• Journal of the Korean Society for Precision Engineering
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• v.27 no.1
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• pp.125-133
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• 2010

A versatile micro-robotic platform for micro/nano scale assembly has been demanded in a variety of application areas such as micro-biology and nanotechnology. In the near future, a flexible and compact platform could be effectively used in a scanning electron microscope chamber. We are developing a platform that consists of miniature mobile robots and a compact positioning stage with multi degree-of-freedom. This paper presents the design and the implementation of a low-cost and compact multi degree of freedom position sensor that is capable of measuring absolute translational and rotational displacement. The proposed sensor is implemented by using a CMOS type image sensor and a target with specific hole patterns. Experimental design based on statistics was applied to finding optimal design of the target. Efficient algorithms for image processing and absolute position decoding are discussed. Simple calibration to eliminate the influence of inaccuracy of the fabricated target on the measuring performance also presented. The developed sensor was characterized by using a laser interferometer. It can be concluded that the sensor system has submicron resolution and accuracy of ${\pm}4{\mu}m$ over full travel range. The proposed vision-based sensor is cost-effective and used as a compact feedback device for implementation of a micro robotic platform.

• Publications of The Korean Astronomical Society
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• v.32 no.1
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• pp.359-361
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• 2017

We report our research on aluminum mirror optics for future infrared astronomical satellites. For space infrared missions, cooling the whole instrument is crucial to suppress the infrared background and detector noise. In this aspect, aluminum is appropriate for cryogenic optics, because the same material can be used for the whole structure of the instrument including optical components thanks to its excellent machinability, which helps to mitigate optical misalignment at low temperatures. We have fabricated aluminum mirrors with ultra-precision machining and measured the wave front errors (WFEs) of the mirrors with a Fizeau interferometer. Based on the power spectral densities of the WFEs, we confirmed that the surface accuracy of all the mirrors satisfied the requirements for the SPICA Coronagraph Instrument. We then integrated the mirrors into an optical system, and examined the image quality of the system with an optical laser. As a result, the total WFE is estimated to be 33 nm (rms) from the Strehl ratio. This is consistent with the WFEs estimated from the measurement of the individual mirrors.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.2
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• pp.109-117
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• 2009

This paper presents a linear air bearing stage with compensated motion errors by active control of preloads generated by magnetic actuators with combination of permanent and electromagnets. A 1-axis linear stage motorized with a linear motor with 240mm of travel range is built for verifying this design concept and tested its performances. The three motions of the table are controlled with four magnetic actuators driven by current amplifiers and a DSP based digital controller. Three motion errors were measured combined method with laser interferometer and two-probe method with $0.085{\mu}m$ of repeatability for straightness error. The measured motion errors were modeled as functions of the stage position, and compensation were carried out with feedforward control because the characteristics of the motion control with magnetic actuators are linear and independent for each degree-of-freedoms. As the results, the errors were reduced from $1.09{\mu}m$ to $0.11{\mu}m$ for the vertical motion, from 9.42 sec to 0.18 sec for the pitch motion and from 2.42 sec to 0.18 sec for roll motion.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.7
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• pp.98-105
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• 2001

The machining accuracy is affected by geometric, volumetric errors of the machine tools. To improve the product quality, we need to enhance the machining accuracy of the machine tools. To this point of view, measurement and inspection of finished part as error analysis of machine tools ahas been studied for last several decades. This paper suggests the enhancement method of machining accuracy for precision machining of high quality metal reflection mirror or optics lens, etc. In this paper, we study 1) the compensation of linear pitch error with NC controller compensation function using laser interferometer measurement, 2) the method for enhancing the accuracy of NC milling machining by modeling and compensation of volumetric error, 3) the spherical surface manufacturing by modeling and compensation of volumetric error of the machine tool, 4) the system development of OMM without detaching work piece from a bed of machine tool after working, 5) the generation of the finished part profile by OMM. Furthermore, the output of OMM is compared with that of CMM, and verified the feasibility of the measurement system.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.1
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• pp.53-58
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• 2011

Ultra-precision miniaturized machine tools essential for manufacturing accurate machine components in micro/meso-scale have been developed. To realize high accuracy using mMTs, geometric errors, which are considered as the main sources of inaccuracy should be identified and compensated. The conventional systems for measuring geometric errors, such as a laser interferometer, can measure only one geometric error in a single setup and they involve complicated measurement procedures. A measurement system using PSDs is a promising alternative but the measurable range of such systems is limited to the active range of the PSDs. The proposed measurement system using PSDs can overcome the limit of small measurable range. Further, the mounting errors that could occur during set-up process can be avoided. In this paper, an algorithm corresponding to the system was analyzed and experiments were carried out.

