• Title/Summary/Keyword: Line pitch

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Measurements of Two-dimensional Gratings Using a Metrological Atomic Force Microscope with Uncertainty Evaluation

  • Kim, Jong-Ahn;Kim, Jae-Wan;Kang, Chu-Shik;Eom, Tae-Bong
    • International Journal of Precision Engineering and Manufacturing
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    • v.9 no.2
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    • pp.18-22
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    • 2008
  • The pitch and orthogonality of two-dimensional (2-D) gratings were measured using a metrological atomic force microscope (MAFM), and the measurement uncertainty was analyzed. Gratings are typical standard devices for the calibration of precision microscopes, Since the magnification and orthogonality in two perpendicular axes of microscopes can be calibrated simultaneously using 2-D gratings, it is important to certify the pitch and orthogonality of such gratings accurately for nanometrology. In the measurement of 2-D gratings, the MAFM can be used effectively for its nanometric resolution and uncertainty, but a new measurement scheme is required to overcome limitations such as thermal drift and slow scan speed. Two types of 2-D gratings with nominal pitches of 300 and 1000 nm were measured using line scans to determine the pitch measurement in each direction. The expanded uncertainties (k = 2) of the measured pitch values were less than 0.2 and 0.4 nm for each specimen, and the measured orthogonality values were less than $0.09^{\circ}$ and $0.05^{\circ}$, respectively. The experimental results measured using the MAFM and optical diffractometer agreed closely within the expanded uncertainty of the MAFM. We also propose an additional scheme for measuring 2-D gratings to increase the accuracy of calculated peak positions, which will be the subject of future study.

Genetic Structure of Pinus rigida Mill. in an Expanding Population Originating from a Few Founder Trees (수본(數本)의 양친수(兩親樹)에 의해 전파증식(傳播増殖)중에 있는 리기다소나무 집단(集團)의 유전적(遺傳的) 구조(構造))

  • Chung, Min Sup
    • Journal of Korean Society of Forest Science
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    • v.72 no.1
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    • pp.16-26
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    • 1986
  • Allozyme study on a small pitch pine stand originating and expanded rather rapidly from a few founder trees indicated that the colonization of the pitch pine population was made progressively from the place where the founder trees located to another by moving in cohorts of seeds from a limited number of family or genetically closely related family groups in line with the succeeding generations. This pattern of migration and colonization resulted marked differences in allelic and genotypic frequencies at many of the allozyme loci between the initially colonized subpopulation on the south-facing slope and the lately colonized subpopulation on north-facing slope of a hill. It appeared that gene fixation due to inbreeding and genetic drift occurred at some loci in the pitch pine population or subpopulations. However, even in t 1e inbreeding small pitch pine population or subpopulations, a comparatively large amount of genetic diversity or heterozygosity was maintained due to the high levels of gene recombination at many of the gene loci and natural selections favoring for heterozygotes.

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A Study on the Pitch Extraction Improvement Using LSP for the Synthesis of High Speech Quality (고음질 음성합성을 위한 LSP를 이용한 피치검출 성능향상에 관한 연구)

  • Seo, Ji-Ho;Kim, Jong-Kuk;Bae, Myung-Jin
    • The Journal of the Acoustical Society of Korea
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    • v.29 no.1
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    • pp.69-75
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    • 2010
  • In this paper, the pitch is detected after the elimination of formant ingredients by flattening the spectrum in frequency domain. In order to remove impact of formant and transition frequency in the signal spectrum, formant envelop is made by linear interpolation with any points each sub-band and the spectrum of speech signal is compensated by the reverse of the envelop interpolated linearly after we divide frequency band into several segment based on LSP and detect the points. The experimental result showed the proposed method appeared an outstanding performance in compared with LPC, Cepstrum, Lifter methods. The method reduced the gross error rate 1.30% than the LPC method which appeared a good performance except the proposed method. Also, the proposed method showed low error rate in noise environment.

