• E2M - 전기 전자와 첨단 소재
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• 제9권5호
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• pp.506-511
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• 1996

This paper deals with an inexpensive, simple and fast Langmuir probe sweeping circuit and its application. This sweeper completes a probe trace in a 1 ms order. Futhermore, the circuit drives a maximum probe voltage of $\pm$30V and has a maximum probe current capability of a few amperes. The plasma parameters are successfully determined using the fast Langmuir probe method.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.576-576
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• 2013

Recently, diagnostics of plasma becomes more important due to requirement of precise control of plasma processing based on measurement of plasma characteristics. The Langmuir probe has been used for the diagnostics but it has an inevitable uncertainty and error sources such as incorrect tip length and RF noise. Instead of the Langmuir probe, various diagnostic methods have been developed and researched. The cutoff probe is promising one for plasma density using microwaves and resonance phenomenon at the plasma frequency. The cutoff probe has various advantages as follows; (i) it is simple and robust, (ii) it uses few assumptions, and (iii) it is free from deposition by reactive gas. However, the cutoff probe also has uncertainty and error sources such as gap between tips, tip length, direction of tip plane, and RF noise. In this study, the uncertainty and error sources in manufacturing both probes and in diagnostics process were analyzed via comparative experiment at various discharge conditions. Furthermore, to reveal the user dependence of both probes, three well trained Ph. D students made the Langmuir probe and the cutoff probe, respectively, and it were analyzed. Thought this study, it is established that reliability and validity of the Langmuir probe and the cutoff probe related with not only the intrinsic characteristics of probes but also probe user.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.1111-1114
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• 2003

In this paper, electrical characteristics of inductively coupled plasma in an electrodeless fluorescent lamp were investigated using a Langmuir probe with a variation of argon gas pressure. The RF output was applied in the range of $5{\sim}50W$ at 13.56MHz. The internal plasma voltage of the chamber and the probe current were measured while varying the supply voltage to the Langmuir probe in the range of $-100V{\sim}+100V$. When the pressure of argon gas was increased, electric current was decreased. There was a significant electric current increase from l0W to 30W. Also, when the RF power was increased, electron density was increase. This implies that this method can be used to find an optimal RF power for efficient light illumination in an electrodeless fluorescent lamp.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권5호
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• pp.391-395
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• 1999

In this paper, we have obtained the Electron Energy Distribution Function(EEDF) in plasma by using two differentiators and investigated the EEDFs by sawtooth and triangle waveform voltages with the working pressures and the positions of single probe. It is found that as the working pressure is decreased, the EEDFs approach to theMaxwellian distribution independent of the waveforms of probe voltage. On the otherhand, as the position of probe is moved from the center of the plasma to its edge, the EEDF of sawtooth waveform probe voltage approaches to the Maxwellian distribution, but the EEDF of triangle waveform probe voltage deviates from the Maxwellian distribution.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1989년도 추계학술대회 논문집 학회본부
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• pp.145-148
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• 1989

Plasma diagnostics using Langmuir Probe is of wide application because of its simplicity in measurement of electron temperatures and densities. Current methods using simple circuit and analog meters, however, have troubles when they are applied to time-varying or thermal plasmas. To overcome these problems and expand the area of applicability, we have designed fast electronic voltage sweeping circuit in which we can detect digital data. Diagnostics using our digital Langmuir Probe is performed in various kinds of plasmas and the results are shown. Our method can be applied to measuring electron temperature and density of high temperature or time-varying plasmas. And we expect further knowledge of each state of plasma.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1994년도 하계학술대회 논문집 C
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• pp.1609-1611
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• 1994

In ECR and helicon reactors for plasma processing, a high density plasma is generated in a source region which is connected to a diffusion region where the processing takes place. Large density and potential gradients can develop at the orifice of the source which drive ion currents into the diffusion region. The average ion velocity may become the order of the sound velocity. Measurements of the ion saturation current to a Langmuir probe are used as a standard method of determining the plasma density in laboratory discharges. However, the analysis becomes difficult in a steaming plasma. We have used the HAMLET plasma simulator to simulate the ion flow to a large langmuir probe in an ECR plasma. The collection surface was aligned with the Held upstream, normal to the field, and downstream. ion trajectories through the electric and magnetic fields were calculated including ion-neutral collisions. We examines the ratio of ion current density to plasma density as a function of magnetic field and pressure.

