• 센서학회지
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• 제9권5호
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• pp.380-388
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• 2000

LIGA-like 공정을 이용하여 고종횡비를 갖는 초소형 니켈 터빈을 제작하기 위하여 블레이드에 대한 유한 요소 해석을 수행하여 안전한 운전 조건을 연구하였다. 이 해석으로부터 터빈의 입구와 출구의 압력 차이가 44kPa 정도일 때에 항복강도를 넘지 않도록 해야 하며 축의 외경과 터빈 날개의 내경 사이의 접촉에 의한 마찰계수와 최대 응력 사이의 관계는 약간 반비례하는 경향을 보였다. 즉, 터빈이 회전하는 상태에서 최대 응력은 접촉 마찰이 증가함에 따라 감소했다. 터빈과 같이 반복하중을 받는 부분은 취성이 강한 실리콘보다는 금속으로 제작해야 하며 이를 위해서는 표면 미세 가공 보다 LTGA-like 공정으로 제작되어야 한다. 본 연구는 초소형 구조물에서 움직이는 부분과 고정된 부분의 접촉 문제를 갖는 여러 종류의 문제를 다루는 데에 이용될 수 있다.

• 한국재료학회지
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• 제13권1호
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• pp.6-10
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• 2003

Electroplated Ni and Ni-W micro-molds using LIGA-like process for replication of micro-components such as microfluidic parts and micro optical parts have been investigated. In general, it is hard to produce micro-parts using conventional mechanical processes. Micro-mold formed by LIGA-like process could fabricate micro-parts with high aspect ratio. In this paper, fabrication and properties of electroplated Ni molds with varying applied current types as well as those of Ni-W molds were investigated. Ni molds fabricated under pulse-reverse current showed the highest hardness value of about 160 Hv. Ni-W molds showed the hardness of about 500 Hv which was much harder than that of Ni electroplated molds. The above results suggested that high quality micro-molds could be fabricated by using Ni electroplating of pulse-reverse type for core molds and sequential Ni-W alloys coating.

• 한국기계가공학회지
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• 제14권4호
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• pp.1-7
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• 2015

In the present study, copper micromolds with a microhole array were precisely manufactured by a synchrotron LIGA process. Like in the traditional LIGA process, a deep X-ray lithography based on a synchrotron radiation was employed as the first manufacturing step. Due to the excellent optical performance of the synchrotron X-ray used, cylindrical micropillar arrays with high aspect ratio could be efficiently obtained. The fabricated microfeatures were then used as a master of the subsequent copper electroforming process, thereby resulting in copper micromolds with a microhole array. Thermoplastic hot embossing experiments with the copper micromolds were carried out for imprinting cylindrical microfeatures onto a polystyrene sheet. Through the hot embossing, the effect of embossing temperature and usefulness of the present manufacturing method could be verified.

• 한국정밀공학회지
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• 제17권8호
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• pp.172-179
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• 2000

In this paper a technology for the fabrication of the oblique structure using the LIGA process will be presented. The fabricated microstructure is a tetrahedral 3- facet mirror. The mirror has an equilateral triangular base of hundreds ${\mu}m$ length mirror-like three side-facets inclined to the base at 45$^{\circ}$ and knife edges. Two regular triangles of 45$^{\circ}$ and tan-12. After development the shaded part of the PMMA the tetrahedral mirror remains, The completed mirror shows excellent aspects of mirror-like facets and knife-edges. By controlling the gap between the mask and the substrate the size of mirror easily can be changed. This mirror would be used as a laser beam splitter for the feedback control of the HDD slider.