A Word Line Ramping Technique to Suppress the Program Disturbance of NAND Flash Memory

  • Lee, Jin-Wook;Lee, Yeong-Taek;Taehee Cho;Lee, Seungjae;Kim, Dong-Hwan;Wook-Ghee, Hahn;Lim, Young-Ho;Suh, Kang-Deog
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.1 no.2
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    • pp.125-131
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    • 2001
  • When the program voltage is applied to a word line, a part of the boosted channel charge in inhibited bit lines is lost due to the coupling between the string select line (SSL) and the adjacent word line. This phenomenon causes the program disturbance in the cells connected to the inhibited bit lines. This program disturbance becomes more serious, as the word line pitch is decreased. To reduce the word line coupling, the rising edge of the word-line voltage waveform was changed from a pulse step into a ramp waveform with a controlled slope. The word-line ramping circuit was composed of a timer, a decoder, a 8 b D/A converter, a comparator, and a high voltage switch pump (HVSP). The ramping voltage was generated by using a stepping waveform. The rising time and the stepping number of the word-line voltage for programming were set to $\mutextrm{m}-$ and 8, respectively,. The ramping circuit was used in a 512Mb NAND flash memory fabricated with a $0.15-\mutextrm{m}$ CMOS technology, reducing the SSL coupling voltage from 1.4V into a value below 0.4V.

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A Study on the Heat Transfer of In-line Heat Exchanger (직렬 열교환기의 열전달에 관한 연구)

  • Choe, S.Y.;Kim, M.S.
    • Journal of Power System Engineering
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    • v.12 no.5
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    • pp.48-53
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    • 2008
  • Heat exchangers are commonly used in practice in a wide range of application, from heating and air-conditioning system in a household, to chemical processing and power production in a large plant. Heat transfer in a heat exchanger usually involves convection in each fluid and conduction through the wall separating the two fluids. The heat transfer characteristics of tube banks of in-line arrangements of four circular cylinders in a cross flow are compared for a range of tube locations and Reynolds numbers. The in-line pitch ratio was set up in the range of $1.5\leq L/d\leq4.0$, where L is the center to center distance and d the circular cylinder diameter, and in the Reynolds number of $13,000\leq Re\leq50,000$. The local and mean Nusselt numbers were estimated, and then. Subsequently, the heat transfer characteristics of four circular cylinders were found to exhibit a strong dependency upon the cylinder spacing and separation point of their upstream cylinders.

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Development of Roll-to-Roll Printing System for Fine Line-width Printing (미세 선폭 프린팅을 위한 롤투롤 장비 개발)

  • Kim C.H.;Ryu B.S.;Lim K.J.;Lee M.H.;Lee T.M.;Youn S.N.;Choi B.O.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.583-584
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    • 2006
  • Printing technology has begun to get into the spotlight in many ways due to the low cost effectiveness to existent semi-conductor process. It also has very useful application areas, not only paper printing but also patterning for LCD color tilter, Photovoltaic patterning, RFID antenna, OLED, and so on. In this study, an apparatus of gravure offset printing was developed for fine line width printing. The pattern was composed of $20{\mu}m$ size of continuous lines of which pitch size was $40{\mu}m$. The printed pattern shows that it is possible to make around $20{\mu}m$ line-width printing pattern. The roll-to-roll printing system for fine line-width printing based on primary experiment is presented. For testing of multi-layer printing, the system was designed to be capable of printing two different materials from each printing unit using gravure-offset printing method and have a function of alignment of two printed materials.

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Investigation of Safety and Design of Mooring Lines for Floating Wave Energy Conversion (부유식 파력발전장치용 계류선의 설계 및 안전성 검토에 관한 연구)

  • Jung, Dong-Ho;Nam, Bo-Woo;Shin, Seung-Ho;Kim, Hyeon-Ju;Lee, Ho-Saeng;Moon, Deok-Soo;Song, Je-Ha
    • Journal of Ocean Engineering and Technology
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    • v.26 no.4
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    • pp.77-85
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    • 2012
  • A study was performed on the design of a mooring line to maintain the position of a floating WEC (wave energy conversion) system. The procedure to design a mooring line is set up and the safety of the designed mooring system is evaluated using commercial software, Orcaflex. The characteristics curve for one line is analyzed to determine the properties and pretension of a mooring line. While considering the ocean environmental condition and importance of a floating WEC system, a multi-line layout is determined. A 4-point mooring system with 4 lines shows the instability in the yaw motion of the floating WEC system under a designed ocean environmental condition. The redesigned 4-point mooring system with 8 lines is found to be safe on the condition of a harsh ocean environment. The floating WEC system with the redesigned mooring system also shows stable motion in surge and pitch under operating conditions. From a parametric study on the mooring line length, the extreme value of the mooring line tension is found to be very sensitive to the pretension and length of mooring line. The results of this study can contribute to the establishment of a design procedure for mooring lines.

