• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.2606-2611
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• 2003

Comprehensive study on the control system design for a RTP process has been conducted. The purpose of the control system is to maintain maximum temperature uniformity across the silicon wafer achieving precise tracking for various reference trajectories. The study has been carried out in two stages: thermal balance modeling on the basis of a semi-empirical radiation model, and optimal iterative learning controller design on the basis of a linear state space model. First, we found through steady state radiation modeling that the fourth power of wafer temperatures, lamp powers, and the fourth power of chamber wall temperature are related by an emissivity-independent linear equation. Next, for control of the MIMO system, a state space modeland LQG-based two-stage batch control technique was derived and employed to reduce the heavy computational demand in the original two-stage batch control technique. By accommodating the first result, a linear state space model for the controller design was identified between the lamp powers and the fourth power of wafer temperatures as inputs and outputs, respectively. The control system was applied to an experimental RTP equipment. As a consequence, great uniformity improvement could be attained over the entire time horizon compared to the original multi-loop PID control. In addition, controller implementation was standardized and facilitated by completely eliminating the tedious and lengthy control tuning trial.

• Smart Structures and Systems
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• 제18권6호
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• pp.1251-1267
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• 2016

In this paper, Simple Adaptive Control (SAC) is used to enhance the seismic response of nonlinear tall buildings based on acceleration feedback. Semi-active MR dampers are employed as control actuator due to their reliability and well-known dynamic models. Acceleration feedback is used because of availability, cost-efficiency and reliable measurements of acceleration sensors. However, using acceleration feedback in the control loop causes the structure not to apparently meet some requirements of the SAC algorithm. In addition to defining an appropriate SAC reference model and using inherently stable MR dampers, a modification in the original structure of the SAC is proposed in order to improve its adaptability to the situation in which the plant does not satisfy the algorithm's stability requirements. To investigate the performance of the developed control system, a numerical study is conducted on the benchmark 20-story nonlinear building and the responses of the SAC-controlled structure are compared to an $H_2/LQG$ clipped-optimal controller under the effect of different seismic excitations. As indicated by the results, SAC controller effectively reduces the story drifts and hence the seismically-induced damage throughout the structural members despite its simplicity, independence of structural parameters and while using fewer number of dampers in contrast with the $H_2/LQG$ clipped-optimal controller.

• 전자공학회논문지S
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• 제36S권6호
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• pp.57-66
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• 1999

본 논문에서는 자기부상시스템의 부상제어기 설계방법을 제시한다. 국내에서는 여러 이점을 갖는 상전도부상방식에 관한 연구가 주로 수행되고 있다. 그러나 이 상전도 부상시스템은 높은 비선형성과 불안정성을 갖기 때문에 여러 외부조건에 대해서 견실한 안정도와 높은 정밀도를 유지하는 부상제어기 설계는 매우 어려운 문제이다. 본 논문에서는 극배치방식에 근거한 이득계획제어 설계기법과 LQG방식에 근거한 이득계획제어 설계기법을 제시하고 제어성능을 모의 실험을 통하여 보인다.

• 소음진동
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• 제10권6호
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• pp.1048-1058
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• 2000

본 논문에서는 압전 세라믹 재료를 작동기 및 감지기로 이용한 사각 경계면이 고정된 얇은 사각평판의 능동 진동제어 방법을 제시한다. 실험 데이터에 기초한 다중 입출력계의 주파수영역 모델링방법을 이용하여 분포된 센서 및 구동기 특성이 포함된 구조물의 동적 특성이 규명된다. 제어기 구조로는 혼합형을 채택하고 되먹임 제어기는 LQG 제어기법에 의해 설계된다. 앞먹임 제어기는 다중 filtered-$x$ 최소자승오차법에 의해 적응되도록 한다. 진동제어에 대한 시뮬레이션 및 실험결과는 제안된 제어기법이 지속적 외란 및 과도적 외란에 효율적으로 적용될 수 있음을 보인다.

