• Journal of the Korean Society for Precision Engineering
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• v.32 no.5
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• pp.423-429
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• 2015

Linear motion (LM) ball guides have good accuracy and high efficiency. They are widely applied for precision machinery such as machine tools, semiconductor fabrication machines and robots. However, friction force incurs heat between the balls and grooves. Thermal expansion due to the heat deteriorates stiffness and accuracy of the LM ball guides. For accurate estimation of stiffness and accuracy during the linear motion, friction models of LM ball guides are required. To formulate accurate frictional models of LM ball guides according to load and preload conditions, rolling and viscous frictional analyses have been performed in this paper. Contact loads between balls and grooves are derived from Hertzian contact analysis. Contact angle variation is incorporated for the precision modeling. Viscous friction model is formulated from the shear stress of lubricant and the contact area between balls and grooves. Experiments confirm validity of the developed friction model for various external load and feedrate conditions.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.51-60
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• 2005

This paper describes a robust control scheme for high-speed and long stroke scanning motion of high precision linear motor system consisting of linear motor, air bearing guide and position measurement system using heterodyne interferometer. Nowadays, semiconductor process and inspection of wafer or LCD need high speed and long travel length for their high throughput and extremely small velocity fluctuations or tracking errors. In order to satisfy these conditions, linear motor system are widely used because they have large thrust force and do not need motion conversion mechanisms such as ball screw, rack & pinion or capstan with which the system are burdened. However linear motors have a problem called force ripple. Force ripple deteriorates the tracking performances and makes periodic position errors. So, force ripple must be compensated. To maximize the tracking performance of linear motor system, we propose the control scheme which is composed of a robust control method, Time Delay Controller (TDC) and a feedforward control method, Zero Phase Error Tracking Control (ZPETC) for accurate tracking a given trajectory and an adaptive force ripple compensation (AFC) algorithm fur estimating and compensating force ripple. The adaptive ripple compensation is continuously refined on the basis of tracking error. Computer simulation results based on modeled parameters verify the effectiveness of the proposed control scheme for high-speed, long stroke and high precision scanning motion and show that the proposed control scheme can achieve a sup error tracking performance in comparison to conventional TDC control.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.794-797
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• 2001

The basic design of today s rolling linear guides with rails is outlined in a French patent from 1932, it was not until the early 1970s that linear guides were commercialized. Progress with the numerical control of machine tools led to higher speed and accuracy of machines that exposed limitations of conventional sliding guides in terms of durability and response capability. As a result, rolling guides, having better high-speed performance and greater compatibility with electronics, began to be used widely. This paper examined theoretically and experimentally the influence of rail bolt tightening on the motion accuracy of linear guides. The rail of a linear guide is tightened and fixed to the base component by bolts. Naturally, the rail is an elastic body and the compression force generated by tightening the volts causes its deflection. Compromising motion accuracy, the rail deforms wavily in a longitudinal direction corresponding to the bolt pitch. The relation between rail position and deflection(sinking) amount caused by bolt tightening was analyzed through FEM analysis in this paper.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.11a
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• pp.754-758
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• 2000

In recent years, the LDM(Linear DC Motor) is widely used, because it has more merits than other rotary motors. First, if system requires linear motion, LDM realizes direct linear motion as rotary motor does not. Second, system is simple and easy to control, and so on. In optical disc drive, a tracking system consists of two parts. One is fine actuating and the other is coarse actuating. For coarse actuating VCM(Voice Coil Motor) actuator is used as a basic drive mechanism. In this paper, MC(Moving Coil) type LDM is designed, manufactured and controlled. System is composed of mechanical-electromagnetic component, therefore mechanical loss and electromagnetic loss exist. The dominent mechanical loss is friction which results from sliding between guide shaft and hole. Therefore, this paper shows the friction compensation control. High speed and accurate position is not gained only PID control, therefore other control method is applied to the system.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.57 no.3
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• pp.390-397
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• 2008

Permanent Magnet Linear Synchronous Motor (PMLSM) has high efficiency, high energy density, and high control-ability. But, the detent force always is produced by the structure of slot-teeth. There are the disadvantages such as noise and vibration of the apparatuses are induced and the control ability is curtailed because detent force acts as thrust ripple. Therefore, the detent force reduction is an essential requirement in PMLSM. Generally, the method, skewing permanent magnet or slot-teeth, is used to reduce the detent force. But the thrust is decreased at the same time. If permanent magnet is skewed, the lateral force which operates as the perpendicular direction of skew direction is generated in linear guide of PMLSM. So, V-skew model is proposed for the reduction of lateral force. The lateral force acts as braking force in linear motion guide, and it has bad influence to the characteristics of PMLSM. However, these problems will not be solved by 2-dimensional Finite Element Analysis (FEA). So, in this paper 3-dimensional FEA is applied to analyze the PMLSM where permanent magnet is skewed and has overhang. The detent force and thrust characteristics considering skew and overhang effects of permanent magnet are analyzed by 3-dimensional FEA and the results are compared with experimental values to verify the propriety of analysis.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.12
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• pp.174-181
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• 2004