다목적 위성 2호 MSC의 TDI 방식에 따른 MSC 영상 자료에 대한 영향

  • 이동한
    • Bulletin of the Korean Space Science Society
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    • 2003.10a
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    • pp.104-104
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    • 2003
  • 본 포스터에서는 다목적 위성 2호의 주 탑재체인 MSC(Multi-Spectral Camera)가 TDI(Time Delayed Integration) 방식을 채택함에 따라, TDI에 의해 MSC 영상 자료가 어떻게 영향을 받게 되는 지를 연구한 내용을 설명한다. MSC는 지상 해상도가 1m인 고해상도에서 영상을 촬영하기 때문에 상대적으로 입사 광량이 부족한 문제를 안고 있음에 따라 32 line의 TDI 방식을 사용한다. TDI 방식을 사용하여 MSC에서 직하방향으로 영상을 촬영할 경우, 영상의 가운데 pixel에서 멀어질수록 TDI에 의해 영상의 MTF 값이 떨어지는 결과가 발생한다. 또한, 다목적 위성 2호는 Roll 축을 중심으로 $\pm$30도 Pitch 축을 중심으로 $\pm$30도 tilt를 하여 영상을 촬영하도록 운영될 예정이기 때문에 더더욱 TDI에 의채 영상의 MTF 값이 떨어지는 결과가 발생하게 된다. 이외에도 TDI는 다목적 위성 2호의 고도가 감소하거나, Yaw 축의 변화, Jitter 등에 의해서도 영상의 MTF 값이 감소하게 된다. 물론 MSC CCD pixel의 sampling rate인 Line Rate 값을 각각의 경우에 따라 적절한 값을 부여함으로써 TDI에 의한 MTF 값의 감소를 많은 부분은 수습할 수 있으나 완벽한 보정은 힘든 상황이다.

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The Study on Testability of high Speed and High Integrated Multichip Module (고속, 고집적 Multichip Module의 시험성 확보에 관한 고찰)

  • 김승곤
    • Journal of the Microelectronics and Packaging Society
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    • v.5 no.2
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    • pp.21-26
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    • 1998
  • 대용량, 고속데이터 처리가 요구되는 System 개발은 이들의 복잡하고 고기능의 회 로 구현이 가능하냐에 달려 있고 또한 이들고기능 요구를 가장 잘 만족할수 있는 패키지는 MCM 이라 할 수있다. 시스템의 고속화, 소형화는 회로의 복잡성을 요구하는 있는 이를 패 키지로 구현하는 MCM은 시험성 확보에 심각한 문제점으로 나타나고 있다. 본 논문에서는 고밀도 구조의 MCM 기판에 대한 Interconnetion Line 시험검증을 위한 Flying Prober의 적 용 및 모듈 패키징 공정에 대한 조립성 검증을 위한 BST에 대해 설명한다. 연구에 사용된 MCM 모듈은 MCM-D 공정으로 제작되었으며 31um 신호선폭, 50um Via Hole Dia. 5신호 선층 5절연층 및 455 Net의 기판으로절연층은 Dow chemical의 BCB-4024/4026을 적용하였 다. 조립은 3 ASIC, 24소자 실장 및 2000 Wire Bonding으로 이루어지며 패키지는 방열특성 을 고려한 BGA(491 I /O,50mil pitch)를 개발하여 사용하였다. MCM 기판의미세패턴으로 구성된 Interconnection Line에 대해 Fine Ptich Probing이 가능한 Flying Prober를 사용하 여 평가하였으며 BST를 이용하여 실장소자의 KGD평가 및 능동, 수동소자가 실장된 MCM Package의 조립시험성을 확보할수 있었다.

Generation of Laser Scan Path Considering Resin Solidification Phenomenon in Micro-stereolithography Technology (마이크로 광 조형기술에서 수지경화현상을 고려한 레이저 주사경로 생성)

  • 조윤형;조동우
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.10a
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    • pp.1037-1040
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    • 2002
  • In micro-stereolithography technology, fabrication conditions that include laser power, laser scan speed, laser scan pitch, and material property of photopolymer such as penetration depth and critical exposure are considered as major process variables. But the existing scan path generation methods based only on CAD model have not taken them into account, which has resulted in cross-section dimension of low accuracy. Thus, to enhance cross-section dimensional accuracy, the physical resin solidification n phenomena should be reflected in laser scan path generation and stage operating code. In this paper, multi-line experiments based on single line solidification model are performed. And the method for improving cross-section dimensional accuracy is presented, which is to apply the database based on experimental results to laser scan path generation.

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