• JSTS:Journal of Semiconductor Technology and Science
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• 제1권4호
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• pp.239-247
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• 2001

The Fluorescence-Activated Cell Sorter (FACS) is a well-established instrument used for identifying, enumerating, classifying and sorting cells by their physical and optical characteristics. For a miniaturized FACS device, a disposable plastic microchip has been developed which has a hydrodynamic focusing chamber using soft lithography. As the characteristics of the spatially confined sample stream have an effect on sample throughput, detection efficiency, and the accuracy of cell sorting, systematic fluid dynamic studies are required. Flow visualization is conducted with a laser scanning confocal microscopy (LSCM), and three-dimensional flow structure of the focused sample stream is reconstructed from 2D slices acquired at $1\mutextrm{m}$ intervals in depth. It was observed that the flow structure in the focusing chamber is skewed by unsymmetrical velocity profile arising from trapezoidal cross section of the microchannel. For a quantitative analysis of a microscopic flow structure, Confocal Micro-PIV system has been developed to evaluate the accelerated flow field in the focusing chamber. This study proposes a method which defines the depth of the measurement volume using a detection pinhole. The trajectories of red blood cells (RBCs) and their interactions with surrounding flow field in the squeezed sample stream are evaluated to find optimal shape of the focusing chamber and fluid manipulation scheme for stable cell transporting, efficient detection, and sorting

• 한국방사성폐기물학회:학술대회논문집
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• 한국방사성폐기물학회 2005년도 추계 학술대회 논문집
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• pp.87-95
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• 2005

삼중수소를 사용하는 자발광유리관의 제조에 필요한 4가지 핵심 기술 중 레이저를 이용한 밀봉/절단기술을 개발하였다. 상용 제품을 분석한 결과 유리관의 재질은 pyrex 이었고 레이저는 유리가공에 적절한 펄스형 이산화탄소 레이저를 사용하였다 유리관의 밀봉/절단에 영향을 미치는 인자들로는 레이저빔의 강도 지속시간 조사 방법, 유리관 내부의 압력 등이었다. 전 공정은 2단계로 이루어져 1단계에서는 삼중수소를 주입하고 유리관의 양단을 밀봉하였으며 2단계에서는 삼중수소가 봉입된 유리관을 원하는 길이로 밀봉/절단하였다. 각 공정에서 유리관의 밀봉은 defocusing된 레이저빔을 사용하였으며 절단은 focusing된 빔을 사용하였다. 밀봉/절단 후에는 잔여 열응력에 의한 파열을 방지하기 위하여 열처리를 하였다.

• 지질공학
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• 제12권4호
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• pp.405-419
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• 2002

새롭게 개발된 레이저 콘포컬 현미경을 이용해 암석 불연속면의 거칠기를 측정하였다. 레이저의 파장은 488 nm이며, 현미경은 두 개의 galvano-meter scanner mirror를 이용한 광 편광법에 의해 제어된다. 레이저 반사를 통한 자동 초점기능은 관찰대상을 빠르고 정확하게 측정할 수 있다. 이 현미경은 기존의 다른 콘포컬 현미경에 비해 광축방향의 해상도를 크게 개선하였고, 특수 제작한 현미경 스테이지를 이용해 최대 $10{\;}{\times}{\;}10{\;}cm$ 까지 크기의 시료를 측정할 수 있다. 측정간격은 x와 y 방향으로 $2.5{\;}\mu\textrm{m}$씩이며, z방향의 최대 측정해상도는 $10{\;}\mu\textrm{m}$로서, 다른 방범에 비해 훨씬 정확하다. 조립질과 세립질의 입도가 다른 화강암을 대상으로 인장시험(Brazilian test)를 통해 인공절리를 생성시켰고, 생성된 좌우의 절리면에 각각 3개씩의 측선을 설정하였다. 각 측선을 따라 측정한 높이는 1차원은 물론 거칠기의 세밀한 양상을 보여주는 2차원과 3차원의 디지털 이미지로 표현된다. 조립질 화강암의 1차원 단면은 세립질보다 불연속면의 기복이 더 심함을 잘 보여준다. 거칠기를 정량적으로 특성화하고 거칠기를 구성하는 성분 중 가장 큰 영향을 미치는 성분을 파악하기 위해 고속퓨리에 변환 (FFT)를 이용한 스펙트럼 분석을 실시하였다. 스펙트럼 분석결과 저주파 성분이 큰 시효의 경우 거칠기의 기복변화가 심하고 긴 파장을 나타내는 경향이 있음을 구명하였다.

