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http://dx.doi.org/10.4313/JKEM.2011.24.4.297

Effects of Sputtering Condition on Structural Properties of PZT Thin Films on LTCC Substrate by RF Magnetron Sputtering  

Lee, Kyung-Chun (Department of Information and Communication Engineering, Sungkyunkwan University)
Hwang, Hyun-Suk (Department of Electrical Engineering, Seoil University)
Lee, Tae-Yong (Department of Information and Communication Engineering, Sungkyunkwan University)
Hur, Won-Young (Department of Information and Communication Engineering, Sungkyunkwan University)
Song, Joon-Tae (Department of Information and Communication Engineering, Sungkyunkwan University)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.24, no.4, 2011 , pp. 297-302 More about this Journal
Abstract
Recently, low temperature co-fired ceramic (LTCC) technology is widely used in sensors, actuators and microsystems fields because of its very good electrical and mechanical properties, high reliability and stability as well as possibility of making 3D micro structures. In this study, we investigated the effects of sputtering gas ratio and annealing temperature on the crystal structure of $Pb(ZrTi)O_3$ (PZT) thin films deposited on LTCC substrate. The LTCC substrate with thickness of $400\;{\mu}m$ were fabricated by laminating 4 green tapes which consist of alumina and glass particle in an organic binder. The PZT thin films were deposited on Pt / Ti / LTCC substrates by RF magnetron sputtering method. The results showed that the crystallization of the films were enhanced as increasing $O_2$ mixing ratio. At about 25% $O_2$ mixing ratio, was well crystallized in the perovskite structure. PZT thin films was annealed at various temperatures. When the annealing temperature is lower, the PZT thin films become a phyrochlore phase. However, when the annealing temperature is higher than $600^{\circ}C$, the PZT thin films become a perovskite phase. At the annealing temperature of $700^{\circ}C$, perovskite PZT thin films with good quality structure was obtained.
Keywords
LTCC; $Pb(ZrTi)O_3$; RF magnetron sputtering; Annealing;
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