• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.45-48
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• 2003

The polishing mechanism of W-CMP process has been reported as the repeated process of passive layer formation by oxidizer and abrasion action by slurry abrasives. Thus, it is important to understand the effect of oxidizer on tungsten passivation layer in order to obtain higher removal rate (RR) and very low non-uniformity (NU%) during W-CMP process. In this paper, we investigated the effects of oxidizer on W-CMP process with three different kinds of oxidizers, such as $H_2O_2$, $Fe(NO_3)_3$, and $KIO_3$. In order to compare the removal rate and non-uniformity of three oxidizers, we used alumina-based slurry of pH 4. According to the CMP tests, three oxidizers showed different removal mechanism on tungsten surface. Also, the microstructures of surface layer by AFM image were greatly influenced by the slurry chemical, composition of oxidizers. The difference in removal rate and roughness of tungsten surface are believed to caused by modification in the mechanical behavior of $Al_2O_3$ abrasive particles in CMP slurry. Our stabilized slurries can be used a guideline and promising method for improved W-CMP process.

• Journal of People, Plants, and Environment
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• v.22 no.6
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• pp.551-561
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• 2019

This study was conducted to find out differences in the removal efficiency of particulate matter (PM) depending on the type of plants and the morphological characteristics of leaves. A total of 12 plants were used, with three plants selected for each type of leaves (big leaf, small leaf, compound leaf, needle leaf). We measured the removed amount of PM10 and PM2.5, the structure of the abaxial leaf surface, and the weight of the wax layer of each plant. Plants with the high removal efficiency of PM included Pachira aquatica Aubl., Ardisia crenata, and Dieffenbachia 'Marianne', and plants with the low removal efficiency included Nandina domestica Thunb, Schefflera arboricola, and Quercus dentata. The abaxial leaf surface having a high removal efficiency of PM had many large wrinkles, and the abaxial leaf surface having a medium removal efficiency was flat and smooth. On the other hand, there were many fine hairs on the abaxial leaf surface with a low removal efficiency. According to the plant leaf type, the PM10 removal efficiency of plants with needle leaves was about three times higher than that of other plants. In particular, the wax layer of conifers weighed 6-24 times higher than those of other plants. The stomata of conifers were evenly distributed on the adaxial and abaxial leaf surfaces; however, the stomata of Sciadopitys verticillata appeared in the form of papillae unlike general stomata. Therefore, the removal efficiency of PM varied depending on the macro-, and micro-morphological characteristics of plant leaves such as the structure of the abaxial leaf surface, and the weight of the wax layer. Based on this research, selecting plants that are effective in reducing PM in consideration of the plant type and leaf characteristics will improve indoor air quality and decrease exposure of PM to human body.

• Tribology and Lubricants
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• v.37 no.6
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• pp.208-212
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• 2021

Chemical mechanical polishing (CMP) is a key technology used for the global planarization of thin films in semiconductor production and smoothing the surface of substrate materials. CMP is a type of hybrid process using a material removal mechanism that forms a chemically reacted layer on the surface of a material owing to chemical elements included in a slurry and mechanically removes the chemically reacted layer using abrasive particles. Sapphire is known as a material that requires considerable time to remove materials through CMP owing to its high hardness and chemical stability. This study introduces a technology using electrolytic ionization and ultraviolet (UV) light in sapphire CMP and compares it with the existing CMP method from the perspective of the material removal rate (MRR). The technology proposed in the study experimentally confirms that the MRR of sapphire CMP can be increased by approximately 29.9, which is judged as a result of the generation of hydroxyl radicals (·OH) in the slurry. In the future, studies from various perspectives, such as the material removal mechanism and surface chemical reaction analysis of CMP technology using electrolytic ionization and UV, are required, and a tribological approach is also required to understand the mechanical removal of chemically reacted layers.

• Restorative Dentistry and Endodontics
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• v.42 no.4
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• pp.324-331
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• 2017

Objectives: This study evaluated smear layer removal by different chemical solutions used with or without ultrasonic activation after post preparation. Materials and Methods: Forty-five extracted uniradicular human mandibular premolars with single canals were treated endodontically. The cervical and middle thirds of the fillings were then removed, and the specimens were divided into 9 groups: G1, saline solution (NaCl); G2, 2.5% sodium hypochlorite (NaOCl); G3, 2% chlorhexidine (CHX); G4, 11.5% polyacrylic acid (PAA); G5, 17% ethylenediaminetetraacetic acid (EDTA). For the groups 6, 7, 8, and 9, the same solutions used in the groups 2, 3, 4, and 5 were used, respectively, but activated with ultrasonic activation. Afterwards, the roots were analyzed by a score considering the images obtained from a scanning electron microscope. Results: EDTA achieved the best performance compared with the other solutions evaluated regardless of the irrigation method (p < 0.05). Conclusions: Ultrasonic activation did not significantly influence smear layer removal.

