• International Journal of Precision Engineering and Manufacturing
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• v.9 no.4
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• pp.26-31
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• 2008

A precision four-degree-of-freedom measurement system has been developed for simultaneous measurement of four motion errors of a linear stage, which include straightness and angular errors, The system employs a retro-reflector to detect the straightness errors and a plane mirror to detect the angular errors. A common-path compensation method for laser beam drift is put forward, and the experimental results show that the influences of beam drift on four motion errors can be reduced simultaneously. In comparison with the API 5D laser measuring system, the accuracy for straightness measurement is about ${\pm}1.5{\mu}m$ within the measuring range of ${\pm}650{\mu}m$, and the accuracy for pitch and yaw measurements is about ${\pm}1.5$ arc-seconds within the range of ${\pm}600$ arc-seconds.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.9 s.174
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• pp.69-76
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• 2005

The laser interferometer system such as HP5529A is one of the most powerful equipment fur measurement of the straightness error in precision stages. The straightness measurement system, HP5529A is composed of a Wollaston prism and a reflector. In this system, the straightness error is defined as relative lateral motion change between the prism and the reflector and computed from optical path difference of two polarized laser beams between these optics. However, rotating motion of the prism or the reflector used as a moving optic causes unwanted straightness error. In this paper, a compensation method is proposed for removing the unwanted straightness error generated by rotating the moving optic and an experiment is carried out for theoretical verification. The result shows that the unwanted straightness error becomes very large when the reflector is used as the moving optic and the distance between the reflector and the prism is far. Therefore, the prism must be generally used as the moving optic instead of the reflector so as to reduce the measurement error. Nevertheless, the measurement error must be compensated because it's not a negligible error if a rotating angle of the prism is large. In case the reflector must be used as the moving optic, which is unavoidable when the squareness error is measured between two axes, this compensation method can be applied and produces a better result.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.6
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• pp.50-58
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• 2009

Micro laser fabrication techniques can potentially be used for the manufacture of microstructures on the thin flat surfaces with large diameter that are frequently used in semiconductor industries. However, the large size of wafers can cause the degraded machining accuracy of the surface because it can be tilted or distorted by geometric errors of machines or the holding fixtures, etc. To overcome these errors the off-line focusing error compensation method is proposed. By using confocal autofocus system, the focusing error profile of machined surface is measured along the pre-determined path and can be compensated at the next machining process by making the corrected motion trajectories. The experimental results for silicon wafers and invar flat surfaces show that the proposed method can compensate the focusing error within the level of below $6.9{\mu}m$ that is the depth of focus required for the laser micromachining process.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.1225-1230
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• 2003

In this study, Real-time estimation and compensation procedure are developed for the laser interferometer. This system is designed with homodyne quadrature-phase detection method using the Laser interferometer. The errors in this system are due to noise, disturbance and undefined model dynamics. DSP(Digital Signal Processor) is applied for real time compensation of these errors. This estimator and compensation is verified with measurement test.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.57 no.6
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• pp.1042-1047
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• 2008

As an ultra-precision measurement system the heterodyne laser interferometer plays an important role in semiconductor industry. However the errors of environment and nonlinearity which are caused by air refraction and frequency-mixing separately reduce the accuracy of displacement measurement. In this paper we propose a DFNN(data fusion and neural network) method for error compensation. As a hybrid method of data fusion and neural network, DFNN method reduces the environmental and nonlinear error simultaneously. The effectiveness of the proposed error compensation method is proved through experimental results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.114-118
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• 2001

HP Laser Interferometer Measurement System[HP5529A] is one of the most powerful equipment for measurement of the motion accuracy. The straightness measurement system of the HP5529A is composed of wollastone prism and reflector. In this system, straightness error is measured by relative lateral motion between prism and reflector. But rotating motion of prism or reflector as moving optic causes not real straightness error but additive straightness error. Especially unwanted straightness error as this becomes very large when reflector is used as moving optic and an interval between reflector and prism is distant. In this paper, the compensation method is proposed for removing additive error and experiment is carried out for theoretical verification.

• Proceedings of the KIEE Conference
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• 2007.04a
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• pp.86-88
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• 2007

In the semiconductor manufacturing industry, the heterodyne laser interferometer plays as an ultra-precise measurement system. However, the heterodyne laser interferometer has some unwanted nonlinearity error which is caused from frequency-mixing. This is an obstacle to improve the measurement accuracy in nanometer scale. In this paper we propose a compensation algorithm based on RLS(recursive least square) method and artificial intelligence method, which reduce the nonlinearity error in the heterodyne laser interferometer. With the capacitance displacement sensor we get a reference signal which can be transformed into the intensity domain. Using the back-propagation Neural Network method, we train the network to track the reference signal. Through some experiments, we demonstrate the effectiveness of the proposed algorithm in measurement accuracy.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.9
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• pp.166-173
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• 2000

A system for burr measurement is developed to measure the geometry of the burr formed in metal cutting or shearing operations. laser system is selected according to the required measuring accuracy and burr size. A specific program for calculating the burr geometry from measured laser data is developed. The raw data is obtained by scanning cross the burr. The height and width of burr are calculated. Due to the specific characteristic of laser peak or valley are formed in measuring sharp edges or small sharp cracks. Compensation for the peak or valley is carried out to make it possible to calculate the burr, burr geometry is measured in 3 dimension.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.13 no.3
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• pp.119-125
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• 2004

Generally, it is used the compensation spring to compensate the inaccuracy of screen image induced by thermal deformation in CRT monitor. Its mechanism is bi-metallic system made of heterogeneous metals and these is bonded by laser welding. But laser welding induces the non-uniform temperature distribution and locally residual stress is yielded by these temperature deviation. This paper studies residual stress of laser weldment using FEA and hole drilling method. The results are followed. In the case of heterogeneous materials weldment, higher residual stress induced in the weldment region of SUS 304 which have larger CTE than Ni 36 and residual stress on the middle of specimen is higher by 10.9% than that of its surface Measured residual stress of SUS 304 yield 481MPa and that of Ni 36 is 140.5MPa in the vicinity of the welding region. And the residual distribution is very similar in comparison with FEA result.

• Journal of Welding and Joining
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• v.22 no.3
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• pp.45-49
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• 2004

Generally, it is used the compensation spring to compensate the inaccuracy of screen image induced by thermal deformation in CRT monitor. Its mechanism is hi-metallic system made of heterogeneous metals and these springs are bonded by laser welding. But laser welding induces a non-uniform temperature distribution, and residual stress is yielded locally by these temperature deviation. Therefore, this study measures the curvature constant to assess functions of the compensation spring of shadow mask with respect to increment temperature and estimates the effect of residual stress on the performance of tri-metal used to compensation spring.