• Journal of the Semiconductor & Display Technology
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• v.3 no.4
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• pp.45-49
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• 2004

We examined large particles and filter size effects of Central Chemical Supplying (CCS) system for STI-CMP on Light Point Defects (LPDs) after polishing. As manufacturing process recently gets thinner below 0.1 um line width, it is very important to keep down post-CMP micro-scratch and LPDs in case of STI-CMP. Therefore, we must control the size distribution of large particles in a slurry. With optimization of final filter size, CCS system is one of the solutions for this issue. The oxide and nitride CMP tests were accomplished using nano-ceria slurries made by ourselves. The number of large particles in a slurry and the number of LPDs on the wafer surface after CMP were reduced with decrease of the final filter size. Oxide removal rates slightly changed according to the final filter size, showing the good performance of self-made nano ceria slurries.

• Journal of the Korean Society of Safety
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• v.27 no.3
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• pp.20-27
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• 2012

Mechanical seals are one of main components of high speed centrifugal pumps. So, it is very important to detect the faults (scratch, notch, indentation, wear) of mechanical seals since the damage of seal can cause a critical failures or accidents of machinery system. In the past, many researchers mainly performed to detect the seal fault using the time signals measured from sensors. Recently, studies are focused on the development of on-line real time monitoring system. But study on the feature parameters used for fault detection of mechanical seals has a little been performed. In this paper, we showed feature parameters extracted from accelerated and acoustic signals by using the discrete wavelet transform (DWT), alpha coefficient, statistical parameters. And also verified the possibility for fault detection of mechanical seal.

• Proceedings of the KIEE Conference
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• 2006.10a
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• pp.224-226
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• 2006

In this paper, we have studied for analysis of the partial discharge(PD) signal in power transmission line. The PD signal has estimated as detected signal accumulation of a PRPDA method by using Labview, and analyzed with neuro-fuzzy algorithm. With practical PD logic implementation of theoretical detected system and hardware implementation, the device for Hipotronics Company's 22.9kV or 154kV setup has generated and then has applied with 18kV,20kV with 1:1 time probe. It's also used the LDPE O.27mmt (scratch error O.05mmt) to sample for making PD. Our new class of PD detected algorithm has also compared with previous PRPDA or Fuzzy algorithm, which has diagnose more conveniently by adding numerical values.

• Proceedings of the Korean Information Science Society Conference
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• 2006.06b
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• pp.277-279
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• 2006

본 논문에서는 스크래치 텍스처 및 형태특성을 이용하여 모든 종류의 스크래치를 자동으로 검출 할 수 있는 방법을 제안한다. 제안한 방법은 텍스처 분류 단계와 형태 필터링 단계를 구성된다. 텍스처 분류단계에서는 스크래치의 텍스처 정보를 이용하여 입력영상의 각 화소를 스크래치와 비스크래래치 영역으로 분류한다. 이때 분류기로 신경망을 사용한다. 형태필터링단계에서는 스크래치의 형태정보에 기반하여 설계된 원소구조를 사용하는 모폴로지 필터를 사용하여 잘못 분류된 스크래치 영역을 제거한다. 제안된 방법의 평가를 위해 다양한 종류의 스크래치를 가진 영화 및 애니메이션 데이터에 대해 실험이 이루어 졌고, 그 결과 제안된 방법의 강건함과 효율성이 입증되었다.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.1445-1446
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• 2007

In this paper, we have studied for analysis of the partial discharge(PD) signal in power transmission line. The PD signal has estimated as detected signal accumulation of a PRPDA method by using Labview, and analyzed with neural-fuzzy algorithm. With practical PD logic implementation of theoretical detected system and hardware implementation, the device for Hipotronics Company's 22.9kV or 154kV setup have generated and then have applied with 18kV,20kV with 1:1 time probe. It's also used the LDPE 0.27mmt (scratch error 0.05mmt) to sample for making PD. Our new class of PD detected algorithm have also compared with previous PRPDA or Neural Fuzzy algorithm, which has diagnose more conveniently by adding numerical values.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.7
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• pp.22-29
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• 2004

As a result of high integration of semiconductor device, the global planarization of multi-layer structures is necessary. So the chemical mechanical polishing(CMP) is widely applied to manufacturing the dielectric layer and metal line in the semiconductor device. CMP process is under influence of polisher, pad, slurry, and process itself, etc. In comparison with the general CMP which uses the slurry including abrasives, fixed abrasive pad takes advantage of planarity, resulting from decreasing pattern selectivity and defects such as dishing & erosion due to the reduction of abrasive concentration especially. This paper introduces the manufacturing technique of fixed abrasive pad using hydrophilic polymers with swelling characteristic in water and explains the self-conditioning phenomenon. And the tungsten CMP using fixed abrasive pad achieved the good conclusion in terms of the removal rate, non-uniformity, surface roughness, material selectivity, micro-scratch free contemporary with the pad life-time.