• Journal of the Korean Society for Precision Engineering
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• v.32 no.9
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• pp.807-813
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• 2015

In the present study, an interferometer system, which integrates the laser sensitivity control technique based on the theory of electronic speckle pattern interferometry, one of non-contact non-destructive analysis methods, was developed. This interferometry system receives an image from CCD cameras for each reference and object, and compares the photosensitivity of the object and reference images from imagification. For the purpose of this study, the photosensitivity of object and reference light is measured with power meters, and the amount of light was controlled with an ND filter with a reference light port matching photosensitivity. Using the plate specimen as the object, 0.6, 0.9, 1.2, and $1.5{\mu}m$ of out-plane deformation was made, and images were compared according to the difference in photosensitivity. After analysis, larger object deformations showed larger numbers of stripe patterns. Images became clearer and data error was reduced when the photosensitivity of object and reference light matched.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.39 no.2
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• pp.157-162
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• 2015

A large five-axis gantry-type machine performs cutting operations by moving the gantry, along with a bed. During operation, there are three sources of position (zig-zag) errors: 1) the position difference between two control motors on the X axis, 2) friction difference from the different column weights, and 3) torque of the rotating spindle. This study improved the performance of a gantry-type machine by analyzing these three error sources. We changed the mass of a column in the gantry structure and measured the effect on the friction result. We also studied the spindle torque influences on the movement performance of the gantry in relation to the spindle rotation.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.8
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• pp.904-914
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• 2011

The volumetric errors of CNC machining centers are determined by 21 errors, including 3 linear errors, 6 straightness errors, 3 perpendicular errors, 9 angular errors and non-rigid body errors of the machine tool. It is very time consuming and hard to measure all of these errors in which laser interferometer and other parts are used directly. Hence, as many as 21 separate setups and measurements are needed for the linear, straightness, angular and perpendicular errors. In case of the 5-axis machining centers, two more rotary tables are used. It can make 35 error sources of the movement. Therefore, the measured errors of multi movements of the 5-axis tables are very complicated, even if the relative measured errors are measured. This paper describes the methods, those analyze the error sources of the machining centers. Those are based on shifted diagonal measurements method (SDM), R-test and Double ball bar. In case, the angular errors of machine are small enough comparing with others, twelve errors including three linear position errors, six straightness errors and three perpendicular errors can be calculated by using SDM. To confirm the proposed method, SDM was applied to measuring 3 axes of machine tools and compared with directly measurement of each errors. In addition, the methods for measuring relative errors of multi-axis analysis methods using R-test and Double Ball Bar are introduced in this paper.

• Korean Journal of Optics and Photonics
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• v.8 no.1
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• pp.1-6
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• 1997

The amplitude impulse S(x) of an interferometric optical imaging system for λ=193 nm(ArF laser) and NA=0.5 is derived for the pupil with superposed three Gauss pupils $A_1$($\omega$), $A_{2-}$($\omega$) and $A_{2+}$($\omega$). It is shown that FWHM of S(x) can be far less than the Rayleigh's criterion of resolution $\frac{1}{2}{\epsilon}_R$, where ${\epsilon}_R$ is equal to λ=193 nm in the present case of NA=0.5. The three Gauss pupils are provided in an optical system which consists of a Twyman-Green interferometer and an imaging system. The system is proposed and relevent optical components are discussed. Siloxane polymer is suggested for fabrications of amplitude modulation plates. In the present work, we assumed the system is free from aberration and linear. The case that the system has residual aberrations is important, and further work is necessary.

• Korean Journal of Optics and Photonics
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• v.22 no.5
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• pp.207-213
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• 2011

We propose a new method to measure the phase errors of an AWG(arrayed waveguide grating) through Monte-Carlo analysis. In the frequency domain method, we used the Monte-Carlo method to fit the theory to the experimental results. The phase and amplitude values are obtained from the fitted theory. To verify our method, we carried out a simulation. Some phase errors were included to make a virtual interferogram and we measured the actual AWG phase errors from it by our method. The results show that our method gives good results if the laser tuning range is larger than 1.7 times of the AWG FSR(free spectral range) and if the phase errors are within ${\pm}50^{\circ}$.