• Journal of the Korean Society for Precision Engineering
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• v.11 no.6
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• pp.168-178
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• 1994

This paper presents an optical surface roughness sensor developed for intermediate- process measurement on the machine. The light scattering method is adopted for the sensor, which is designed conpact and flexible enough to apply to 'on the machine' measurement of surface roughness. The developed sensor has special features such that it makes use, as the measurement parameter, of the ratio between fluxes of the incident light, and the specularly and partly diffusely reflected light, and that it can adjust the incident light angle. The experimental investigation reveals not only the sensor has good performance as a surface roughness sensor but the sensor is very robust so as to be useful in in-process measurement.

• Particle and aerosol research
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• v.12 no.1
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• pp.21-26
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• 2016

In order to realize In-line and convenient measurement for solid-gas two phase flows, Light Transmission Fluctuation (LTF) based on the random variation of transmitted light intensity, light scattering theory and cross-correlation method was presented for online measurement of particle size, concentration and velocity. The statistical relationship among transmitted light intensity, particle size and particle number in measurement zone was described by Beer-Lambert Law. Accordingly, the particle size and concentration were determined from the fluctuation signal of transmitted light intensity. Simultaneously, the particle velocity was calculated by cross-correlation analysis of two neighboring light beams. By considering the influence of concentration variation in industrial applications, the improved algorithm based on spectral analysis of transmitted light intensity was proposed to improve measurement accuracy and stability. Therefore, the online measurement system based on LTF was developed and applied to measure pulverized coal in power station and raw material in cement plant. The particle size, concentration and velocity of powder were monitored in real-time. It can provide important references for optimal control, energy saving and emission reduction of energy-intensive industries.

• Journal of the Optical Society of Korea
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• v.4 no.2
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• pp.89-93
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• 2000

Recently a new signal processing algorithm for white light interferometry was presented. In this paper, the proposed signal processing algorithm was applied for absolute temperature measurement using white light interferometry. Stability testing and absolute temperature measurement were demonstrated. Stability test demonstrated the feasibility of absolute temperature measurement with an accuracy of 0.015 fringe. The test also showed that the absolute temperature measurement system using white light interferometry is capable of obtaining the theoretical minimum detectable change (0.0005 fringe), which is consistent with the performance predicted by the proposed signal processing algorithm.

• IEMEK Journal of Embedded Systems and Applications
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• v.10 no.1
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• pp.1-6
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• 2015

Recently, handy pulse measurement method was introduced by using smart phone camera. However, measured values are not consistent with the variations of external light conditions, because the external light interfere with dynamic range of captured pulse image. Thus, adaptive dynamic range reconstruction algorithm is proposed to conduct pulse measurement robust to light condition. The minimum and maximum values for dynamic ranges of green and blue channels are adjusted to appropriate values for pulse measurement. In addition, sigmoid function based curve is applied to adjusted dynamic range. Experimental results show that the proposed algorithm conducts suitably dynamic range reconstruction of pulse image for the interference of external light sources.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.4
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• pp.79-87
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• 2004

The light pattern reflected from a machined surface contains some information like roughness and profile on the projected surface as expected in the Beckmann-Spizzichino model. In applying the theory into a real reliable measuring device, many parameters such as incident light power, wave length, spot size should be kept a constant optical value. However, the reflected light power is likely to change with the environmental noise, the variations of the light source, the reflectivity of the surface, etc. even though the incident light power is constant. In this study, a method for adjusting the incident light power to keep the reflected light power projected on a CMOS image sensor constant was proposed and a simple adjustment algorithm based on PI digital control was examined. Experiments verified that the proposed method made the surface roughness measurement better and more reliable even under variations of the height of light source.

• Journal of the Optical Society of Korea
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• v.18 no.5
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• pp.531-537
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• 2014

Through-silicon vias (TSVs) are fine, deep holes fabricated for connecting vertically stacked wafers during three-dimensional packaging of semiconductors. Measurement of the TSV geometry is very important because TSVs that are not manufactured as designed can cause many problems, and measuring the critical dimension (CD) of TSVs becomes more and more important, along with depth measurement. Applying white-light scanning interferometry to TSV measurement, especially the bottom CD measurement, is difficult due to the attenuation of light around the edge of the bottom of the hole when using a low numerical aperture. In this paper we propose and demonstrate four bottom CD measurement methods for TSVs: the cross section method, profile analysis method, tomographic image analysis method, and the two-dimensional Gaussian fitting method. To verify and demonstrate these methods, a practical TSV sample with a high aspect ratio of 11.2 is prepared and tested. The results from the proposed measurement methods using white-light scanning interferometry are compared to results from scanning electron microscope (SEM) measurements. The accuracy is highest for the cross section method, with an error of 3.5%, while a relative repeatability of 3.2% is achieved by the two-dimensional Gaussian fitting method.

• Journal of Mechanical Science and Technology
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• v.19 no.5
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• pp.1131-1137
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• 2005

Methods for measuring surface roughness based on light reflectivity have advantages over methods based on light interference or diffraction, especially in in-situ, on-the-machine and in-process applications. However, measurement inconsistencies caused by changes in the specimen are still a drawback for field applications. In this study, we propose a new feedback-based algorithm to enhance the consistency against changes in the specimen. The algorithm is deduced from simulations based on light reflectance theory with typical modeled surfaces. The proposed method is similar to a digital controller and regulates the power of reflected light. Experiments varying heights and materials, verified the improvements in robustness of the method against measurement disturbances caused by specimen changes.

• International Journal of Control, Automation, and Systems
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• v.3 no.1
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• pp.130-136
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• 2005

A new optical digitizing system for determining the position of a cursor in three dimensions(3D) and an experimental device for its measurement are presented. A semi-passive system using light intensity modulation, a technology that is well known in radar ranging, is employed in order to overcome precision limitations imposed by background light. This system consists of a charge-coupled device camera placed before a rotating mirror and a light-emitting diode whose intensity is modulated. Using a Fresnel pattern for light modulation, it is verified that a substantial improvement of the signal to noise ratio is realized for the background noise and that a resolution of less than a single pixel can be achieved. This opens the doorway to the realization of high precision 3D digitized measurement. We further propose that a 3D position measurement with a monocular optical system can be realized by a numerical experiment if a linear-period modulated waveform is adopted as the light-modulating one.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.05a
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• pp.1409-1416
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• 2006

In measuring, uncertainty in measurement is essential to improve measuring reliability. Currently, however, in measuring impact sound insulation of floors, there are no guidelines to estimate uncertainty in measurement. In addition, the concept of uncertainty in rating is required to recognize the relation between measuring and rating. Therefore, through this paper, the efforts have been made to establish uncertainty in measurement and rating of light impact insulation of floors. The result of estimating of uncertainty in measurement and rating in our laboratory is considered reliable, considering ${\pm}0.46{\sim}1.44dB$ of uncertainty in measurement and 1 dB of uncertainty in rating.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.54 no.12
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• pp.585-587
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• 2005

In this paper, We studied two methods to measure optical characteristics of an electrodeless light source using the integrating sphere(diameter 1.5m). One is to use a center measurement method and the other is to use a side measurement method. As a result of analysis, a side measurement methode without auxiliary lamp is almost similar against a center measurement with auxiliary lamp to reduce a measurement of an error for luminous flux, luminous efficacy and spectral distribution etc. Therefore, Sample which cannot measured by reason of big size and heavy weight can be measured by a side measurement method.