• Proceedings of the Korea Information Processing Society Conference
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• 2019.05a
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• pp.455-457
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• 2019

In this paper we study the effect of decomposed spatiotemporal convolutions for action recognition in videos. Our motivation emerges from the empirical observation that spatial convolution applied on solo frames of the video provide good performance in action recognition. In this research we empirically show the accuracy of factorized convolution on individual frames of video for action classification. We take 3D ResNet-18 as base line model for our experiment, factorize its 3D convolution to 2D (Spatial) and 1D (Temporal) convolution. We train the model from scratch using Kinetics video dataset. We then fine-tune the model on UCF-101 dataset and evaluate the performance. Our results show good accuracy similar to that of the state of the art algorithms on Kinetics and UCF-101 datasets.

• Asian Pacific Journal of Cancer Prevention
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• v.15 no.6
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• pp.2655-2661
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• 2014

Background: Talin-1 is a cytoskeleton protein that participates in cell migration and plays a role in tumor formation, migration, and metastasis in different types of cancer. Chinese investigators have observed that the levels of Talin-1 protein and mRNA expression in HCC tissues are significantly lower than in the adjacent non-cancerous tissue. However, Japanese investigators have reported that Talin-1 is upregulated in HCC. Tln2 as homologous gene of Tln-1, which encodes a very similar protein, but the role of Talin-2 is very little known in primary liver cancer (PLC). We investigated whether the expression of Talin-1 in PLC may be associated with the histological subtype as well as the role of Talin-1 in tumor cell invasion and migration using human hepatocellular carcinoma cell lines. Materials and Methods: We measured the mRNA expression levels of Talin-1 and Talin-2 in five human liver cancer cell lines and normal human liver cell ($LO_2$ cell line) by real-time PCR and the protein expression levels of Talin-1 by Western blot. Migration and invasion of the cells were assessed using transwell assays and cell scratch experiments, respectively, and proliferation was assessed by soft AGAR colony formation. Results: Talin-1 and Talin-2 expression differed significantly between the five human liver cancer cell lines and $LO_2$ cell line (p<0.05). Compared with the $LO_2$ cell line, the invasion and migration capabilities of the five cancer cell lines differed significantly (p<0.05). Similarly, the colony-forming ability differed (p<0.05). Conclusions: High levels of Talin-1 expression are correlated with reduced invasion and migration as well as decreased malignancy in human liver cancer cell lines; the suppression of Talin-1 promotes invasion and migration. In addition, Talin-2 may be correlated with invasion and migration in human hepatocellular carcinoma.

• Biomedical Science Letters
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• v.17 no.3
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• pp.261-265
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• 2011

Parkin is a putative tumor suppressor protein and its expression is frequently reduced or absent in several types of tumors. In this study, we examined the role of Parkin in mRNA expression of monocyte chemotactic protein-1 (MCP-1) in the breast cancer cell line MCF7. Expression of MCP-1 mRNA increased after TNF-${\alpha}$ treatment. However, overexpression of Parkin induced a decrease in expression of MCP-1 mRNA in TNF-${\alpha}$-stimulated MCF7. This decrease in MCP-1 mRNA by Parkin overexpression occurred in a dose- and time-dependent manner. Using a wound scratch assay, we found that Parkin overexpression in MCF7 cells also resulted in a decrease in cell migration. These results suggest that Parkin down-regulates MCP-1 synthesis leading to decreased migration of tumor cells. We suggest that one possible mechanism by which Parkin acts as a tumor suppressor is by inhibiting migration or metastasis of cancer cells.

• Journal of Korea Multimedia Society
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• v.13 no.2
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• pp.196-204
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• 2010

In this paper, we develope a defect inspection method for each buttons of keypad of cellular phones before they are assembled. The proposed algorithm consists of the similar color checking and its classification, font error detection, and scratch detection based on the segmentation of keypad area and font, translation and rotation processing sequentially. Especially, the proposed segmentation method approximate the pad region as B-spline function to deal with illumination change due to the shape of key button with the slant and curved surface followed by simple thresholding. And also, the rotational information is obtained by using eigen value and eigen vector very fast and effectively. The experimental results show that the performance of the proposed algorithm is good when it is applied to in-line process.