• 반도체디스플레이기술학회지
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• 제9권2호
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• pp.91-96
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• 2010

In recent years there have been considerable attentions on nanoimprint lithography (NIL) by the display device and semiconductor industry due to its potential abilities that enable cost-effective and high-throughput nanofabrication. Although one of the current major research trends of NIL is large-area patterning, the technical difficulties to keep the uniformity of the residual layer become severer as the imprinting area increases more and more. In this paper we consider the roll-to-plate type imprinting process. In the process a glass mold, which is placed upon the 2nd generation TFT-LCD glass sized substrate(370${\yen}$470 mm), is rolled by a rubber roller to achieve a uniform residual layer. The pressure distribution on the glass mold by rolling of the rubber roller is crucial information to analyze mold deformation, transferred pattern quality, uniformity of residual layer and so forth. In this paper the quantitative pressure distribution induced by rolling of the rubber roller was calculated with finite element analysis under the assumption of Neo-Hookean hyperelastic constitutive relation. Additionally the numerical results were verified by the experiments.

• 마이크로전자및패키징학회지
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• 제28권4호
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• pp.47-50
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• 2021

Nanoimprint lithography (NIL) has revolutionized the fabrications of electronics, photonics, optical and biological devices. Among all the NIL processes, roll-to-roll nanoimprinting is regarded best for having the attributes of low cost, continuous, simple, and energy-efficient process for nanoscale device fabrication. However, large-area printing is limited by the master mold deformation. In this study, a finite element model (FEM) has been constructed to assess the deformation of the roll mold adhesively wrapped on the carbon fiber reinforced material (CFRP) base roll. This study also optimizes the deformations in the metallic roll mold with respect to nip-forces applied in the printing process of nano-fabrication on large scale. The numerical simulations were also conducted to evaluate the deflection in roll mold assembly due to gravity. The results have shown decreasing trend of the deformation with decreasing nip-force. Also, pressure uniformity of about 40% has been optimized by using the current numerical model along with an acceptable deflection value in the vertical axis due to gravity.

• 한국기계가공학회지
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• 제11권2호
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• pp.1-6
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• 2012

Recent ultra-precision machining systems have nano-scale resolution, and can machine various shapes of complex structures using five-axis driven modules. These systems are also multi-functional, which can perform various processes such as planing, milling, turning et al. in one system. Micro machining technology using these systems is being developed for machining fine patterns, hybrid patterns and high aspect-ratio patterns on large-area molds with high productivity. These technology is and will be applied continuously to the fields of optics, display, energy, bio, communications and et al. Domestic and foreign trends of micro machining technologies for flat molds were investigated in this study. Especially, we focused on the types and the characteristics of ultra-precision machining systems and application fields of micro patterns machined by the machining system.

• 한국정밀공학회지
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• 제23권9호
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• pp.61-67
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• 2006

Sandwich structures, which are composed of a thick core between two faces, are commonly used in many engineering applications because they combine high stiffness and strength with low weight. Accordingly, the usage of sandwich structure is very widely applied to the aircraft, the automobile and marine industry, etc., because of these advantages. In this paper, we have investigated the buckling protection of an inner structure plate and the useful corrugated configuration for contact, and the fabrication method of the inner structure plate for large area using the continuous molding process. Also, we have guaranteed the accuracy of the molding process through the micro corrugated mold fabrication and secured the accuracy and analyzed aspect properties of the inner structure plate fabricated for a large area using the partial mold process. We have compared molding simulation according to the aspect thickness of the corrugated configuration with the molding experiment results.

• Design & Manufacturing
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• 제2권1호
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• pp.45-50
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• 2008

Micro channel is to fabricate desired pattern on the polymer substrate by pressing the patterned mold against the substrate which is heated above the glass transition temperature, and it is a high throughput fabrication method for bio chip, optical microstructure, etc. due to the simultaneous large area patterning. However, the bad pattern fidelity in large area patterning is one of the obstacles to applying the hot embossing technology for mass production. In the present study, stamper of cross channel with width $100{\mu}m$ and height $50{\mu}m$ was manufactured using UV-LiGA process. Micro channel was manufactured using stamper manufactured in this study. Also replicability appliance was evaluated for micro channel and factors affected replicability were investigated using Taguchi method.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2007년도 춘계학술대회 논문집
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• pp.199-204
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• 2007

Hot embossing, one of Nanoimprint Lithography(NIL) techniques, has been getting attention as an alternative candidate of next generation patterning technologies by the advantages of simplicity and low cost compared to conventional photolithographies. A typical hot embossing usually, however, takes more than ten minutes for one cycle of the process because of a long thermal cycling. Over the last few years a number of studies have been made to reduce the cycle time for hot embossing or similar patterning processes. The target of this research is to develop an induction heating apparatus for heating a metallic micro patterning mold at very high speed with the large-area uniformity of temperature distribution. It was found that a 0.5 mm-thick nickel mold can be heated from $25^{\circ}C$ to $150^{\circ}C$ within 1.5 seconds with the temperature variation of ${\pm}5^{\circ}C$ in 4-inch diameter area, using the induction heating apparatus.

