• Title/Summary/Keyword: Lift-off

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Fabrications of nano-sized patterns using bi-layer UV Nano imprint Lithography (UV NIL을 이용한 Lift-off가 용이한 패턴 형성 연구)

  • Yang K.Y.;Hong S.H.;Lee H.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.1489-1492
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    • 2005
  • Compared to other nano-patterning techniques, Nano imprint Lithography (NIL) has some advantages of high throughput and low process cost. To imprint low temperature and pressure, UV Nano imprint Lithography, which using the monomer based UV curable resin is suggested. Because fabrication of high fidelity pattern on topographical substrate is difficult, bi-layer Nano imprint lithography, which are consist of easily removable under-layer and imprinted pattern, is being used. If residual layer is not remained after imprinting, and under-layer is removed by oxygen RIE etching, we might be able to fabricate the bi-layer pattern for easy lift-off process.

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Lift-Off Voltage and Partial Discharge Characteristics of Free Metallic Particles in GIS (GIS 내 금속입자의 부상전압과 부분방전특성 연구)

  • Yun, Jin-Yeol;Han, Sang-Ok
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.48 no.2
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    • pp.127-132
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    • 1999
  • Both motion of free metallic particles from which most GIS internal failures are caused and partial discharges from the particles were examined using EHV GIS test chamber. Effects from particle length and gas pressure which are main factors to lead to breakdown failure were investigated theoretically and experimentally. Magnitude of both lift-off voltage and partial discharge inception voltage were measured respectively and, through these measurements, this paper showed the possibility of predicting breakdown fault and of taking action to prevent the fault in advance. The measurement of partial discharge when the particles began to move could be adopted to decide minimum sensitivity in developing predictive diagnostic equipments. Both the amount of apparent discharge and real discharge in GIS were examined theoretically and experimentally, then experimental results were analyzed on the basis of the theory.

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The Fabrication of Micro-electrodes to Analyze the Single-grainboundary of ZnO Varistors and the Analysis of Electrical Properties (ZnO 바리스터의 단입계면 분석을 위한 마이크로 전극 제작과 전기적 특성 해석)

  • So, Soon-Jin;Lim, Keun-Young;Park, Choon-Bae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.3
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    • pp.231-236
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    • 2005
  • To investigate the electrical properties at the single grainboundary of ZnO varistors, micro-electrodes were fabricated on the surface which was polished and thermally etched. Our micro-electrode had 2000 $\AA$ silicon nitride layer between micro-electrode and ZnO surface. This layer was deposited by PECVD and etched by RIE after photoresistor pattering process using by mask 1. The metal patterning of micro-electrodes used lift-off method. We found that the breakdown voltage of single grainboundary is about 3.5∼4.2 V at 0.1 mA on I-V curves. Also, capacitance-voltage measurement at single grainboundary gave several parameters( $N_{d}$, $N_{t}$, $\Phi$$_{b}$, t) which were related with grainboundary.ary.

Design and Characteristics Analysis of Eddy Current Sensor (와전류센서의 설계 및 특성해석)

  • Choi Duck-Su;Lee Hyang-Beom
    • 한국정보통신설비학회:학술대회논문집
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    • 2003.08a
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    • pp.63-65
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    • 2003
  • 본 논문은 수치해석을 이용하여 와전류센서의 설계 및 특성을 고찰하였다. 와전류센서의 설계에 있어서 직경 및 폭을 변화시켰다. 와전류센서에 인가되는 주파수와 lift-off, 도전율의 변화에 대해 수치해석을 수행하였다. 수치해석을 통해 와전류센서의 임피던스값을 산출하고 정규화 임피던스도를 그려 와전류센서의 특성을 살펴 보았다. 수치해석결과, 와전류센서의 폭을 크게 하는 것 보다. 직경을 크게 하는 것이 감도가 좋은 특성을 나타냈다. lift-off효과는 와전류센서와 시험대상 사이의 거리가 작을수록 감도가 좋았다. 도전율 변화에 따른 특성은 도전율이 증가할수록 임피던스도의 반원의 궤적이 아래로 향하는 것을 알 수 있었다.

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A Study on Loading/Unloading Methods for High-Speed Container Loading/Unloading System (고속 컨테이너 하역시스템의 하역방법에 관한 연구)

  • 박경택;김선호;김두형
    • Proceedings of the Korean Institute of Navigation and Port Research Conference
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    • 1998.10a
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    • pp.167-174
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    • 1998
  • Recently several researches of high speed container ship and loading system are mainly accomplished in U.S.A. and Japan. Its shipping service is not realized but it is realized in near future. To effective use of the feature and efficiency of them, quay, loading/unloading. yard operation system, port management system and connection transport system must be well integrated and operated. Specially, loading /unloading speed of container crane is important for making effective use of them. To speed up loading/unloading system, RO-RO and LO-LO methods that are mostly exclusive system are studied on the container crane with special structure and mechanism to handle individual container or bundle of containers. In this paper these methods are shown. When new high speed loading system of container is desighed, the realistic constrains must be considered.

