• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1871-1874
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• 2005

The direct write FIB technology has several advantages over contemporary micro-machining technology, including better feature resolution with low lateral scattering and capability of maskless fabrication. Therefore, the application of FIB technology in micro fabrication has become increasingly popular. In recent model of FIB, however the feeding system has been a very coarse resolution of about a few ${\mu}m$. Our research is the development of nano stage of 200mm strokes and 10nm resolutions. Also, this stage should be effectively operating in ultra high vacuum of about $1x10^{-7}$ torr. This paper presents the discussion and results of CAE of the 2 axes stages. we have estimated the stable static and dynamic characteristics for dual servo system. Therefore the 2 axes stages developed and future work are introduced at the end of the paper.

• Macromolecular Research
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• 제14권5호
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• pp.559-564
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• 2006

The improvement of spatial resolution is a fundamental issue in the two-photon, polymerization-based, laser writing. In this study, a voxel tuning method using a radical quencher was proposed to increase the resolution, and the quenching effect according to the amount of radical quencher was experimentally investigated. Employing the proposed method, the lateral resolution of the line patterns was improved almost to 100 nm. However, a shortcoming of the quenching effect was the low mechanical strength of polymerized structures due to their short chain lengths. Nano-indentation tests were conducted to evaluate quantitatively the relationship between mechanical strength and the mixture ratio of the radical quencher into the resins. The elastic modulus was dramatically reduced from an average value of 3.015 to 2.078 GPa when 5 wt% of radical quencher was mixed into the resin. Three-dimensional woodpile structures were fabricated to compare the strength between the resin containing radical quencher and the original resin.

• International Journal of Precision Engineering and Manufacturing
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• 제8권2호
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• pp.32-37
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• 2007

This paper proposes a dual-mode ultra precision positioning system for machine tools and measuring machines. The objective was to position a machine table with a picometer order of resolution, i.e., pico-positioning. A twist-roller friction drive (TFD) was used in coarse-mode positioning. The TFD, which was driven by an AC servomotor, is a kind of lead screw in mechanical terms, and several centimeters of machine table movement was controlled with a nanometer order of positioning resolution. To eliminate lateral vibration caused by the TFD, an active aerostatic coupling driven by piezoelectric actuators was inserted between the TFD and the machine table. This active aerostatic coupling was also applied as a feed drive device for fine-mode positioning; in the fine mode, the positioning resolution was 50 pm. Factors influencing pico-positioning, such as how noise from displacement sensors and vibrations in the aerostatic guideway affect positioning resolution, are discussed.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.328-328
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• 2007

Large area matrix-addressed image detectors are a recent technology for x-ray imaging with medical diagnostic and other applications. The imaging properties of x-ray pixel detectors depend on the quantum efficiency of x-rays, the generated signal of each x-ray photon and the distribution of the generated signal between pixels. In a phosphor coated detector the light signal is generated by electrons captured in the phosphor screen. In our study we simulated the lateral spread distributions for phosphor coupled detector by Monte Carlo simulations. Most simulations of such detectors simplify the setup by only taking the conversion layer into account neglecting behind. The Monte Carlo code MCNPX has been used to simulate the complete interaction and subsequent charge transport of x-ray radiation. This has allowed the analysis of charge sharing between pixel elements as an important limited factor of digital x-ray imaging system. The parameters are determined by lateral distribution of x-ray photons and x-ray induced electrons. The primary purpose of this study was to develop a design tool for the evaluation of geometry factor in the phosphor coupled optical imaging detector. In order to evaluate the spatial resolution for different phosphor material, phosphor geometry we have developed a simulation code. The developed code calculates the energy absorption and spatial distribution based on both the signal from the scintillating layer and the signal from direct detection of x-ray in the detector. We show that internal scattering contributes to the so-called spatial resolution drop of the image detector. Results from the simulation of spatial distribution in a phosphor pixel detector are presented. The spatial resolution can be increased by optimizing pixel size and phosphor thickness.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2006년도 추계 학술대회논문집
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• pp.7-8
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• 2006

