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Adaptive Error Compensation of Heterodyne Laser Interferometer using DFNN  

Heo, Gun-Haeng (성균관대학교 전기전자공학부)
Lee, Woo-Ram (성균관대학교 전기전자공학부)
You, Kwan-Ho (성균관대학교 정보통신공학부)
Publication Information
The Transactions of The Korean Institute of Electrical Engineers / v.57, no.6, 2008 , pp. 1042-1047 More about this Journal
Abstract
As an ultra-precision measurement system the heterodyne laser interferometer plays an important role in semiconductor industry. However the errors of environment and nonlinearity which are caused by air refraction and frequency-mixing separately reduce the accuracy of displacement measurement. In this paper we propose a DFNN(data fusion and neural network) method for error compensation. As a hybrid method of data fusion and neural network, DFNN method reduces the environmental and nonlinear error simultaneously. The effectiveness of the proposed error compensation method is proved through experimental results.
Keywords
Laser interferometer; Neural network; Data fusion; Nonlinearity;
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Times Cited By SCOPUS : 1
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