• 반도체디스플레이기술학회지
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• 제12권2호
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• pp.79-84
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• 2013

Nanoimprint lithography (NIL) is the next generation photolithography process in which the photoresist is dispensed onto the substrate in its liquid form and then imprinted and cured into a desired pattern instead of using traditional optical system. There have been considerable attentions on NIL due to its potential abilities that enable cost-effective and high-throughput nanofabrication to the display device and semiconductor industry. Although one of the current major research trends of NIL is large-area patterning, the technical difficulties to keep the uniformity of the residual layer become severer as the imprinting area increases more and more. In this paper, with the rolling type imprinting process, a mold, placed upon the $2^{nd}$ generation TFT-LCD glass sized substrate($370{\times}470mm^2$), is rolled by a rubber roller to achieve a uniform residual layer. The prediction of residual layer thickness of the photoresist by rolling of the rubber roller is crucial to design the rolling type imprinting process, determine the rubber roller operation conditions-mpressing force & feeding speed, operate smoothly the following etching process, and so forth. First, using the elasticity theory of contact problem and the empirical equation of rubber hardness, the contact length between rubber roller and mold is calculated with consideration of the shape and hardness of rubber roller and the pressing force to rubber roller. Next, using the squeeze flow theory to photoresist flow, the residual layer thickness of the photoresist is calculated with information of the viscosity and initial layer thickness of photoresist, the shape of mold pattern, feeding speed of rubber roller, and the contact length between rubber roller and mold previously calculated. Last, the effects of rubber roller operation conditions, impressing force & feeding speed, on the residual layer thickness are analyzed with consideration of the shape and hardness of rubber roller.

• 한국정밀공학회지
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• 제28권3호
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• pp.315-322
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• 2011

High-accuracy micropatterns such as V-shaped microgrooves are increasingly in demand for various engineering areas. And the technical trend goes for large surface areas in precision machining technology. So micropatterns with large surface areas are expected to play an increasingly important role in today's manufacturing technology In this study, we focused on developing machining technologies. First, a machine vision system for precise tool setting is developed. Second, an on-machine measurement (OMM) system for large-area measurement is implemented. And also software for tool path generation and simulation is developed. With these technologies we fabricated large-surface micropatterns in an electroless nickel-plated workpiece with single-crystal diamond tools and a 32-in, $675mm{\times}450mm$ mold with tens of V-and pyramid-shaped micropatterns.

• 한국지반신소재학회논문집
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• 제18권1호
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• pp.25-37
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• 2019

본 연구에서는 고함수비 상태의 흙의 토목섬유 보강에 의한 다짐효과를 확인하고자 실내다짐실험, 현장다짐실험, 수치해석을 실시하였다. 토목섬유의 구속효과를 검증하기 위해 D다짐실험의 몰드(래머/몰드의 면적비=0.33) 보다 큰 몰드(래머/몰드의 면적비=0.19)를 이용하여 다짐을 실시한 결과, D다짐실험에서는 고함수비 구간의 건조밀도가 0.5~0.6% 증가하였지만, 큰 몰드를 이용한 다짐실험에서는 2.4~3.7%가 증가하는 것으로 분석되어 하중 작용면에 비해 측면지반의 면적이 충분히 넓을 경우, 함수비가 높은 구간에서도 토목섬유 보강에 의한 구속효과가 발생하였다. 현장다짐실험에서 '전압면으로부터의 심도(z/B)'에 따른 고함수비 구간 흙의 다짐효과를 분석한 결과, 무보강 시에는 과도전압으로 인해 다짐상태가 나빠져 다짐이 잘 되지 않았지만, 토목섬유를 보강할 경우 구속효과의 발생으로 다짐층에 다짐에너지가 효과적으로 전달되고 건조밀도가 증가함을 확인하였다. 또한, 토목섬유와 토사층의 거동에 대한 개념적 모델을 통하여 토목섬유의 보강으로 인한 지반내 매커니즘을 설명하였고, 이를 유한요소해석을 통해 검증하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.771-772
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• 2007