Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Fabrication of A 3-facet Mirror Using the LIGA Process

LIGA 공정을 이용한 삼면반사체 제작

  • 오동영 (포항공대 기계공학과) ;
  • 정동관 (삼성종합기술원 정밀기계 Lab.) ;
  • 박노열 (삼성종합기술원 정밀기계 Lab.) ;
  • 장석상 (포항방사광가속기 연구소) ;
  • 이승섭 (포항공대 기계공학과)
  • Published : 2000.08.01
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Abstract

In this paper a technology for the fabrication of the oblique structure using the LIGA process will be presented. The fabricated microstructure is a tetrahedral 3- facet mirror. The mirror has an equilateral triangular base of hundreds ${\mu}m$ length mirror-like three side-facets inclined to the base at 45$^{\circ}$ and knife edges. Two regular triangles of 45$^{\circ}$ and tan-12. After development the shaded part of the PMMA the tetrahedral mirror remains, The completed mirror shows excellent aspects of mirror-like facets and knife-edges. By controlling the gap between the mask and the substrate the size of mirror easily can be changed. This mirror would be used as a laser beam splitter for the feedback control of the HDD slider.

Keywords

References

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