• The Korean Journal of Ecology
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• v.24 no.2
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• pp.87-91
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• 2001

The response of respiration rates of root, Ao layer and mineral soil to varying environmental factors was studied in Popuius maximowiczii stand (25-year-old) during the growing season of 1997. Soil temperature showed a pronounced seasonal course, in contrast to soil moisture. The mineral soil respiration was high in August, and root and Ao layer respiration, were high in July. An exponential equation best described the relationships between soil temperature and mineral soil respiration, and total soil respiration (r＝0.95 and 0.92, p＜0.001), respectively. In P. maximowiczii stand, soil respiration rates were reduced by about 19% after removal of the Ao layer, and by about 30% after removal of living root. Therefore, mineral soil respiration seemed to contribute gretly to the total soil respiration (50%).

• Journal of Korea Foundry Society
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• v.31 no.2
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• pp.66-70
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• 2011

Hot dip aluminizing (HDA) is widely used in industry for improving corrosion resistance of material. The formation of intermetallic compound layers during the contact between dissimilar materials at high temperature is common phenomenon. Generally, intermetallic compound layers of $Fe_2Al_5$ and $FeAl_3$ are formed at the Al alloy and Fe substrate interface. In case of cast iron, high contact angle of graphite existed in the matrix inhibits the formation of intermetallic compound layer, which carry with it the disadvantage of a reduced reaction area and mechanical properties. In present work, the process for the removal of graphite existed on the surface of specimen has been investigated. And also HDA was proceeded at $800^{\circ}C$ for 3 minutes in aluminum alloy melt. The efficiency of graphite removal was increased with the reduction of particle size in sanding process. Graphite appears to be present both in the region of melting followed by re-solidification and in the intermetallic compound layer, which could be attributed to the fact that the surface of cast iron is melted down by the formation of low melting point phase with the diffusion of Al and Si to the cast iron. Intermetallic compound layer consisted of $Fe(Al,Si)_3$ and $Fe_2Al_5Si$, the layer formed at cast iron side contained lower amount of Si.

• Journal of Korean Society of Water and Wastewater
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• v.23 no.5
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• pp.599-608
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• 2009

This manuscript covers the results of field investigation and lab-scale experiments to design a double-layered biofilter system to control urban storm runoff. The biofilter system consisted of a coarse soil layer (CSL) for filtration and fine soil layer (FSL) for adsorption and biological degradation. The variations of flow rate and water quality of runoff from a local expressway were monitored for seven storm events. Laboratory column experiments were performed using seven kinds of soil and mulch to maximize pollutants removal. The site mean concentration (SMC) of storm runoff from the drainage area (runoff coefficient: 0.92) was measured to be 203 mg/L for SS, 307 mg/L for $TCOD_{Cr}$, 12.3 mg/L for TN, 7.3 mg/L for ${NH_4}^+-N$, and 0.79 mg/L for TP, respectively. This study employed a new design concept, to cover the maximum rainfall intensity with one month recurrence interval. Effective storms for last ten years (1998-2007) in seoul suggested the design rainfull intensity to be 8.8 mm/hr Single layer soil column showed the maximum removal rate of pollutants load when the uniformity coefficient of CSL was 1.58 and the silt/clay contents of FSL was virtually 7%. The removal efficiency during operation of double layer soil column was 98% for SS and turbidity, 75% for TCODCr, 56% for ${NH_4}^+-N$, 87% for TP, and 73-91% for heavy metals. The hydraulic conductivity of the soil column, 0.023 cm/sec, suggested that the surface area of the biofilter system should be about 1% of the drainage area to treat the rainfall intensity of one month recurrence interval.