• Journal of Astronomy and Space Sciences
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• 제32권3호
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• pp.167-180
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• 2015

Herein, we discuss the in situ measurement of the electron temperature in the ionosphere/plasmasphere by means of DC Langmuir probes. Major instruments which have been reported are a conventional DC Langmuir probe, whose probe voltage is swept; a pulsed probe, which uses pulsed bias voltage; a rectification probe, which uses sinusoidal signal; and a resonance cone probe, which uses radio wave propagation. The content reviews past observations made with the instruments above. We also discuss technical factors that should be taken into account for reliable measurement, such as problems related to the contamination of electrodes and the satellite surface. Finally, we discuss research topics to be studied in the near future.

• Journal of Astronomy and Space Sciences
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• 제18권3호
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• pp.249-256
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• 2001

한국항공우주연구원에서는 지난 1998년 KSR-2 촤학로켓에 이온층 전자환경 측정기를 탑재하여 한반도 상공의 전자 밀도, 전자 온도, 부동 전위등을 측정하는데 성공하였다. 이온층 전자환경 측정기는 한반도 상공 이온층의 전자 온도와 밀도를 측정하는데 목적이 있다. 이번 연구에서는 2002년 상반기 발사 예정인 KSR-3 과학로켓에 탑재될 전자환경 측정기를 개발하였고 일본에서 우주 환경 모사 실험을 수행하여 측정기의 성능을 확인하였다. 전자환경 측정기는 랑뮈어 프로브(Langmuir Probe)와 전자 온도 프로브(Electron Temperature Probe)로 구성되어 있으며 이 센서들의 측정 결과로부터 이온층의 전자 밀도와 온도에 대한 정보를 얻을 수 있다. 이렇게 개발된 전자환경 측정기로부터 신뢰성 있는 자료를 얻는다면 IRI(International Reference Ionosphere) 모델이나 PIM(Parameterized Ionospheric Model)과 비교하여 한반도 상공의 이온층 전자 환경에 대한 이해를 돕는데 기여할 수 있을 것으로 기대된다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 하계학술대회 논문집 C
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• pp.1719-1721
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• 2003

In this paper, electrical characteristics of inductively coupled plasma in an electrodeless fluorescent lamp were investigated using a Langmuir probe with a variation of Ar gas pressure. The RF output was applied in the range of 5-50W at 13.56MHz. The internal plasma voltage of the chamber and the probe current were measured while varying the supply voltage to the Langmuir probe in the range of -100V ${\sim}$ +100V. When the pressure of Ar gas was increased, electric current was decreased. There was a significant electric current increase when the applied RF power was increased from 10 W to 30 W. This implies that this method can be used to find an optimal RF power for efficient light illumination in an electrodeless fluorescent lamp.

• 한국진공학회지
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• 제17권3호
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• pp.189-194
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• 2008

플라즈마 진단법 중 손쉽고 구동이 용이한 장점으로 인해 범용 플라즈마 진단 장치로 사용되는 랑뮤어 (Langmuir) 탐침법은 탐침이 직접 플라즈마 내에 삽입됨으로써 플라즈마를 간섭하기 때문에 플라즈마 고유의 특성을 변형시키는 약점이 있다. 본 연구에서는 대기압 아르곤 자유 연소 아크 (free-burning arc)에 삽입된 랑뮤어 탐침에 의한 교란 영향을 고찰하기 위하여 탐침 유무에 따른 열플라즈마 상태를 수치계산 하였고, 온도장과 속도장이 왜곡된 정도를 비교 분석하였다. 열플라즈마를 모델링하기 위하여 열유동장과 전자기장에 관한 두 종류의 지배방정식을 상용 CFD 프로그램과 자체 제작한 서브루틴을 이용하여 연계 계산하였다. 삽입된 탐침에 의해 열플라즈마 온도장은 탐침의 앞뒤에서 모두 플라즈마 축의 수직 방향으로 큰 변화를 나타내는 열적 교란이 발생되었다. 속도장에서는 탐침 선단의 정체 영역과 후단 후류 영역에서 유동 교란이 발생되었으며, 삽입 된 탐침의 영향이 국부적인 것이 아닌 플라즈마 유동장 대부분 영역에 영향을 미침을 확인할 수 있었다. 따라서 탐침법의 신뢰성을 높이기 위해서는 탐침 삽입에 의한 플라즈마의 열유체역학적 교란을 고려해야 한다.