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http://dx.doi.org/10.5370/JEET.2006.1.1.101

Characteristics of Disk-type Linear Ultrasonic Motor for Application to x-y Stage  

Lim Kee-Joe (School of Electrical and Computer Engineering, Chungbuk National University)
Park Seong-Bee (School of Electrical and Computer Engineering, Chungbuk National University)
Yun Yong-Jin (School of Electrical and Computer Engineering, Chungbuk National University)
Lee Kee-Young (School of Electrical and Computer Engineering, Chungbuk National University)
Kang Seong-Hwa (Dept. of Fire Prevention Engineering, Chungcheong University)
Lee Jong-Sub (Dept. of Testing and Research Support, Small and Medium Business Administration)
Jeong Su-Hyun (Dept. of Electrical Engineering, Daewon Science College)
Publication Information
Journal of Electrical Engineering and Technology / v.1, no.1, 2006 , pp. 101-105 More about this Journal
Abstract
In this paper, a disk-type ultrasonic motor using a combination of radial and bending vibration modes is newly designed and fabricated. The characteristics of the test motor are also measured. By means of traveling elastic wave induced at the surface of circumference of the elastic disk, a steel bar in contact with the surface of circumference of the elastic disk bonded onto the piezoelectric ceramic disks is driven in both directions by changing the sine and cosine voltage inputs. The stator of the motor is composed of two sheets of piezoelectric ceramic disks to bond onto both surfaces of an elastic disk, respectively. As a result, the diameter of the elastic body is increased and the resonant frequency is decreased. The resonant frequency of the stator is about 92 kHz, which is composed with piezoelectric ceramic disks of 28 mm in diameter and 2 mm in thickness, and an elastic body of 32 mm in diameter and 2 mm in thickness. A driving voltage of 20 VPP Produces 200 rpm with a torque of 1Nm and an efficiency of about 10%.
Keywords
Complex vibration mode; Disk-type linear USM; X-Y stage;
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