1 |
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[
Jang Hyun Ki
] /
Opimization of Fabrication Process for High Aspect Ratio Metallica Comb Acuator Using UV LIGA Process
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2 |
Negative Photoresists for Optical Lithography
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[
J.M. Shaw;J.D. Galore;N.C. Bionic;W.E. Coney;S.J. Holmes
] /
IBM Journal of Research & Development
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3 |
High Aspect Ratio Mocromachinin g Via Deep X-Ray Lithographyu
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[
H. Guckel
] /
Proc. the I IEEE 86
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4 |
A Universal Electrogagnetic Microacutuator Using Magnetic Interconnection Concepts
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[
Daniel J. Sadler;trifon M. Liakopoulos;Chaon H. Ahn
] /
Journal of MEMS
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5 |
5-Level Polysilicon Surface Micromachine Technology : Application to COmplex Mechani cal System
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[
M. Steven Roger;Jeffry J. Sniegowski
] /
Proc. Solid-Sate Sensors and Acuators Workshop
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