Large Area Nanostructure Fabrication by Laser Interference Lithography |
Jeong, Il Gyu
(Advanced Convergent Technology R&D Group, Korea Institute of Industrial Technology)
Kim, Jongseok (Smart System R&D Group, Korea Institute of Industrial Technology) Hahn, Jae Won (School of Mechanical Engineering, Yonsei University) Lee, Sung Ho (Advanced Convergent Technology R&D Group, Korea Institute of Industrial Technology) |
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