• 한국광학회지
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• 제15권1호
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• pp.68-73
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• 2004

간섭계를 이용한 링레이저 자이로의 플렉셔 각도 측정기법이 연구되었다. Dummy mass를 추가하여 중력가속도 이상의 고가속도 환경을 구현하였으며, 이에 따른 피에조 간섭무늬의 변화로부터 자이로 입력축의 단위 중력가속도에 대한 플렉셔 각도 변화를 조사하였다. 링레이저 자이로가 가지는 플렉셔 각도 변화계수는 2.37 arcsec/g로,플렉셔 측정 반복도 오차는 0.07arcsec/g정도로 측정되었다. 플렉셔 각도를 감소시켰을 때, 링레이저 자이로 관성항법장치의 플렉셔 오차가 뚜렷이 개선됨을 확인하였다.

• Journal of the Optical Society of Korea
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• 제17권4호
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• pp.323-327
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• 2013

A laser ultrasonic inspection system has the advantage of nondestructive testing. It is a non-contact mode using a laser interferometer to measure the vertical displacement of the surface of a material caused by the propagation of ultrasonic signals with the remote ultrasonic generated by laser. After raising the ultrasonic signal with a broadband frequency range using a pulsed laser beam, the laser beam is focused to a small point to measure the ultrasonic signal because it provides an excellent measurement resolution. In this paper, foreign materials are measured by a non-destructive and non-contact method using the laser ultrasonic inspection system. Mixed foreign material on the corroded part is assumed and the laser ultrasonic experiment is conducted. An ultrasonic wave is generated by pulse laser from the back of the specimen and an ultrasonic signal is acquired from the same location of the front side using continuous wave laser and Confocal Fabry-Perot Interferometer (CFPI). The characteristic of the ultrasonic signal of existing foreign material is analyzed and the location and size of foreign material is measured.

• 한국광학회지
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• 제23권5호
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• pp.203-210
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• 2012

사냑간섭계 원리를 이용한 자이로는 연구의 계기가 된 발명 또는 연구시기에 따라서 크게 3세대로 구분되어질 수 있다. 사냑간섭계 원리를 이용한 첫 번째 자이로인 링레이저 자이로는 레이저의 발명에 의해서 1960년대 부터 연구되어 왔으며, 사냑간섭계 원리를 이용한 2세대 자이로인 광섬유 자이로는 통신용 광섬유의 발명에 의해서 1970년대부터 연구되어 왔다. 원자의 파동성이 입증된 1990년대 후반에는 차기세대 자이로 개발을 위한 원자간섭계 연구가 시작되었다. 본 논문은 이러한 세 분류의 사냑간섭계 원리를 이용한 자이로의 동작원리, 응용분야, 그리고 발전전망에 대하여 논의하였다.

• 한국정밀공학회지
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• 제18권9호
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• pp.171-178
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• 2001

The nonlinearity of a laser interferometer usually ranges from sub-nanometer to several manometers. This nonlinearity, which has periodic characteristics, limits the accuracy of the interferometer at the sub-nanometer level. The nonlinearity error of the one-frequency homodyne interferometer with quadrature fringe detection results from a number of factors including polarization mixing by imperfect optical elements, unequal gain of photo detectors, lack of quadrature between two signals and misalignment. In this paper, we described a method for measuring and compensating the nonlinearity of homodyne interferometer using the elliptical fitting technique with least-square method. Experimental results demonstrate that $^\pm$3.5 nm nonlinearity can be reduced to $^\pm$0.2 nm level.

• 한국정밀공학회지
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• 제19권4호
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• pp.195-201
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• 2002

We propose a new scheme of high-resolution heterodyne interferometer that employs the two-axial mode He-Ne laser with an inter-mode beat frequency of 600~1000 MHz. An electronic RF-heterodyne circuit lowers the beat frequency down to 5 MHz, so that the phase change of the interferometer output is precisely measured with a displacement resolution of 0.1 nanometer without significant loss of dynamic bandwidth. A thermal control scheme is adopted to stabilize the cavity length with ainus to suppress frequency drifts caused by the phenomena of frequency pulling and polarization anisotropy of the two-axial made laser to a stability level of 2 parts in $10^9$. The two-axial mode HeNe laser yields a high output power of 2.0 mW, which allows us to perform multiple measurements of up to 10 machine axes simultaneously.