The governing equations for high-speed lateral atomizing injector nozzle flow based on the LES-VOF model in conjunction with the CSF model are presented, and then an integrated parallel computation are performed to clarify the detailed atomization process of a high speed nozzle flow and to acquire data which is difficult to confirm by experiment such as atomization length, liquid core shapes, droplets size distributions, spray angle and droplets velocity profiles. According to the present analysis, it is found that the atomization rate and the droplets-gas two-phase flow characteristics are controlled by the turbulence perturbation upstream of the injector nozzle, hydrodynamic instabilities at the gas-liquid interface, shear stresses between liquid core and periphery of the jet. Furthermore, stable and a high-resolution computation can be attained in the high density ratio (pl/ pg = 554) conditions conditions by using our numerical method.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1995년도 Proceedings of the Korea Automation Control Conference, 10th (KACC); Seoul, Korea; 23-25 Oct. 1995
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• pp.236-239
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• 1995

It is useful to simulate the human visual function for the purpose of image-processing. In this study, the hardware of the spatial filter with the sensitivity of lateral inhibition is realized by the combination of optical parts with electronic circuits. The diffused film with the characteristics of Gaussian type is prepared as a spatial filter. An object's image is convoluted with the spatial filter. From the difference of the convoluted images, the zero-cross position is detected at video rate. The edge of object is extracted in real-time by the use of this equipment. The resolution of edge changes with the value of the standard deviation of diffused film. In addition, it is possible to extract a directional edge selectively when the spatial filter with directional selectivity is used instead of Gaussian type of spatial filter.

• 대한의용생체공학회:의공학회지
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• 제26권1호
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• pp.31-35
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• 2005

A novel synthetic aperture method for real-time three-way dynamic focusing is proposed, which provides lateral beam patterns represented as the product of Fourier transforms of transmit subaperture, receive subaperture, and a synthetic window function. In the proposed method, all array elements are fired individually and for each firing echo signals are recorded from all elements of a receive subaperture moving along an array with the transmit element. The three-way dynamic focusing is then achieved by employing a synthetic aperture algorithm for two-way dynamic focusing and a synthetic focusing method for transmit dynamic focusing. Both theoretical analysis and computer simulation results show that the proposed method produces ultrasound beams with improved lateral resolution at all depths compared to the conventional phased array imaging and synthetic aperture focusing methods.

• 한국정밀공학회지
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• 제31권3호
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• pp.199-205
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• 2014

We propose a new variant of lateral shearing interferometer with a tunable laser source that enables 3D surface profile measurements of freeform optics with high speed, high vertical resolution, large departure, and large field-of-view. We have verified the proposed technique by comparing our measurement result with that of an existing technique and measuring a representative sample of freeform optics. Moreover, we propose a new algorithm that is able to compensate the rotational inaccuracy.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.472-477
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• 2004

Miniaturization is the central theme in modern fabrication technology. Many of the components used in modem products are becoming smaller and smaller. The direct write FIB technology has several advantages over contemporary micromachining technology, including better feature resolution with low lateral scattering and capability of mastless fabrication. Therefore, the application of focused ion beam(FIB) technology in micro fabrication has become increasingly popular. In recent model of FIB, however the feeding system has been a very coarse resolution of about a few ${\mu}{\textrm}{m}$. It is not unsuitable to the sputtering and the deposition to make the high-precision structure in micro or macro scale. Our research is the development of nano stage of 200mm strokes and l0nm resolutions. Also, this stage should be effectively operating in ultra high vacuum of about 1$\times$10$^{-5}$ pa. This paper presents the concept of nano stages and the discussion of the material treatment for ultra tush vacuum.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2006년도 하계종합학술대회
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• pp.515-516
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• 2006

A THz near-field microscope(THz NFM) is developed by a combination of THz time-domain spectroscopy and AFM(Atomic Force Microscopy). We have observed 80nm lateral resolution, demonstrating that the THz NFM technique has a great potential as a important probing tool for the analysis of the biological and semiconductor nanostructures.