• Smart Structures and Systems
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• 제23권1호
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• pp.1-14
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• 2019

Control algorithms are the most important aspects in successful control of structures against earthquakes. In recent years, intelligent control methods rather than classical control methods have been more considered by researchers, due to some specific capabilities such as handling nonlinear and complex systems, adaptability, and robustness to errors and uncertainties. However, due to lack of learning ability of fuzzy controller, it is used in combination with a genetic algorithm, which in turn suffers from some problems like premature convergence around an incorrect target. Therefore in this research, the introduction and design of the Fuzzy Cooperative Coevolution (Fuzzy CoCo) controller and Adaptive Neural-Fuzzy Inference System (ANFIS) have been innovatively presented for semi-active seismic control. In this research, in order to improve the seismic behavior of structures, a semi-active control of building using Magneto Rheological (MR) damper is proposed to determine input voltage of Magneto Rheological (MR) dampers using ANFIS and Fuzzy CoCo. Genetic Algorithm (GA) is used to optimize the performance of controllers. In this paper, the design of controllers is based on the reduction of the Park-Ang damage index. In order to assess the effectiveness of the designed control system, its function is numerically studied on a 9-story benchmark building, and is compared to those of a Wavelet Neural Network (WNN), fuzzy logic controller optimized by genetic algorithm (GAFLC), Linear Quadratic Gaussian (LQG) and Clipped Optimal Control (COC) systems in terms of seismic performance. The results showed desirable performance of the ANFIS and Fuzzy CoCo controllers in considerably reducing the structure responses under different earthquakes; for instance ANFIS and Fuzzy CoCo controllers showed respectively 38 and 46% reductions in peak inter-story drift ($J_1$) compared to the LQG controller; 30 and 39% reductions in $J_1$ compared to the COC controller and 3 and 16% reductions in $J_1$ compared to the GAFLC controller. When compared to other controllers, one can conclude that Fuzzy CoCo controller performs better.

• 제어로봇시스템학회논문지
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• 제6권2호
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• pp.146-154
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• 2000

An $H\infty$ controller is designed for active suspensions of vehicles using 7-degree-of-freedom full-car model. Its performance robustness as well as stability robustness to system parameter variations and unmodelled dynamics are assured through the $\mu$-framework. The performance of the $H\infty$ controller is compared with that of a LQC controller in compute simulations. From the simulations it is found that the active suspension with the $H\infty$ controller reduces the acceleration and motion of the sprung mass in the heaving rolling and pitching directions when the car is driven on a normal road or through an asymmetric bump. The suspension stroke and the road holding capability are also improved with a relatively small level of power consumption. Overall the $H\infty$ controller shows a more robust performance than that of the LQG design.

• 소음진동
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• 제5권4호
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• pp.525-536
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• 1995

In this study, an ROC(Reduced Order Controller) is designed to increase the flutter velocity of an aircraft wing, and the effect of ROC on the flight performance is also analyzed. The aircraft wing used in the paper is modelled as a 3 DOF two-dimensional rigid body. In the disign of controller, LQG and BACR(Balanced Augmented Controller Reduction) strategy is used as control algorithm and controller reduction method respectively. Simulation has been conducted to evaluate the effectiveness of ROC on the active flutter control, compared to FOC(Full Order Controller). It has been found that ROC using BACR is much effective than FOC in the sense of computation effort, without sacrificing the active flutter control performance.

• 소음진동
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• 제9권1호
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• pp.33-41
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• 1999

This paper presents a method of actively controlling the interior noise by a trim panel with hybrid feedforward-feedback control loop. The control technique is designed to minimize the vibration of panel whose motion is limited to that of a piston (out-of-plane motion). The hybrid controller consists of an adaptive feedforward controller in conjunction with a linear quadratic Gaussian (LQG) feedback controller. In order to maintain control performance of both persistent and transient disturbances, the feedback loop speeds up the adaptation rate of feedforward controller by improving damping capacity of secondary plant related with the adaptation rule. Numerical simulation and experimental result indicate that the hybrid controller is a more effective method for reducing the vibration of the panel (and therefore the interior noise) compared to using feedforward controller.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1986년도 한국자동제어학술회의논문집; 한국과학기술대학, 충남; 17-18 Oct. 1986
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• pp.346-351
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• 1986

본 논문에서는 과거 10여년 동안의 Robust제어기에 관한 연구동향을 조사 요약하였다. Robust제어기에 관한 연구는 제어시스템의 Robustness 분석과 Robust한 제어기 설계방법으로 나뉘며 Robustness 분석은 불확실성이 구조를 갖는 경우와 구조가 없는 경우로 나뉘어 연구된다. Robust한 제어기 설계 방법에는 LQG/LTR방법과 제어기 매개변수화등이 있다. 본 논문에서는 각 방법들을 간략히 소개하고 이들을 비교하였다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1990년도 한국자동제어학술회의논문집(국내학술편); KOEX, Seoul; 26-27 Oct. 1990
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• pp.653-657
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• 1990

Since linearized equations of notion have much modelling errors, robust controller for disturbances and noises Is necessary for autopilot. In this paper, notion equations for underwater vehicle with six degree-of-freedom are derived and linearized. And robust autopilot for this system is designed by using LQG/LTR methodology.