• Restorative Dentistry and Endodontics
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• v.14 no.2
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• pp.65-76
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• 1989

The purpose of this study was to observe the effect on the removal of dentinal smear layer and morphological changes of reduced dentin surfaces by various dentin surface conditioners. Thirty-two healthy human premolars extracted due to periodontal or orthodontic reasons were used. The teeth were cross-sectioned to expose dentin at the middle portion of the crown with diamond rotary saw. The specimens were then divided into 8 groups. The sectioned dentin surfaces in group 1 to 4 were grinded with No. 400 grit silicone abrasive paper and those in group 5 to 8 were cut with #700 carbide bur under air-water spray. The grinded or cut dentin surfaces were conditioned with 3% $H_2O$, Dentin Conditioner(GC Inter. Corp., Japan), and Scotchprep(3M Dent Prod., U.S.A) according to manufacturer's directions. All the specimens were dried in room temperature for 48 hours, and gold-coated with Eiko ion coater(Eik-engineering Co.), and observed in Hitachi S-450 Scanning electron microscope at 15-25 KV. The following results were obtained; 1. The dentin surfaces grinded with the silicon abrasive paper were rougher in texture and heavier in amount of smear layer than those cut with the carbide bur. 2. Scrubbing of 3% $H_2O_2$ was not effective in removing dentinal smear layer. 3. 20-second conditioning of Dentin Conditioner (GC Inter. Corp) resulted in the removal of a significant amount of the smear layer without removing the tubular plugs and dissolving the peritubular dentin. 4. Scotchprep removed the smear layer very effectively. But at the same time it dissolved the peritubular dentin. 5. Irrespective of the uses of the silicon carbide abrasive paper or the carbide bur the morphological changes of dentin surfaces treated with the same conditioning agents were similar.

• Restorative Dentistry and Endodontics
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• v.45 no.3
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• pp.28.1-28.13
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• 2020

Objectives: To evaluate the outcome of in vitro studies comparing the effectiveness of QMix irrigant in removing the smear layer in the root canal system compared with other irrigants. Materials and Methods: The research question was developed by using Population, Intervention, Comparison, Outcome and Study design framework. Literature search was performed using 3 electronic databases PubMed, Scopus, and EBSCOhost until October 2019. Two reviewers were independently involved in the selection of the articles and data extraction process. Risk of bias of the studies was independently appraised using revised Cochrane Risk of Bias tool (RoB 2.0) based on 5 domains. Results: Thirteen studies fulfilled the selection criteria. The overall risk of bias was moderate. QMix was found to have better smear layer removal ability than mixture of tetracycline isonomer, an acid and a detergent (MTAD), sodium hypochlorite (NaOCl), and phytic acid. The efficacy was less effective than 7% maleic acid and 10% citric acid. No conclusive results could be drawn between QMix and 17% ethylenediaminetetraacetic acid due to conflicting results. QMix was more effective when used for 3 minutes than 1 minute. Conclusions: QMix has better smear layer removal ability compared to MTAD, NaOCl, Tubulicid Plus, and Phytic acid. In order to remove the smear layer more effectively with QMix, it is recommended to use it for a longer duration.

• The Journal of Korean Academy of Prosthodontics
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• v.41 no.2
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• pp.128-135
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• 2003

Statement of problem : Implant screw loosening remains a problem in implant prosthodontics. Some abutment screws with treated surfaces were introduced to prevent screw loosening and to increase preload. DLC(Diamond Like Carbon) film has similar properties on hardness, wear resistance, chemical stability, biocompatibility as real diamond materials. Purpose : The purpose of this study was to investigate the effect of lubricant layer on abutment screw and to discriminate more effective method between soft lubricant and hard lubricant to prevent screw loosening. Material and method : In this study, $1{\mu}m$ thickness DLC was used as protective, lubricating layer of titanium screws and 3 times removal torque was measured on the abutment screws to investigate the difference in 10 coated and 10 non-coated abutment screws. Results : The results indicated that the implants with DLC coating group were not more resistant to the applied force in screw loosening. At 32Ncm, the 3 times removal torque in DLC group were $27.75{\pm}2.89,\;25.85{\pm}2.35$ and $26.2{\pm}2.57$. The removal torque in no-coated abutment screws were $27.85{\pm}4.23,\;27.35{\pm}2.81$ and $27.9{\pm}2.31$, respectively. Conclusion : The lubricant layer used in this study was Diamond Like Carbon(DLC) and it have a properties of hard and stable layer. The DLC coating layer was hard enough to prevent distortion of screws in the repeated unscrewing procedure in clinical situation. The reduced friction coefficient in hard DLC layer was not effective to prevent screw loosening.