• 소성∙가공
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• 제10권3호
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• pp.193-199
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• 2001

Forming more than two parts of sheet metal in a single stamping operation lowers production costs, reduces weight, and heightens dimensional accuracy. The tailored blank (TB) is a laser-welded or mash-seam-welded sheet metal with different thicknesses, different strengths, or different coatings. Recently, automotive manufacturers have been interested in tailored blanks because of their desire to improve the rigidity, weight reduction, crash durability, and cost savings. Therefore the application to auto-bodies has increased. However, as tailored blanks do not behave like un-welded blanks in press forming operations, stamping engineers no longer rely on conventional forming techniques. Field try-outs are very important manufacturing processes for an economic die-making. In the field try-outs, the rounded geometries of tool and the drawbead shape and size in die face are generally modified when the forming defects can not be removed by the adjustment of forming process parameters. In this study, the field try-outs of tailored door inner panel are introduced and evaluated. The behaviours of laser tailored blank associated with different thickness combinations in the forming process of door inner panel are described focusing on terms of experimental investigations on the formability.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 하계학술대회 논문집
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• pp.325-325
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• 2010

Piezoelectric linear motors have been widely studied for auto focusing devices of digital cameras and cellular phones due to their simple structure. In this paper, we confirmed that novel piezoelectric butterfly linear motor was fabricated and its dynamic properties were analyzed. The piezoelectric transducer (having size $9{\times}8{\times}1\;mm^3$) is composed of an elastic plate, which includes a tip for energy transfer and two fixing protrusions for fixture, and two piezoelectric ceramics. The butterfly linear motor has been designed and optimized using A TILA simulation program. The superposed motion is an elliptical vibration on the tip. The actual movement of the manufactured actuator was confirmed by a 3D laser dopier vibrometer and compared with the simulation results. The results of numerical study and experimental investigation will be used for the future optimization of the actuator and the realization of the advanced ultrasonic motor.

• 한국정밀공학회지
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• 제22권11호
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• pp.64-71
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• 2005

In order to measure surface roughness profile, stylus type equipments are commonly used, but the stylus keeps contact with surface and damages specimens by its tip pressure. Therefore, optics based measurement systems are developed, and light phase interferometer, which is based on light interference phenomenon, is the most noticeable research. However, light interference based measurements require translation mechanisms of nano-meter order in order to generate phase differences or multiple focusing, thus the systems cannot satisfy the industrial need of on-the-machine and in-process measurement to achieve factory automation and productive enhancement. In this research, we focused light reflectance phenomenon rather than the light interference, because reflectance based method do not need translation mechanisms. However, the method cannot direct]y measure surface roughness profile, because reflected light consists of several components and thus it cannot supply surface height information with its original form. In order to overcome the demerit, we newly proposed an image processing based algorithm, which can separate reflected light components and conduct parameterization and reconstruction process with respect to surface height information, and then confirmed the reliability of proposed algorithm by experiment.

• 한국정밀공학회지
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• 제27권10호
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• pp.93-99
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• 2010

A nano-stereolithography is the direct patterning process with a nanoscale resolution using twophoton absorption induced by a femtosecond laser. However, in the majority of the works, the fabrication of 3D microstructures have been done only onto transparent glass due to the use of an oil immersion objective lens for achieving a high resolution. In this work, the coaxial illumination and the auto-focusing system are proposed for the direct patterning of nano-precision patterns on an opaque substrate such as a silicon wafer and a metal substrate. Through this work, 3D polymer structures and metallic patterns are fabricated on a silicon wafer using the developed process.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.665-666
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• 2006

In precision laser microfabrication, focusing is essential to acquire good machining precision and uniform machining quality. If it does not perform, laser machining cannot be realized. So, confocal scanning method with high depth resolution is used for focus detection technique. This paper is concerned with a procedure for design, analysis and performance test of an autofocus fine actuating stage, which is composed of flexure-hinge type lever mechanism and piezoelectric actuator. Through series of analytical design, the stage is simplified as a rigid bodies(lever and main body) and springs(flexure hinges). The simplified model was applied to determine the dimension of flexure hinges and lever. After structural analysis confirmed design requirement, an actual stage was made and verified through an experiment on the static and dynamic characteristics(maximum stroke and 1st natural frequency). The fabricated stage was satisfied with the design requirement.

• Applied Microscopy
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• 제41권2호
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• pp.89-98
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• 2011

Atom Probe Tomography는 원자 수준의 분해능으로 원소의 위치 및 조성 정보를 3차원으로 제공해 주는 분석 장비이다. APT의 우수한 성능에도 불구하고 반도체 등, 저전도성 물질 분석에는 그 동안 적용이 어려웠다. 그러나 특정 시료 내 위치의 시편을 가공할 수 있는 FIB 시편 제조법과 laser펄스를 이용한 전계증발법의 개발로 APT의 분석 영역이 반도체에서 절연체까지 크게 확대 되고 있다. 본 논문에서는 최근에 적용되기 시작한 MOS-FET, GaN LED, Si-Nanowire 등 전자소자에서의 APT분석 응용사례에 대하여 살펴보았다.

• Bulletin of the Korean Chemical Society
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• 제34권1호
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• pp.207-210
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• 2013

We report the construction of a MALDI imaging mass spectrometer equipped with a specially designed laser focusing lens, a compact aspherical singlet lens, that obtains a high-lateral imaging resolution in the microprobe mode. The lens is specially designed to focus the ionization laser (${\lambda}$ = 355 nm) down to a $1{\mu}m$ diameter with a long working distance of 34.5 mm. With the lens being perpendicular to the sample surface and sharing the optical axis with the ion path, the imaging mass spectrometer achieved an imaging resolution of as good as $5{\mu}m$ along with a high detection sensitivity of 100 fmol for peptides. The mass resolution was about 900 (m/${\Delta}m$) in the linear TOF mode. The high-resolution capability of this instrument will provide a new research opportunity for label-free imaging studies of various samples including tissues and biochips, even for the study at a single cell level in the future.