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http://dx.doi.org/10.14775/ksmpe.2015.14.4.001

Manufacturing of Micromolds for Plastic Molding Technologies via Synchrotron LIGA Process  

Lee, Bong-Kee (School of Mechanical Engineering, Chonnam National University)
Kim, Jong-Hyun (Pohang Accelerator Laboratory, Pohang University of Science and Technology)
Publication Information
Journal of the Korean Society of Manufacturing Process Engineers / v.14, no.4, 2015 , pp. 1-7 More about this Journal
Abstract
In the present study, copper micromolds with a microhole array were precisely manufactured by a synchrotron LIGA process. Like in the traditional LIGA process, a deep X-ray lithography based on a synchrotron radiation was employed as the first manufacturing step. Due to the excellent optical performance of the synchrotron X-ray used, cylindrical micropillar arrays with high aspect ratio could be efficiently obtained. The fabricated microfeatures were then used as a master of the subsequent copper electroforming process, thereby resulting in copper micromolds with a microhole array. Thermoplastic hot embossing experiments with the copper micromolds were carried out for imprinting cylindrical microfeatures onto a polystyrene sheet. Through the hot embossing, the effect of embossing temperature and usefulness of the present manufacturing method could be verified.
Keywords
LIGA Process; Micromold; Synchrotron Radiation; Electroforming; Hot Embossing;
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Times Cited By KSCI : 3  (Citation Analysis)
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