• 한국결정성장학회지
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• 제13권2호
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• pp.68-72
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• 2003

본 논문에서는 3차원 마이크로구조물을 위한 새로운 UV-LIGA 공정을 개발하였다. 일반적으로 photoresist는 얇은 두께로 코팅이 되지만, SU-8은 수십 $\mu\textrm{m}$ 이상의 두께를 가질 수 있으며, 높은 형상비를 갖는다. SU-8과 같은 Thick photoresist는 기존의 baking 공정과 같이 급격한 cool down을 할 경우 stress에 의한 crack이 발생한다. 이와 같은 경우 도금을 위한 마이크로구조물이 구현이 되지 않는다. SU-8의 코팅, bake에서의 시간 조절, 그리고 PEB의 시간 조절 및 cool down조절을 통하여 stress에 의한 crack이 발생하지 않도록 3차원 마이크로구조물을 제작 할 수 있도록 하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.1061-1064
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• 1997

Micro injection molding technology is very important fiw mass product of micro structures or micro parts. And, it is so difficult that the molding technology of micro pole or thin wall(barrier rib) structures with high aspect ratio. In this stud). \vc intend to research on the basic technology of micro wall structure part:< with high aspect ratio by the inject~on moldins method. The mold for esperimenrs with micro multi-square structures was made by L, I(;A process. One square polc's size is 157 157pm. height 50011111. And the distance of each poles is 5011n1. 7'hus. molding products will be for~nctl like as the net structure with thin wall of about 50pn thickness.(aspect ratio 10) Ihrough the e~lxriment. \be obtained the prociuctr of micro multi-square slructure with bout 37.000 cell per a piece. 'Ihe micro injection molding process technolog for thin wall by multi-square structure mold was analy~cd.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1994년도 추계학술대회 논문집 학회본부
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• pp.422-424
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• 1994

A comb drive electrostatic micro gripper was designed and fabricated. We designed it analytically using electrostatic force and cantilever deflection equation. In fabrication, we used LIGA-like technology consisted of Ni electroplating through polyimide patterned by $O_2$ Plasma RIE and Al sacrificial layer. This micro gripper was designed to handle an optical fiber which is $125{\mu}m$ in diameter.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1995년도 추계학술대회 논문집 학회본부
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• pp.600-602
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• 1995

Using the $O_2$ RIE process, 20{\mu}m$-height polyimide microstructures are fabricated. In LIGA-like process, metal microstructure can be formed by the electroplating using these polyimide microstructures as a plating mould. Reactive ion Etching technique using oxygen gas is used for the patterning of polyimide. The etching rate of the polyimide is increased with increased pressure and RF power. The anisotropic vertical sidewall can be obtained at low pressure, but the etched surface state is not so good yet. "Micrograss", which is formed during the RIE and disturbs uniform electroplating, can be removed effectively by the wet itching of the chromium sacrificial layer. More studies about the improvement of an etched surface state and the removal of microsgrass are needed.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 추계학술대회 논문집 학회본부 C
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• pp.581-582
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• 2000

본 논문에서는 적외선과 같이 주파수가 Tera Hz 영역인 극초고주파에서 사용할 수 있는 Horn형 안테나의 제조를 위한 독창적인 방법을 제시하고 실험적인 검증을 하였다. 파장이 $10{\mu}m$ 부근인 전자기파에 대응될 수 있는 안테나의 구조에 대한 시뮬레이션을 하였으며 이를 기준으로 안테나 어레이를 제조하기 위한 기초실험을 하였다. 기존에 사용되던 LIGA-like 공정과는 대조적으로 Columnar illumination 방법을 사용하였으며 $300{\mu}m$ 두께의 SU-8에 대하여 수직벽을 제조할 수 있었고 기판 위치에 일정한 각도를 줌으로서 경사면을 갖는 구조를 제조하였으며 기판을 회전시킴으로서 원뿔형의 Horn형 안테나 어레이를 제조할 수 있는 방안을 제시하였다.

• Design & Manufacturing
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• 제2권2호
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• pp.25-28
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• 2008

Micro fabrication of biochip such like lab-on-a-chip becomes increasingly important. In this study, we designed and manufactured of new molds which were main factors for forming process in order to mass produce of biochip using forming process. Forming analysis of biochip was performed by Moldflow software. Results of this study are able to design and manufacture the mold which can be easy to eject the workpiece by using the slide mechanism for biochip.