• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.11
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• pp.18-23
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• 2019

The oil immersion method can be used to create objective lenses with long working distances without sacrificing the focusing resolution for laser processing. In this study, a space in which air or oil can be filled was formed in the middle of a lens for analyzing the optical properties of a liquid-oil immersion lens. As the refractive media, air and oils of different refractive index values (1.2 and 1.5, respectively) were used. A simulation was conducted in the ZEMAX software environment using the ray-tracing technique, and the performance of the oil immersion lens was verified by determining its image distortion and focal length (FL) in each medium. In the case of air, the calculated FL was 0.813 mm, whereas the imaged FLs were 1.594 mm and 8.126 mm when the refraction indices were 1.2 and 1.5, respectively. The FL of an oil immersion lens could be increased considerably. In terms of image distortion, the oil immersion lens exhibited little distortion at the center in all cases, but different degrees of image distortion were observed at different points away from the center depending on the refraction index degree.

• Current Optics and Photonics
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• v.6 no.1
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• pp.44-50
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• 2022

An off-axis zone plate is able to focus on a single order while neglecting the zeroth order in a visible imaging system. This allows one to enhance the contrast quality in diffractive images, which is the major advantage of this type of zone plate. However, most previous reflection zone plates are used in focusing X-rays with a small grazing incident angle and are intricately designed with the use of a local grating period. In this study, we suggest the design of an off-axis elliptical zone plate (EZP) that is used to focus a monochromatic light beam with separation between the first and unfocused orders under a large grazing incident angle of 45°. An assumption using the total grating period, which depends on the average and constant grating period, is proposed to calculate the desired distance between the first and zeroth order and to simplify the construction of a novel model off-center EZP. Four diffractive optical elements (DOEs) with different parameters were subsequently fabricated by direct laser lithography and then verified using a performance evaluation system to compare the results from the assumption with the experimental results.

• Korean Journal of Optics and Photonics
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• v.4 no.1
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• pp.15-21
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• 1993

This paper describes the design and development of a KrF excimer laser stepper and discusses the detailed system parameters and characterization data obtained from the performance test. We have developed a deep UV step-and-repeat system, operating at 248 nm, by retrofitting a commercial modules such as KrF excimer laser, precision wafer stage and fused silica illumination and 5X projection optics of numerical aperture 0.42. What we have developed, to the basic structure, are wafer alignment optics, reticle alignment system, autofocusing/leveling mechanisms and environment chamber. Finally, all these subsystem were integrated under the control of microprocessor-based controllers and computer. The wafer alignment system comprises the OFF-AXIS and the TTL alignment. The OFF-AXIS alignment system was realized with two kinds of optics. One is the magnification system with the image processing technique and the other is He-Ne laser diffraction type system using the alignment grating on the wafer. 'The TTL alignment system employs a dual beam inteferometric method, which takes advantages of higher diffraction efficiency compared with other TTL type alignment systems. As the results, alignment accuracy for OFF-AXIS and TTL alignment system were obtained within 0.1 $\mu\textrm{m}$/ 3 $\sigma$ for the various substrate on the wafers. The wafer focusing and leveling system is modified version of the conventional systems using position sensitive detectors (PSD). This type of detection method showed focusing and leveling accuracies of about $\pm$ 0.1 $\mu\textrm{m}$ and $\pm$ 0.5 arcsec, respectively. From the CD measurement, we obtained 0.4 $\mu\textrm{m}$ resolution features over the full field with routine use, and 0.3 $\mu\textrm{m}$ resolution was attainable under more strict conditions.

• Proceedings of the KIPE Conference
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• 2007.07a
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• pp.447-448
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• 2007

Product development is consisting by trend that accommodate almost function digital cam in camera phone that can speak of Mobile appliance, and competition about number of elemental area of image sensor is consisting for market prior occupation between these. Propose in this research and small size camera phone self-focusing adjustment actuator that do city manufacture is similar with general storehouse pickup actuator drive way, but selected in cylindrical to reduce space that lens holder occupies because there is restriction loading of lens and space enemy. Target number of research established that execute drive displacement more than $600{\mu}m$ in 2.75V that is house voltage that is used in Mobile device that is general. Also, described about maximum transfer displacement characteristic, displacement response characteristic, hysteresis, response characteristic, smallest transfer step characteristic, actuator's drive characteristic that is manufactured to examination item of maximum consumption electric power by special quality estimation system that apply laser displacement sensor that produce itself to evaluate city manufactured actuator's special quality.

• Transactions of the Society of Information Storage Systems
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• v.3 no.4
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• pp.191-195
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• 2007

The optical disc drive has used a high NA objective lens and a shorter wavelength laser diode for high recording density. But high NA and shorter wavelength cause several margins to become short. Focusing and tracking servo has to be more accurate and active tilt compensation mechanism is also needed for coma aberration compensation. In this paper, we proposed 3-axis moving magnet type actuator. For 3-DOF motion, moving coil actuator has to be equipped with 6 wires for supplying 3 independent signals. However, moving magnet type actuator doesn't need to change the configuration of wires because coils are in stator. So, we added a tilt mechanism to the 2-axis moving magnet actuator which is designed in previous research. Addition of the tilt mechanism cuts down the focus sensitivity. So, maximization the tilting sensitivity and securing the focusing sensitivity are objectivities of this research. DOE (design of experiments) procedures of electromagnetic circuit are performed for parameter study and the optimization is also performed to maximize the tilt sensitivity. And then the final design is suggested and its performance is verified by FE simulation.

