• International Journal of Precision Engineering and Manufacturing
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• 제8권3호
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• pp.20-23
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• 2007

To calibrate precision autocollimators, the Korean Research Institute of Standards and Science (KRISS) has built a small angle generator using a laser interferometer. The system is based on a sine bar mechanism in which the angle is determined from the ratio of two lengths. The rotational angle is measured by the angle interferometer and the heterodyne laser interferometer detects the relative displacement of two retro-reflectors attached to the rotating arm. The distance between the two retro-reflectors of the laser angle interferometer is self-calibrated by an index table positioned on the rotating arm. The resolution of the system is 0.002 seconds, and the accuracy is better than 0.04 seconds within a measuring range of $\pm$1 degree. The small angle generator can also be used with an index table that can divide one circle into 1440 angles. The combined system can generate any angle over 360 degrees to an accuracy of 0.11 seconds.

• 한국광학회지
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• 제15권1호
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• pp.68-73
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• 2004

간섭계를 이용한 링레이저 자이로의 플렉셔 각도 측정기법이 연구되었다. Dummy mass를 추가하여 중력가속도 이상의 고가속도 환경을 구현하였으며, 이에 따른 피에조 간섭무늬의 변화로부터 자이로 입력축의 단위 중력가속도에 대한 플렉셔 각도 변화를 조사하였다. 링레이저 자이로가 가지는 플렉셔 각도 변화계수는 2.37 arcsec/g로,플렉셔 측정 반복도 오차는 0.07arcsec/g정도로 측정되었다. 플렉셔 각도를 감소시켰을 때, 링레이저 자이로 관성항법장치의 플렉셔 오차가 뚜렷이 개선됨을 확인하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.573-576
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• 2005

A compact linear and angular displacement measurement device was developed by combining a Michelson interferometer and an autocollimator to characterize the movement of a precision stage. A Michelson interferometer and an autocollimator are typical devices for measuring linear and angular displacement, respectively. By controlling the polarization of reflected beam from the target mirror of the interferometer, some part of light was retro-reflected to the light source and the reflected beam was used for angle measurement. The interferometer and the autocollimator use the same optic axis and the target mirror can be easily and precisely aligned orthogonal to the optic axis by monitoring the autocollimator s signal. The autocollimator was designed for angular resolution of 0.1 arcsec and dynamic range of 60 arcsec. The nonlinearity error of interferometer was minimized by trimming the gain and offset of the photodiode signals. Through the experiments, we evaluate the performance of measurement device and discuss its applications.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2001년도 ICCAS
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• pp.61.5-61
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• 2001

The laser tracking system(LTS) presents the most promising technique for dynamic position measurement of industrial robots. This system combine the advantage of high accuracy with a contactless measurement technique. It is the measurement system of position in three dimensions using distance data obtained by laser interferometer and real time angle by tracking mirror assembly. After measuring the tracking error of the beam projected on the center of retroreflector in robot end effector, this system tracks the end effector continuously by adjusting tracking mirror angle to minimize this error ...

• 한국정밀공학회지
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• 제22권9호
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• pp.69-76
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• 2005

The laser interferometer system such as HP5529A is one of the most powerful equipment fur measurement of the straightness error in precision stages. The straightness measurement system, HP5529A is composed of a Wollaston prism and a reflector. In this system, the straightness error is defined as relative lateral motion change between the prism and the reflector and computed from optical path difference of two polarized laser beams between these optics. However, rotating motion of the prism or the reflector used as a moving optic causes unwanted straightness error. In this paper, a compensation method is proposed for removing the unwanted straightness error generated by rotating the moving optic and an experiment is carried out for theoretical verification. The result shows that the unwanted straightness error becomes very large when the reflector is used as the moving optic and the distance between the reflector and the prism is far. Therefore, the prism must be generally used as the moving optic instead of the reflector so as to reduce the measurement error. Nevertheless, the measurement error must be compensated because it's not a negligible error if a rotating angle of the prism is large. In case the reflector must be used as the moving optic, which is unavoidable when the squareness error is measured between two axes, this compensation method can be applied and produces a better result.

