Park Seong-Bee (School of Electrical and Computer Engineering, Chungbuk National University) Yun Yong-Jin (School of Electrical and Computer Engineering, Chungbuk National University) Lee Kee-Young (School of Electrical and Computer Engineering, Chungbuk National University) Kang Seong-Hwa (Dept. of Fire Prevention Engineering, Chungcheong University) Lee Jong-Sub (Dept. of Testing and Research Support, Small and Medium Business Administration) Jeong Su-Hyun (Dept. of Electrical Engineering, Daewon Science College) |
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