• Analytical Science and Technology
• /
• v.32 no.4
• /
• pp.121-130
• /
• 2019

Alumina is one of the most important ceramic materials because of its useful physical and chemical properties. Recently, high-purity alumina has been used in various industrial fields. This leads to increasing demand for reliable elemental analysis of impurities in alumina samples. However, the chemical inertness of alumina makes the sample preparation for conventional elemental analysis a tremendously difficult task. Herein, we demonstrated the feasibility of laser ablation for effective sampling of alumina powder. Laser ablation performs sampling rapidly without any chemical reagents and also allows simultaneous optical emission spectroscopy and mass spectrometry analyses. For six alumina samples including certified reference materials and commercial products, laser-induced breakdown spectroscopy (LIBS) and laser-ablation inductively-coupled plasma mass spectrometry (LA-ICP-MS) analyses were performed simultaneously based on a common laser ablation sampling. LIBS was found to be useful to quantify alkali and alkaline earth metals with limits-of-detection (LODs) around 1 ppm. LA-ICP-MS could quantify transition metals such as Ti, Cu, Zn, and Zr with LODs in the range from a few tens to hundreds ppb.

• Proceedings of the Optical Society of Korea Conference
• /
• 2002.07a
• /
• pp.240-241
• /
• 2002

Propagation of an intense laser pulse through fully ionized plasma has been an interesting topic in many fields. It includes laser-driven electron accelerators,(1) generation of high harmonics,(2) soft x-ray laser development(3) and so on. Specifically, in the application of laser-driven electron accelerators a large laser-plasma interaction length is required to get sufficient acceleration energy of electron. (omitted)

• Transactions of the KSME C: Technology and Education
• /
• v.3 no.4
• /
• pp.291-297
• /
• 2015

As promising future energy source, hydrogen has been drawing much attention; however, it is easily leaked from the small gap in any storage container due to its find molecule size. In this study, Laser induced breakdown spectroscopy(LIBS) was used for hydrogen leak detection, and feasibility of the scheme was evaluated based on different way for plasma generation. Laser power of 295 mW was required for generating plasma on metal surface to measure hydrogen atomic emission while approximately 2.5 times higher laser power was needed for plasma formation directly in the hydrogen gas stream. It was shown that peak to base ratio increased linearly with increasing the concentration of hydrogen. It can be concluded that LIBS is a viable technique for hydrogen sensing when the concentration of hydrogen is less than 5%.

• Proceedings of the Korean Society of Laser Processing Conference
• /
• 2001.05a
• /
• pp.11-13
• /
• 2001

• Laser Solutions
• /
• v.15 no.1
• /
• pp.15-19
• /
• 2012

The fabrication of internal diffraction gratings with photoinduced refractive index modification in transparent materials was demonstrated using low-density plasma formation excited by a femtosecond (130 fs) Ti: sapphire laser (${\lambda}_p$=800 nm). The refractive index modifications with diameters ranging from $1{\mu}m$ to $3{\mu}m$ were photoinduced after plasma formation occurred upon irradiation with peak intensities of more than $2.0{\times}10^{13}W/cm^2$. The graded refractive index profile was fabricated to be a symmetric around from the center of the point at which low-density plasma occurred.

• Proceedings of the KIEE Conference
• /
• 1997.07d
• /
• pp.1292-1297
• /
• 1997

본 연구에서는 latch-up 개선책의 일환으로 개발중인 매립층을 갖는 retrograde well의 형성기술과 더불어 공정 단순화를 목적으로 개발된 BILLI (Buried Implanted Layer for Lateral Isolation) well 구조[1]에 대한 공정 유기 결함을 분석하고 그에 의한 소자 열화 특성을 분석 하였으며 그 개선책을 제시 하고자 하였다. 매립층 형성에 의한 유기결함은 접합 누설전류와 Gate oxide 신뢰성을 열화 시켰으나 이온주입 후 $1000^{\circ}C$ 이상의 온도에서 10sec 정도의 RTP anneal에 의해 그 소자 특성이 개선되며 표면 결함이 감소함을 알 수 있었다.

• Laser Solutions
• /
• v.17 no.2
• /
• pp.19-25
• /
• 2014

Optical embedded diffraction gratings with the bulk modification in BK-7 glass plates excited by tightly focused high-intensity femtosecond (130fs) Ti: sapphire laser (peak wavelength = 790nm) were demonstrated. The structural modifications with diameters ranging from 400nm to $4{\mu}m$ were photo-induced after plasma formation occurred upon irradiation with peak intensities of more than $1{\times}1013W/cm^2$. The graded refractive index profile was fabricated to be a symmetric around from the center of the point at which low-density plasma occurred. The maximum refractive index change was estimated to be $1.5{\times}10^{-2}$. The two optical embedded gratings in BK-7 glass plate were demonstrated with refractive index modification induced by the scanning of low-density plasma formation.

• Proceedings of the KIEE Conference
• /
• 1995.07c
• /
• pp.1307-1310
• /
• 1995

During measurement of atomic hydrogen in a silane plasma using two-photon excited laser induced fluoresecence, laser-induced dissociation of the gas was observed. This was investigated untill conditions for the input laser fluence were determined where the effect was negligible. A measurement of the atomic hydrogen distribution was then performed within the limits of these conditions. Absolute density determinations showed atomic hydrogen densities of around $3{\times}10^{17}m^{-3}$.

• Journal of the Korean Vacuum Society
• /
• v.9 no.1
• /
• pp.76-80
• /
• 2000

CF & $CF_2$ radicals in a $C_4F_8$ inductively coupled plasma were observed with laser induced fluorescence. 251.9nm UV laser was used for the $CF_2$ excitation and 265.3nm UV emitted light for the detection which has the maximum intensity among many induced fluorescence lights. In the case of CF radical detection, 232.9nm UV laser was used for the excitation and 247.6nm for the detection. $CF_2$ radical density increased toward substrate, while CF radical had its maximum at about 10nm away from the substrate. The atomic fluorine density which was studied by the actinometry increased as the position moves away from the substrate. This phenomena was thought to have a close relation with the polymer growth on the wafer. When the bias voltage increased, $CF_2$ , CF radicals decreased while the atomic fluorine increased tio some extent and then decreased, which was thought to be due to the change in the ionization and dissociation.

• Analytical Science and Technology
• /
• v.33 no.2
• /
• pp.86-97
• /
• 2020

Reconstruction and separation of explosive-contaminated overlapping fingerprints constitutes an analytical challenge of high significance in forensic sciences. Laser-induced breakdown spectroscopy (LIBS) allows real-time chemical mapping by detecting the light emissions from laser-induced plasma and can offer powerful means of fingerprint classification based on the chemical components of the sample. During recent years LIBS has been studied one of the spectroscopic techniques with larger capability for forensic sciences. However, despite of the great sensitivity, LIBS suffers from a limited detection due to difficulties in reconstruction of overlapping fingerprints. Here, the authors propose a simple, yet effective, method of using chemical mapping to separate and reconstruct the explosive-contaminated, overlapping fingerprints. A Q-switched Nd:YAG laser system (1064 nm), which allows the laser beam diameter and the area of the ablated crater to be controlled, was used to analyze the chemical compositions of eight samples of explosive-contaminated fingerprints (featuring two sample explosive and four individuals) via the LIBS. Then, the chemical validations were further performed by applying the Raman spectroscopy. The results were subjected to principal component and partial least-squares multivariate analyses, and showed the classification of contaminated fingerprints at higher than 91% accuracy. Robustness and sensitivity tests indicate that the novel method used here is effective for separating and reconstructing the overlapping fingerprints with explosive trace.