• 한국광학회지
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• 제32권3호
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• pp.108-113
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• 2021

본 논문에서는 어떤 음원에 의하여 진동하는 물체로부터 그 음원의 소리를 레이저 도플러 간섭계를 이용하여 원거리에서 복원하는 방법을 고안하고 실험적으로 시연하였다. 어떤 음파에 의하여 진동하는 물체를 간섭계를 통하여 측정할 경우, 측정되는 간섭계의 주파수는 도플러 효과에 의하여 그 소리의 주파수와 동일하게 변한다. 이 현상을 이용하여 어떤 소리에 영향을 받는 대상의 진동 주파수를 레이저 도플러 간섭계를 통해 원거리에서 실시간으로 측정하고, 간섭계 출력의 최대 주파수를 추적하는 신호처리를 통하여 얻은 결과가 음원의 소리와 같은 주파수 특성을 갖는다는 것을 실험적으로 확인하였다. 또한, 각각의 단일 톤 음원뿐만 아니라 여러 가지 주파수가 혼합된 음원의 복원도 가능함을 확인하였다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.1225-1230
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• 2003

In this study, Real-time estimation and compensation procedure are developed for the laser interferometer. This system is designed with homodyne quadrature-phase detection method using the Laser interferometer. The errors in this system are due to noise, disturbance and undefined model dynamics. DSP(Digital Signal Processor) is applied for real time compensation of these errors. This estimator and compensation is verified with measurement test.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.195-198
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• 2002

Demand for high precision measurement of large area is increasing in many industrial fields. White-light Scanning Interferometer(WSI) is a well-known method for 3D profile measurement. However WSI has some limitations in a measurement range because of the sensing mechanism. Therefore, in this paper we use a heterodyne laser interferometer to get over the limitations of a short measurement range in WSI, We suggest a new WSI system combined with heterodyne laser interferometer. This system is aimed at eliminating Abbe error with measuring the focus point directly. With the use of triggering functionality of WSI, we can use this system as a probe of a precision stage such as a probe of CMM. The suggested system gives a repeatability of 87 nm in the absolute distance measurement test under the laboratory environment.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2003년도 추계학술대회
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• pp.174-179
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• 2003

Non-destructive test on the size and depth of cracks has been required for the safety evaluation of structures. Ultrasonic method based on laser techniques is one of the most popular non-destructive methods which overwhelm PZT based tests. In the present paper, ultrasonic was generated by high powered Q switching Nd:YAG pulse laser. Experiments were carried out using Fabry-Perot interferometer which was intensively discussed in the present study.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.195.1-195.1
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• 2016

Currently, as Plasma application is expanded to the industrial and medical industrial, low temperature plasma applications became important. Especially in medical and biology, many researchers have studied about generated radical species in atmospheric pressure low temperature plasma directly adapted to human body. Therefore, so measurement their plasma parameter is very important work and is widely studied all around world. One of the plasma parameters is electron density and it is closely relative to radical production through the plasma source. some kinds of method to measuring the electron density are Thomson scattering spectroscopy and Millimeter-wave transmission measurement. But most methods have very expensive cost and complex configuration to composed of experiment system. We selected Michelson interferometer system which is very cheap and simple to setting up, so we tried to measuring electron density by laser interferometer with laser beam chopping module for measurement of temporal phase difference in plasma jet. To measuring electron density at atmospheric pressure Ar plasma jet, we obtained the temporal phase shift signal of interferometer. Phase difference of interferometer can occur because of change by refractive index of electron density in plasma jet. The electron density was able to estimate with this phase difference values by using physical formula about refractive index change of external electromagnetic wave in plasma. Our guiding laser used Helium-Neon laser of the centered wavelength of 632 nm. We installed chopper module which can make a 4kHz pulse laser signal at the laser front side. In this experiment, we obtained more exact synchronized phase difference between with and without plasma jet than reported data at last year. Especially, we found the phase difference between time range of discharge current. Electron density is changed from Townsend discharge's electron bombardment, so we observed the phase difference phenomenon and calculated the temporal electron density by using phase shift. In our result, we suggest that the electron density have approximately range between 1014~ 1015 cm-3 in atmospheric pressure Ar plasma jet.