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Laser Assisted Lift-Off Process as a Organic Patterning Methodology for Organic Thin-Film Transistors Fabrication

  • Kim, Sung-Jin;Ahn, Taek;Suh, Min-Chul;Mo, Yeon-Gon;Chung, Ho-Kyoon;Bae, Jin-Hyuk;Lee, Sin-Doo
    • 한국정보디스플레이학회:학술대회논문집
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    • 2006.08a
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    • pp.1154-1157
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    • 2006
  • Organic thin-film transistors (OTFTs) based on a semiconducting polymer have been fabricated using an organic patterning methodology. Laser assisted lift-off (LALO) technique, ablating selectively the hydrophobic layer by an excimer laser, was used for producing a semiconducting polymer channel in the OTFT with high resolution. The selective wettability of a semiconducting polymer, poly (9-9-dioctylfluorene-co-bithiophene) (F8T2), dissolved in a polar solvent was found to define precisely the pattering resolution of the active channel. It is demonstrated that in the F8T2 TFTs fabricated using the LALO technique and is applicable for the larger area display.

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Design of Dynamic Absorber to Improve Shock Performance of Actuator Ann in a Hard Disk Drive (HDD Actuator의 충격성능향상을 위한 동흡진기의 설계)

  • Lee, Haeng-Soo
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2000.06a
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    • pp.468-471
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    • 2000
  • HDD가 비동작중 외부충격을 받았을 경우에 대해 수치해석을 이용하여 HSA(head stack ass'y)의 거동과 헤드가 디스크 면에서 멀어지는 Lift-off level을 고찰하고, actuator의 arm blade(primary system)의 끝단에 보조의 구조물(auxiliary system)을 붙여 반사인파의 가속도입력에 의해 발생되는 HSA의 진폭을 감소시키고 내충격성능을 향상시키고자 한다. 보조 구조물의 형태와 재료는 arm blade의 공진과 연계한 공진주파수의 최적화과정에 의해 결정된다. 실제 제품의 취급에서 가장 쉽게 발생할 수 있는 0.5ms의 duration time으로부터 제품의 성능평가 요건인 2ms의 duration time까지의 반사인파의 입력에 대한 응답을 고찰한 결과 보조의 구조물을 가졌을 경우 주 시스템보다 훨씬 높은 충격에서 헤드의 lift-off이 발생되어 전체 시스템의 내충격성능을 향상시킴을 알 수 있다.

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The Properties of High Speed AlGaAs/GaAs Infrared LED by using Metal wet etch process (습식식각공정에 의한 High Speed용 AlGaAs/GaAs 적외선 LED 소자의 특성)

  • Lee, Cheol-Jin;Ra, Yong-Choon;Sung, Man-Young;Lee, Eun-Chul
    • Proceedings of the KIEE Conference
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    • 1995.11a
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    • pp.352-354
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    • 1995
  • The optical and electrical properties of High Speed AlGaAs infrared LED by using metal wet etch process instead of metal lift-off process are investigated. The power out increases when metal contact is patterned by wet etch process. Forward voltage and Reverse voltage for metal wet etch process represent higher value than the metal lift-off process. The aging effect of power out also indicates good results with wet etch process. The wet etch process for metal contact reveals reliable LED device properties.

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On the Large Eddy Simulation of High Prandtl Number Scalar Transport Using Dynamic Subgrid-Scale Model

  • Na, Yang
    • Journal of Mechanical Science and Technology
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    • v.18 no.1
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    • pp.173-182
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    • 2004
  • The present study has focused on numerical investigation on the flame structure, flame lift-off and stabilization in the partially premixed turbulent lifted jet flames. Since the lifted jet flames have the partially premixed nature in the flow region between nozzle exit and flame base, level set approach is applied to simulate the partially premixed turbulent lifted jet flames for various fuel jet velocities and co-flow velocities. The flame stabilization mechanism and the flame structure near flame base are presented in detail. The predicted lift-off heights are compared with the measured ones.

The effect of particle on insulation Characteristic of $SF_6-N_2$ Mixtures ($SF_6-N_2$ 혼합가스의 절연특성에 미치는 파티클의 영향)

  • Lee, Kon;Lee, Dong-Zoon;Lee, Kang-Soo;Kim, Kyung-Wha;Kwak, Hee-Ro
    • Proceedings of the KIEE Conference
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    • 1999.07e
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    • pp.2383-2385
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    • 1999
  • This paper describes the effect of particles on insulation characteristics of $SF_6-N_2$ mixtures such as breakdown voltages, lift-off voltages and maximum discharge. As a result, the breakdown voltage was increased with the increment of $SF_6$ and the mixture containing 20[%] of $SF_6$ has a breakdown voltage ratio factor better than the other mixtures. The lift-off voltage was nearly constant with all mixtures. Discharge was decreased with the increment of $SF_6$.

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