• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2007.11a
• /
• pp.281-281
• /
• 2007

Low Temperature Co-fired Ceramic (LTCC) technology has been used in electronic device for various functions. LTCC technology is to fire dielectric ceramic and a conductive electrode such as Ag or Cu thick film below the temperature of $900^{\circ}C$ simultaneously. The glass-ceramic has been widely used for LTCC materials due to its low sintering temperature, high mechanical properties and low dielectric constants. To obtain the high strength, addition of filler, the microstructure should have various crystals and low pores in a composite. In this study, two glass frits were mixed with different alumina size(0.5, 2, 3.7um) and sintered at the range of $850{\sim}950^{\circ}C$. The microstructure, crystal phases, thermal and mechanical properties of the composites were investigated using FE-SEM, XRD, TG-DTA, Dilatomer. When the particle size of $Al_2O_3$ filler increased, the starting temperatures for the densification of the sintered bodies, onset point of crystallization, peak crystallization temperature in the glass-ceramic composites decreased gradually. After sintered at $900^{\circ}C$, the glass frits were crystallized as $CaAl_2Si_2O_8\;and\;CaMgSi_2O_6$. The purpose of our study is to understand the relationship between the $Al_2O_3$ particle size and thermal properties in composites.

• Proceedings of the Korean Ceranic Society Conference
• /
• 2004.04b
• /
• pp.39.1-39.1
• /
• 2004

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.11a
• /
• pp.39-39
• /
• 2008

이동통신 시스템의 소형화, 다기능화 추세에 따라 이동통신 부품들의 모듈화, 고집적화 추세로 급진전되고 있어, 고집적 세라믹 기판 모듈 제작을 위한 핵심공정 기술인 그린시트의 층간 정밀도 및 소성후 수축율 제어의 중요성이 증대되고 있다. 본 연구에서는 일축가압 이용한 PAS(Pressure Assisted Sintering) 법과 Al2O3를 희생층으로 이용한 Constrained Sintering법을 혼합하여 저온 동시소성 세라믹 기판의 x-y 축 수축율을 zero로 제어하고자하였다. $Al_2O_3$/LTCC/$Al_2O_3$인 샌드위치 구조로 세라믹 시트를 적층하여 Load 값과, LTCC 두께에 따른 x-y축, z축 소성 수축율 및 Edge Curvature의 Radius와 warpage 현상을 관찰하고, 이때 미세구조 및 밀도를 측정하였다. 그 결과 symmetic한 구조일 때 소성온도 $900^{\circ}C$에서 $Al_2O_3$ 두께가 $30{\mu}m$ 이상일 때 LTCC의 글라스가 $Al_2O_3$에 Infiltration 되는 두께는 $30{\mu}m$를 나타내었다. 또한 $Al_2O_3$ 두께 $500{\mu}m$, LTCC 두께 $2,000{\mu}m$, Load값이 800g/$cm^2$ 일 때 x-y 축 수축율<1%, z축 수축율 40%, 소결밀도는 2.99g/$cm^3$로 우수한 무수축 기판 특성을 나타내었다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.24 no.4
• /
• pp.297-302
• /
• 2011

Recently, low temperature co-fired ceramic (LTCC) technology is widely used in sensors, actuators and microsystems fields because of its very good electrical and mechanical properties, high reliability and stability as well as possibility of making 3D micro structures. In this study, we investigated the effects of sputtering gas ratio and annealing temperature on the crystal structure of $Pb(ZrTi)O_3$ (PZT) thin films deposited on LTCC substrate. The LTCC substrate with thickness of $400\;{\mu}m$ were fabricated by laminating 4 green tapes which consist of alumina and glass particle in an organic binder. The PZT thin films were deposited on Pt / Ti / LTCC substrates by RF magnetron sputtering method. The results showed that the crystallization of the films were enhanced as increasing $O_2$ mixing ratio. At about 25% $O_2$ mixing ratio, was well crystallized in the perovskite structure. PZT thin films was annealed at various temperatures. When the annealing temperature is lower, the PZT thin films become a phyrochlore phase. However, when the annealing temperature is higher than $600^{\circ}C$, the PZT thin films become a perovskite phase. At the annealing temperature of $700^{\circ}C$, perovskite PZT thin films with good quality structure was obtained.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2003.05d
• /
• pp.119-121
• /
• 2003