• 한국정밀공학회지
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• 제15권11호
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• pp.58-66
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• 1998

A low power consuming laser scanning vibrometer is studied for its development. For its optical system, a laser interferometer is constructed to use the Doppler effect. In order to reduce the driving power of the scanning system, a small displacement of the scanning system is produced, which is achieved by using a magnetostrictive actuator. A sufficient rotating angle of the scanning system is obtained by using an amplified displacement from the resonant phenomena of a second order mechanical system composed of a mass and spring. The control of the magnetostrictive actuator using a Terfenol-D is performed without using a feedback system to help reduce the power consumption. The vibration analysis is made for the sinusoidal scanning input to have the space domain information from the time domain of the velocity of a vibration object. As a partial work of development of a tow power consuming laser scanning vibrometer, in this work, a scanning system which has the above features is developed and experimentally investigated. For the purpose of the optical system calibration, the vibration measurement for one axis is presented and the future works are discussed.

• Journal of the Optical Society of Korea
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• 제18권1호
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• pp.37-44
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• 2014

The use of a laser interferometer as a metrological tool in micro-optics measurement is demonstrated. A transmissive interferometer is effective in measuring an optical specimen having a high angle slope. A configuration that consists of an optical resolution of 0.62 micron is adapted to measure a specimen, which is a micro-Fresnel lens-shaped lenticular lens. The measurement result shows a good repeatability at each fraction of facets, however, a reconstruction of the lens shape profile is disturbed by a known problem of $2{\pi}$-ambiguity. To solve this $2{\pi}$-ambiguity problem, we propose a two-step phase unwrapping method. In the first step, an unwrapped phase map is obtained by using a conventional unwrapping method. Then, a proposed unwrapping method based on the shape modeling is applied to correct the wrongly unwrapped phase. A measured height of each facet is compared with a profile result measured by AFM.

• 한국광학회지
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• 제28권5호
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• pp.213-220
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• 2017

3D 프린터와 반도체 레이저를 사용하여 정렬하기 쉽고 저렴한 교육용 마흐젠더 간섭계를 제작하는 방법을 제안하였다. 간섭계는 $165mm{\times}120mm{\times}57mm$ 크기의 몸체, 거울 마운트, 레이저 홀더, 광분할기 등으로 구성된다. 레이저 경로는 고무 밴드, 작은 금속 막대 및 나사로 구성된 4개의 거울 마운트로 조정하였다. 간섭무늬는 최종 단계에서 렌즈에 의해 확대되었다. 슬라이드 글라스의 굴절률은 간섭계 팔 중 하나에 삽입된 슬라이드 글라스가 회전하는 동안 이동하는 간섭무늬의 수를 계수함으로써 측정되었다. 굴절률을 구하는 식을 광경로차와 회전 각도의 함수로 찾았으며, 간섭계 실험에서 유리의 굴절률을 계산하는데 사용하였다. 간섭계의 한 팔에서 유리를 회전시키면 교실에서 움직이는 간섭무늬를 관찰하기 위해 고가이지만 사용되었던 정밀 스테이지가 필요 없게 된다. 따라서 이 논문에서 제안 된 3차원 프린터로 제작한 마흐젠더 간섭계는 경제성과 성능 때문에 교육에 매우 유용할 것으로 기대된다. 학생들이 3차원 프린터로 제작한 간섭계를 사용하여 유리의 굴절률과 빛의 파장을 측정하는 등의 정성적 및 정량적 연구를 수행 할 수 있을 것이다.

• 반도체디스플레이기술학회지
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• 제11권1호
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• pp.7-11
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• 2012

One dimensional and two dimensional nano patterns were fabricated on a 4-inch substrate by Laser Interference Lithography (LIL). Mach-Zehnder interferometer was setup to obtain the interference patterns and adjusted the pattern sizes with change of incident angle. We could obtain a periodic structure with a period of 440 nm using 266 nm laser, and demonstrated a pattern size with $293{\pm}25nm$ over a 4-inch substrate.

• 한국광학회:학술대회논문집
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• 한국광학회 2008년도 하계학술발표회 논문집
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• pp.187-189
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• 2008

The spatial coherence function of multy-mode beam was measured by using a Sagnac interferometer and self referencing technique. For leaner polarization laser beam passing through a multy-mode fiber, its change value of spatial mode and polarization from stress of faber and input coupling angle. And each spatial mode have each polarizations, when we simulation Wigner distribution function and Spatial Correlation function of spatial multi-mode beam by using Hermit Gaussian modes leaner sum. We measured spatial coherence function of using by multy-mode fiber. One can use this measurement method to study and characterize the property of multy-mode light field coming out of GRIN multy-mode fiber.