Effects of Sputtering Condition on Structural Properties of PZT Thin Films on LTCC Substrate by RF Magnetron Sputtering |
Lee, Kyung-Chun
(Department of Information and Communication Engineering, Sungkyunkwan University)
Hwang, Hyun-Suk (Department of Electrical Engineering, Seoil University) Lee, Tae-Yong (Department of Information and Communication Engineering, Sungkyunkwan University) Hur, Won-Young (Department of Information and Communication Engineering, Sungkyunkwan University) Song, Joon-Tae (Department of Information and Communication Engineering, Sungkyunkwan University) |
1 | M. R. Gongora-Rubio, P. Espinoza-Vallejos, L. Sola-Laguna, and J. J. Santiago-Aviles, Sensors and Actuators A, 89, 222 (2001). DOI |
2 | D. Belavic, M. Hrovat, M. S. Zarnik, J. Holc, J. Cilensek, M. Jerlah, S. Macek, H. Ursic, and M. Kosec, (ESTC 2nd, Greenwich, United Kingdom, 2008) p. 989. |
3 | M. T. Tunkasiri, Y. Qin, W. Nhuapeng, and W. thamjaree, J. Mater. Sci. Lett 19, 1913 (2000). DOI |
4 | K. S. Kim, S. O. Yoon, and S. Kim, J. KIEEME, 23, 6 (2010). |
5 | K. Tsuchiya, T. Kitagawa, and E. Nakamachi, Precis. Eng 27, 258 (2003). DOI |
6 | M. S. Tasi, S. C. Sun, and T. Y. Tseng, J. Appl. Phys 82, 3482 (1997). DOI |
7 | C. C. Chang and P. C. Lu, J. MPT 95, 128 (1999). |
8 | A. Katsuhiro and F. Yukio, IEICE Trans. Electron C, 81, 537 (1998). |
9 | R. Thomas, S. Mochizuki, T. Mihara, and T. Ishida, Jpn. J. Appl. Phys., 40, 5511 (2001). DOI |
10 | J. Z. Tsai, C. J. Chen, and W. Y. Chen, J. of Sensors and Actuators, 139, 259 (2009). DOI |