열을 발생하는 부품에 있어서 효과적으로 열방출 향상시키는 것은 부품의 신뢰성을 위해 중요한 사항이며, LTCC와 같은 고밀도 회로기판을 설계하는데 있어서 필수적으로 고려할 사항이다. 본 연구에서는 열전달을 향상시키기 위한 구조를 설계하였다. 또한, 열전달 효과를 조사하기 위해서 LTCC 기판 내에 열 비아 및 패드를 위치시킨 기판을 제작하였다. Laser Flash Method를 통해 재료의 열전도도 분석을 수행 하였다. 열비아 및 열방출을 위한 패드로 구성된 LTCC 기판의 열전도 특성은 순수 Ag 재료의 44%인 103 W/mK 특성 값을 나타내었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2001.07a
• /
• pp.139-142
• /
• 2001

As microeletronics technology continues to progress, there is also a continuous demand on highly integration and miniaturization of systems. For example, it is desirable to package several integrated circuits together in multilayer structure, such as multichip modules, to achieve higher levels of compactness and higher performance. Passive components (i.e., capacitors, resistors, and inductors) are very important for many MCM applications. In addition, the low-temperature co-fired ceramic (LTCC) process has considerable potential for embedding passive components in a small area at a low cost. In this paper, we investigate a method of statistically modeling integrated passive devices from just a small number of test structures. A set of LTCC inductors is fabricated and their scattering parameters (5-parameters) are measured for a range of frequencies from 50MHz to 5GHz. An accurate model for each test structure is obtained by using a building block based modeling methodology and circuit parameter optimization using the HSPICE circuit simulator.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2002.07b
• /
• pp.678-681
• /
• 2002

In this paper, Characterization for several 3-D embedded passive elements with different structures was performed. The equivalent circuit optimization for embedded inductor was performed by HSPICE simulation software. After extracting each parameter values, the difference of parameter from each structure was examined. From this work, effective characterization of passive devices with similar structure will be possible.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2004.07b
• /
• pp.574-577
• /
• 2004

A coupler is a microwave passive component used for power coupling or dividing. Regarding the trend of current telecommunication systems it is highly desirable for monolithic integration of passive components as such LTCC(Low temperature cofired ceramics) technology offers potential advantage in size, cost and performance. Utilizing LTCC technology a 2012 size type dual band coupler for DCS and EGSM band was fabricated. Its characteristics such as coupling, insertion loss, isolation and directivity was measured and compared with simulation results

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2004.11a
• /
• pp.392-395
• /
• 2004

A coupler is a microwave passive component used for power coupling or dividing. Regarding the trend of current telecommunication systems it is highly desirable for monolithic integration of passive components as such LTCC(Low temperature cofired ceramics) technology offers potential advantage in size, cost and performance. Utilizing LTCC technology a 1608 size type dual band coupler for DCS and EGSM band was fabricated. Its characteristics such as coupling, insertion loss, isolation and directivity was measured and compared with simulation results.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.11a
• /
• pp.171-171
• /
• 2008

본 연구는 초음파 알루미늄 웨지 및 금 볼 본딩을 동시에 적용 가능한 본딩 Pad의 금속학적 안정성을 고려한 표층전극 형성 방법에 관한 것이다. 특히, 이동통신 및 전장용 모듈의 복합 및 융합화로 LTCC기판 패키징에 있어서 다양한 본딩 기술이 요구되고 있다. 전통적인 interconnection 기술인 Au ball 본딩 및 초음파 에너지를 이용한 Al wedge 본딩 기술이 동시에 사용되어야 하는 패키지 구조의 경우 본딩 패드의 표층전극 설계는 서로 상충되는 조건이 요구된다. 따라서, 본 연구에서는 LTCC기판의 표층전극의 Metal finish 방법으로 이용되는 ENEPIG(무전해 Ni/Pd/Au도금)공법으로 Au ball 본딩 및 초음파 Al wedge 본딩을 동시에 가능하게 하는 solution을 제시하여 패키징 자유도뿐만 아니라 Interconnection 신뢰성을 확보할 수 있었다.