• Current Optics and Photonics
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• v.2 no.5
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• pp.482-487
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• 2018

We investigate the radiation characteristics of radially polarized light and azimuthally polarized light through plasmonic subwavelength-scale annular slit (PSAS) structures, by means of both theoretical and numerical methods. Effective-medium theory was utilized to analyze the characteristics of PSAS structures, and the corresponding results showed that PSAS structures can function as a metallic medium for azimuthally polarized light, or as a low-loss dielectric medium for radially polarized light. Numerical calculations based on the finite-element method were also performed, to verify the theoretical analyses. It turned out that the numerical results supported the theoretical results. Moreover, we exploited the PSAS structures in novel nanophotonic elements with dual functionalities that could selectively focus or pass/block incident light, depending on its polarization state. For example, if PSAS structures were implemented in the dielectric region of a metallic Fresnel zone plate, the modified zone plate could function as a blocking element to azimuthally polarized light, yet as a focusing element to radially polarized light. On the contrary, if PSAS structures were implemented in the metallic region of a metallic Fresnel zone plate (i.e. the inverted form of the former), it could function as a focusing element to azimuthally polarized light, yet as a simple transparent element to radially polarized light.

• Journal of Aerospace System Engineering
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• v.12 no.4
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• pp.75-80
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• 2018

The working principle of a satellite camera involves a focusing mechanism for controlling the focus of the optical system, which is essential for proper functioning. However, research on focusing mechanisms of satellite optical systems in Korea is in the beginning stage and developed technology is limited to a thermal control type. Therefore, in this paper, we propose a motor-driven focusing mechanism applicable to small satellite optical systems. The proposed mechanism is designed to generate z-axis displacement in the secondary mirror by a motor. In addition, three flexure hinges have been installed on the supporter for application of preload on the mechanism resulting in minimization of the alignment error arising due to manufacturing tolerance and assembly tolerance within the mechanism. After fabrication of the mechanism, the alignment errors (de-space, de-center, and tilt) were measured with LVDT sensors and laser displacement meters. Conclusively, the proposed focusing mechanism could achieve proper alignment degree, which can be applicable to small satellite optical system.

• Journal of the Korean Society for Nondestructive Testing
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• v.36 no.5
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• pp.370-376
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• 2016

Corrosion on the surface of a structure can generate cracks or cause walls to thin. This can lead to fracturing, which can eventually lead to fatalities and property loss. In an effort to prevent this, laser imaging technology has been used over the last ten years to detect thin-plate structure, or relatively thin piping. The most common laser imaging was used to develop a new technology for inspecting and imaging a desired area in order to scan various structures for thin-plate structure and thin piping. However, this method builds images by measuring waves reflected from defects, and subsequently has a considerable time delay of a few milliseconds at each scanning point. In addition, the complexity of the system is high, due to additional required components, such as laser-focusing parts. This paper proposes a laser imaging method with an increased scanning speed, based on excitation and the measurement of standing waves in structures. The wavenumber of standing waves changes at sections with a geometrical discontinuity, such as thickness. Therefore, it is possible to detect defects in a structure by generating standing waves with a single frequency and scanning the waves at each point by with the laser scanning system. The proposed technique is demonstrated on a wall-thinned plate with a linear thickness variation.

• 한국가시화정보학회:학술대회논문집
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• 2005.12a
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• pp.85-88
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• 2005

Experimental study has been conducted to evaluate characteristics of particle laden flows at the ratio of channel diameter to particle diameter (B = 14.9, 21.6 and 55). Particle velocities and radial concentrations are obtained using a microscope Nd:YAG laser and cooled CCD camera. Results show that there are relative velocities between the fluid and the particles at B = 14.9. It is also observed that the particles are accumulated at r=$0.5\∼0.82R$, with R being tile tube radius, and particle migration occurs at small Reynolds number, by comparing with the results obtained in macro scale. This gives optimal factors for designing microfluidic channels for cell or Particle separation, particle focusing, and so on.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.233-236
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• 2003

The micro-stereolithography technology made it possible to fabricate a freeform 3D micro-structure. Using this technology, two kind of applications were fabricated and tested: micro-lens and micro-mixers. The focal length and f-number of the micro-lens were 5 mm and 2.5, respectively. The focusing ability of the micro-lens was verified by defocusing the He-Ne laser beam after passing the lens. Two mixers are Kenics micro-mixer and BEKM. BEKM is a modified Kenics micro-mixer by introducing barriers on the pipe walt periodically to enhance the mixing via the chaotic mechanism in the helical flow of Kenics micro-mixer. Experimental result shows good mixing performance of developed mixers. Especially, the BEKM shows better mixing performance then Kenics micro-mixer.