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Pressure Distribution by Rubber Roller in Large-area UV Imprinting Lithography Process  

Kim, Nam-Woong (School of Mechanical Engineering, Dongyang Mirae University)
Kim, Kug-Weon (Dept. of Mechanical Engineering, Soonchunhyang University)
Lee, Woo-Young (School of Mechanical Engineering, Korea University of Technology and Education)
Publication Information
Journal of the Semiconductor & Display Technology / v.9, no.2, 2010 , pp. 91-96 More about this Journal
Abstract
In recent years there have been considerable attentions on nanoimprint lithography (NIL) by the display device and semiconductor industry due to its potential abilities that enable cost-effective and high-throughput nanofabrication. Although one of the current major research trends of NIL is large-area patterning, the technical difficulties to keep the uniformity of the residual layer become severer as the imprinting area increases more and more. In this paper we consider the roll-to-plate type imprinting process. In the process a glass mold, which is placed upon the 2nd generation TFT-LCD glass sized substrate(370${\yen}$470 mm), is rolled by a rubber roller to achieve a uniform residual layer. The pressure distribution on the glass mold by rolling of the rubber roller is crucial information to analyze mold deformation, transferred pattern quality, uniformity of residual layer and so forth. In this paper the quantitative pressure distribution induced by rolling of the rubber roller was calculated with finite element analysis under the assumption of Neo-Hookean hyperelastic constitutive relation. Additionally the numerical results were verified by the experiments.
Keywords
Nanoimprint Lithography; Rubber; Roller; Hyperelasticity;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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