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A Robust Algorithm for Roughness Laser Measurement based on Light Power Regulation against Specimen Changes  

Seo Young Ho (Graduate school, Department of Mechanical and Intelligent Systems Engineering, Pusan National University)
Ahn Jung Hwan (ERC / NSDM, Professor, School of Mechanical Engineering, Pusan National University)
Publication Information
Journal of Mechanical Science and Technology / v.19, no.5, 2005 , pp. 1131-1137 More about this Journal
Abstract
Methods for measuring surface roughness based on light reflectivity have advantages over methods based on light interference or diffraction, especially in in-situ, on-the-machine and in-process applications. However, measurement inconsistencies caused by changes in the specimen are still a drawback for field applications. In this study, we propose a new feedback-based algorithm to enhance the consistency against changes in the specimen. The algorithm is deduced from simulations based on light reflectance theory with typical modeled surfaces. The proposed method is similar to a digital controller and regulates the power of reflected light. Experiments varying heights and materials, verified the improvements in robustness of the method against measurement disturbances caused by specimen changes.
Keywords
Surface Roughness; Reflected Laser Beam; Measurement Robustness; Power Regulating; Feedback Control; Specimen Changes;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
Times Cited By Web Of Science : 0  (Related Records In Web of Science)
Times Cited By SCOPUS : 0
연도 인용수 순위
1 Yun-Fen Shen, 2001, 'Surface Roughness Measurement by Image Processing of Scattered Laser Beam Pattern,' Doctorial Thesis, Pusan National University
2 Yun-Fen Shen, Han-Seok Lim, Hwa-Young Kim and Jung-Hwan Ahn, 1999, 'A Study on Roughness Measurement of Polished Surfaces Using Reflected Laser Beam Image,' Korean Society of Precision Engineering, Vol. 16, No. 2, pp. 145-152.   과학기술학회마을
3 Satoru TAKAHASHI, Takashi MIYOSHI, Yasuhiro TAKAYA and Yasufumi TATSUNO, 2002, 'Study on In-Process Measurment of Silicon Wafer Surface Defects by Laser Scattered Defect Pattern (2nd Report) - Fast Defect Measurment Method Using LSDP,' Japan Society of Precision Engineering, Vol. 68, No.7, pp. 1431-1435   DOI
4 Shree, K. Nayar, Katsushi Ikeuchi and Takeo Kanade, 1991, 'Surface Reflection: Physical and Geometrical Perspectives,' IEEE Transactions on Pattern Analysis and Machine Intelligence, Vol. 13, No. 7, pp.611-634   DOI   ScienceOn
5 Yim, D. Y. and Kim, S. W., 1988, 'A Non-contact Optical Roughness Measurement Technique of Ground Surfaces by Light Scattering,' KSME Journal, Vol. 12, No.6, pp. 1303-1311   과학기술학회마을
6 Dorf, B. C. and Bishop, R. H., 1995, 'Modern Control Systems 7th Edition,' Addison Wesley
7 Young-Ho Seo and Jung-Hwan Ahn, 2004, 'Blending of Reflected Light Components Using Weighting Function on a Laser Surface Roughness Measurement,' Proceedings. Korean Society of Precision Engineering, pp. 356-359
8 Young-Ho Seo, Ju-Nyun Kim and Jung-Hwan Ahn, 2004, 'Estimation of Specular Light Power by Adjusting Incident Laser Power for Measuring Mirror-Like Surface Roughness,' Korean Society of Precision Engineering, Vol. 21, No.6, pp.94-101   과학기술학회마을
9 Young-Ho Seo, Hwa-Young Kim and Jung-Hwan Ahn, 2004, 'Adjustment Algorithm of Incident Light Power for Improving Performance of Laser Surface Roughness Measurement,' Korean Society of Precision Engineering, Vol. 21, No.4, pp.79-87   과학기술학회마을
10 Beckmann, P. and Spizzichino, A., 1963 'The Scattering of Electromagnetic Waves from Rough Surfaces,' Pergamon Press, Oxford
11 Hiroshi HARADA, Hideki NAKAJIMA, Teruo YAMAGUCHI and Atsuhiko NODA, 2002, 'Optical Sensing of Surface Roughness for Polishing Robot (3Rd Report),' Japan Society of Precision Engineering, Vol. 68, No. 11, pp.962-966   DOI
12 Sang-Shin Park and Yoomin Ahn, 1997, 'Surface Roughness and Material Removal Rate of Lapping Process on Ceramics,' KSME International Journal, Vol. 11, No. 5, pp. 494-504   DOI