Ultra precision positioning mechanism has widely been used on semiconductor manufacturing equipments, optical spectrum analyzer and cell manipulations. Ultra precision positioning mechanism is consisted of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design, analysis and manufacture all of the inchworm linear motor system, which is one of the equipments embodied in ultra precision positioning mechanism. Inchworm linear motor system is consisted of a controller system and an inchworm linear motor, and its driving form is similar to a motion of spanworm. A design and manufacture of inchworm linear motor, which is consisted of three PZT actuators, a rod, two columns and a guide plate, are performed. Minimizing the von-Mises stress of the hinge using Taguchi method and simulation by FEM software optimizes the structural design in a column of flexure hinge. The designed columns and guide plates are manufactured by a W-EDM and NC-milling. A controller system, which is an apparatus to drive inchworm linear motor, can easily adjust driving conditions by varying resonance frequency and input-output voltage of actuators and amplifiers. The performance of manufactured inchworm linear motor system is verified and valuated. In the future, inchworm linear motor system will be used to make a more precision positioning by reinforcing a sensor and feedback system.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.11a
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• pp.488-491
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• 2006

In this paper, a slim type actuator is proposed rising a bimorph PZT and a circular rotor link. The bimorph contacts the circular rotor, and its displacement generates the rotational motion of the rotor. The rotor causes the linear motion of AF and zoom lens through gear and a motion guide. The proposed model enables the actuations of many lens groups for zoom module by extending the single lens model. The important design parameter is the contact force determined by the frictional coefficient and preload between the rotor and PZT bimorph. A prototype of the single actuator model is manufactured and experiments results using LDV and tachometer are compared to the theoretical and numerical predictions. Experiments show the linear bimorph actuator model meets the performance criteria of the lens actuation, and it can be applicable to various slim type actuators for AF and zoom motions in mobile cameras.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.99-104
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• 2004

Micro/meso cutting is getting more important in the fields of precision machining technology. A micro-turning lathe is one of parts to consist the Micro Factory. It accepts stepwise motion actuators that are used for feeding system instead of the conventional mechanism. It is consisted of two Piezoelectric ceramics; one is for feeding the slider, and the other is for clamping the slider in the guide way of the body. The linearity and positional accuracy of the actuators are good enough for high precision motion. The spindle unit is operated with DC motor on the top of the slider. The motion is communicated with miniaturized linear encoder attached on each side of axis. A mono crystal diamond tool is used for cutting tool. This micro-lathe has been made a machining experiment to see the characteristics of micro-machining.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.4
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• pp.553-561
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• 2010

In flat panel display or semiconductor industries, they install the equipments with fine line width and high throughput for fabrication and inspection. The equipments are required to have the linear stage which can position the work-piece with high speed, fine resolution on wide range of motion. In this paper, a precision planar linear XY stage is proposed. The stage has a symmetric planar window configuration and is guided by air-bearings on granite plate. The symmetric planar window configuration makes the stage has robustness against dynamic and thermal disturbances. The air-bearings let the stage move smooth on straight guide bar and flat granite surface. The stage is actuated by linear motor with Halbach magnet array (HMA). HMA generates more confined magnetic flux than conventional array. The linear motors are optimized by using sequential quadratic programming (SQP) with the several constraints that are thermal dissipation, required power, force ripple and so on. The planar linear XY stage with the symmetric planar configuration and the linear motors is implemented and then the performance such as force ripple, resolution and stroke are evaluated.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.43 no.6 s.312
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• pp.16-26
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• 2006

In this paper, we propose a 3D shape restoration system which measures height and surface shape of transparent ITO glass and delivers errors in focal length and incident angle of laser beam to femto-second laser micromachining. The proposed system is composed of a line scan laser, a high resolution camera, a linear motion guide synchronized to image capturing, and a control station. Also, we define the sensitivity indices that represent a relation between measurement error and a position of a camera and scan laser, and utilize it for optimum design. The results of the proposed system are compared with results of SPM(Scanning Probe Microscope) and prove the usefulness of the system.