• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11a
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• pp.378.2-378
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• 2002

This paper deals with a moving coil type linear motor for fast access of the miniature ODD. This slim-line motor is composed of the mover supported by guide mechanism, the coil wound into it, and the yoke attached to the permanent magnet for stator. The driving force is generated by the PM of the stator and the current in the coil of the mover. Magnetic circuit analysis and Finite Element Method are applied to estimate force at air gap. (omitted)

• Transactions of Materials Processing
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• v.27 no.1
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• pp.18-27
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• 2018

As one of the functional metal parts in steam turbine diaphragm assembly, the hollow-partitioned turbine nozzle (stator) has large and thick geometries, as well as an asymmetric configuration. Therefore it is hard to support a metal blank in the die cavity. To ease this situation and control posture and position of metal blank (workpiece), a blank support structure is newly introduced. The blank support structure is basically composed of enlarged arms from the blank, guide pins and linear bearings. It can help to control the intermediate blank without a critical sliding phenomenon. The operation mechanism of this blank support structure, during thick plate forming for the hollow-partitioned turbine nozzle stator, is first evaluated. A series of FEM-based numerical simulations, with respect to the width of the guide arm as geometric design parameters, are carried out to investigate its applicable range. As the results, it is observed the blank support structure for this thick plate forming can guide the workpiece to have stable posture during the plate forming process.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.18 no.1
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• pp.36-41
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• 2009

This paper presents the development of a micro punching system with modified cymbal mechanism. To realize the micro punching, we introduced the hybrid system with a macro moving part and micro punching part. The macro moving part consists of a ball screw, a linear guide and the micro step motor and micro punching part includes the PZT actuators and displacement amplification device with modified cymbal mechanism. The PZT actuator is capable of producing very large force, but they provide only limited displacements which are several micro meters. Thus the displacement amplification device is necessary to make those actuators more efficient and useful. For this purpose, a cymbal mechanism in series is proposed. The finite element method was used to design the cymbal mechanism and to analyze the mode shape of the one. The displacement and mode shape error between the FEM results and experiments are within 10%. A considerable design effort has been focused on optimizing the flexure hinge to increase the output displacement and punching force.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1469-1474
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• 2007

In recent years, research to machine large-surface micro-features has become important because of the light guide panel of a large-scale liquid crystal display and the bipolar plate of a high-capacity proton exchange membrane fuel cell. In this study, in order to realize the systematic design technology and performance improvements of an ultra-precision machine for machining the large-surface micro-features, a structural characteristic analysis was performed using its virtual prototype. The prototype consisted of gantry-type frame, hydrostatic feed mechanisms, linear motors, brushless DC servo motor, counterbalance mechanism, and so on. The loop stiffness was estimated from the relative displacement between the tool post and C-axis table, which was caused by a cutting force. Especially, the causes of structural stiffness deterioration were identified through the structural deformation analysis of sub-models.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.54-59
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• 2005

Recently, the ultra-precision stage is widely used in the fields of the nano-technology, specially in AFMs(Atomic Force Microscope) and STMs(Scanning Tunneling Microscope). In this paper, the ultra-precision stage which consists of flexure hinges, piezoelectric actuator, and ultra-precision linear encoder, is designed and developed. The guide mechanism which consisted of flexure hinges is analyzed by Finite Element Method. And we derived the transfer function of the system in 1st order system from step responses according to the magnitude. We performed simulation for the model to tune the control gain and applied the gains to the developed system. Experimental results found that the stage can be controlled in 5 nm resolution by PID controller.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.9 s.174
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• pp.130-136
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• 2005

This paper presents an optimal design and the performance evaluation of two-axis nano positioning stage with round notched flexure hinges. A flexure hinge mechanism with round notched flexure hinges is to guide the linear motions of a moving plate in the nano positioning stage. A Min-Max algorithm is applied to the design of the flexure hinge mechanism for nano positioning stage. In the design process, the structure of the flexure hinge mechanism is fixed, then the radius of a round hole and the width of two round holes are chosen as design variables, and finally the do sign variables are calculated by the Min-Max algorithm. The machined flexure hinge mechanism, stack type PZTs for actuation and capacitance type displacement sensors for position measurement are assembled into the nano positioning stage. The experimental results of the manufactured nano positioning stage show the first modal resonance frequency of 197 Hz, the operating range of 40 um, and the resolution of 3 nm.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.11a
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• pp.754-758
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• 2000

In recent years, the LDM(Linear DC Motor) is widely used, because it has more merits than other rotary motors. First, if system requires linear motion, LDM realizes direct linear motion as rotary motor does not. Second, system is simple and easy to control, and so on. In optical disc drive, a tracking system consists of two parts. One is fine actuating and the other is coarse actuating. For coarse actuating VCM(Voice Coil Motor) actuator is used as a basic drive mechanism. In this paper, MC(Moving Coil) type LDM is designed, manufactured and controlled. System is composed of mechanical-electromagnetic component, therefore mechanical loss and electromagnetic loss exist. The dominent mechanical loss is friction which results from sliding between guide shaft and hole. Therefore, this paper shows the friction compensation control. High speed and accurate position is not gained only PID control, therefore other control method is applied to the system.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.8
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• pp.906-912
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• 2012

This paper presents the new method for a six-degree-of-freedom (DOF) motion measurement and those dynamic characterizations in an ultraprecision linear stage using angle sensor-implemented grating interferometry. It consists of a diffractive optical element, a corner cube, four separate two-dimensional position sensitive detectors, four photodiodes and auxiliary optics components. From the previous study, it was confirmed that the proposed optical system could measure a six-DOF motion error in a linear stage. In this article, six-DOF motion dynamic characteristics of the stage were investigated through the step response and with respect to the conditions with a different speed of a slide table. As a result, the natural frequency and damping ratio according to a six-DOF direction was obtained. Also, it was seen that the speed of slide table had an significant effect on a six-DOF displacement motion, especially, X, which was considered as the effect of friction mechanism and local elastic mechanical deformation in a slide guide.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.12
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• pp.1173-1179
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• 2007

In recent years, research to machine large-surface micro-features has become important because of the light guide panel of a large-scale liquid crystal display and the bipolar plate of a high-capacity proton exchange membrane fuel cell. In this study, in order to realize the systematic design technology and performance improvements of an ultra-precision machine for machining the large-surface micro-features, a structural characteristic analysis was performed using its virtual prototype. The prototype consisted of gantry-type frame, hydrostatic feed mechanisms, linear motors, brushless DC servo motor, counterbalance mechanism, and so on. The loop stiffness was estimated from the relative displacement between the tool post and C-axis table, which was caused by a cutting force. Especially, the causes of structural stiffness deterioration were identified through the structural deformation analysis of sub-models.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.99-104
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• 2004

Micro/meso cutting is getting more important in the fields of precision machining technology. A micro-turning lathe is one of parts to consist the Micro Factory. It accepts stepwise motion actuators that are used for feeding system instead of the conventional mechanism. It is consisted of two Piezoelectric ceramics; one is for feeding the slider, and the other is for clamping the slider in the guide way of the body. The linearity and positional accuracy of the actuators are good enough for high precision motion. The spindle unit is operated with DC motor on the top of the slider. The motion is communicated with miniaturized linear encoder attached on each side of axis. A mono crystal diamond tool is used for cutting tool. This micro-lathe has been made a machining experiment to see the characteristics of micro-machining.