• Journal of the Korean Society for Precision Engineering
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• v.17 no.7
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• pp.36-44
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• 2000

X-선 사진식각공정(이하 LIGA 기술이라 함)을 이용한 초소형, 초정밀 금형 및 3차원 구조물 제작 가공기술은, 생산기반 기술 중 금형기술 및 가공기술 분야에 해당하는 기술로 포항가속기와 같은 방사선 가속기에서 생성되는 수 보대 파장의 X-선을 이용하는 기술이다. 짧은 파장을 사용하는 연유로, 일반 반도체 공정으로는 실현할 수 없는 높고, 광학적 용도까지 가능한 거울정도의 벽면 거칠기(수백${\AA}$이하)를, 그러면서도 서브 마이크론의 정밀도 (1$\mu\textrm{m}$이하)를 가지는 금형 및 3차원 구조물을 일괄 가공할 수 있는 기술이다.(중략)

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.14 no.4
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• pp.1-7
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• 2015

In the present study, copper micromolds with a microhole array were precisely manufactured by a synchrotron LIGA process. Like in the traditional LIGA process, a deep X-ray lithography based on a synchrotron radiation was employed as the first manufacturing step. Due to the excellent optical performance of the synchrotron X-ray used, cylindrical micropillar arrays with high aspect ratio could be efficiently obtained. The fabricated microfeatures were then used as a master of the subsequent copper electroforming process, thereby resulting in copper micromolds with a microhole array. Thermoplastic hot embossing experiments with the copper micromolds were carried out for imprinting cylindrical microfeatures onto a polystyrene sheet. Through the hot embossing, the effect of embossing temperature and usefulness of the present manufacturing method could be verified.

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.2221-2223
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• 2000

본 연구에서는 새로운 개념의 초정밀 가공기술인 LIGA 기술(이하 X-선 가공기술이라 함)을 이용하여 정밀 격벽(barrier ribs) 성형용 Ni 금형을 제작하였다. 먼저 X-ray 투과도가 우수하며 내구성 및 기계적 강도가 뛰어난 새로운 재질의 graphite X-선 마스크를 제작하였으며 한정된 단위면적의 X-선 마스크를 이용하여 X-선 노광 면적을 최대화 할 수 있는 새로운 X-선 exposure 기술을 개발하였다. 제작된 barrier ribs 성형용 초정밀 금형의 전체 size는 170mm X 130mm이며 pitch 간격은 110/55${\mu}m$ $\pm$ 0.7${\mu}m$ 이다.

• Design & Manufacturing
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• v.2 no.4
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• pp.1-4
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• 2008

Micro pattern is applied to the light guiding plate(LGP) to enhance the uniformity of the brightness of the LCD. The micro cones are molded in intaglio on the surface of the LGP. The surface roughness of each cone was 40nm and 38nm in negative and positive die for laser ablation. In chemical etching, the surface roughness was 25nm, 24nm in negative and positive. And the surface roughness of negative and positive dies were 4nm and 5nm for LIGA-reflow process.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2004.05a
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• pp.241-244
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• 2004

Microlens patterned micro-mold fabrication method for Light Guiding Plate(LGP), kernel part of LCD-BLU(Back Light Unit), was presented. Instead of erosion dot pattern for LCP optical design, microlens pattern, fabricated by LIGA-reflow process, was applied. Optical pattern design method was also developed not only for negative pattern LGP, but also positive pattern LGP. In order to achieve flow balance during the micro-injection molding process and dimensional accuracy, two LGP pattern was made in one micro-mold.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1976-1978
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• 2002

micro CPL 제작을 위한 LICA 및 MEMS 공정을 개발하였으며 양산화를 위한 새로운 방법으로 ${\mu}$MIM(micro Metal Injection Molding) 기술을 제안하였다. 먼저 LIGA 기술을 이용하여 Cu 도금 구조물로 이루어진 micro CPL 구조물을 제작하였다. 각각 상판과 하판 구조물로 나누어 제작하였으며 상, 하판 Cu 구조물을 brazing 방법을 이용하여 접합하였다. 또한 micro CPL 내부에서 일어나는 냉매의 흐름 및 상변화(liquid ${\leftrightarrow}$ vapor) 거동을 관찰할 수 있는 새로운 개념의 Si/glass 투명 micro CPL을 제작하였다. 상기 공정을 이용하여 냉각 능력이 10w/$cm^2$ 이상인 micro CPL을 제작하였다. 상기 연구 결과를 바탕으로 양산화를 위한 새로운 정밀복제기술인 ${\mu}$MIM(Micro Metal Injection Molding) 공정을 개발하였다. LISA 공정으로 제작된 정밀 금형을 core금형으로 사용하였고 $1{\mu}m$ 이하의 W-Cu(10%) powder와 binder가 혼합된 흔합분말을 이용하여 micro channel 구조물(선폭 $100{\mu}m$)의 성형 복제에 성공함으로서 양산화를 향한 기반기술을 확립하였다.

• Transactions of Materials Processing
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• v.19 no.6
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• pp.352-356
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• 2010

This paper was designed to fabricate the micro-spur gear by the LIGA and hybrid powder extrusion process. It is important to manufacture a micro-die with a high aspect ratio and determine appropriate extrusion conditions for a microforming. Ni has been used to fabricate micro-dies. LIGA process was capable to produce micro-extrusion dies with close tolerance, longer bearing length and adequate surface quality. Superplastic Al-78Zn powders have the great advantage in achieving deformation under low stresses and exhibiting good micro-formability with average strain rate raging from $10^{-3}$ to $10^{-2} s^{-1}$ and constant temperature ranging from 503 to 563K. Al-78Zn powders were compacted into a cylindrical shape ($\Phi3\times$h10mm) under compressive force of 10kN and, subsequently, the compacted powders were extruded by the hybrid powder extrusion process controlling of the temperature holing time for a improvement on formability of Al-22Zn powder. Micro-extrusion has succeeded in forming micro-gear shafts.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.10a
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• pp.387-390
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• 2009

This study was designed to fabricate the micro-electro-mechanical systems (MEMS) parts such as micro spur gears using hot extrusion of gas atomized Al-78Zn powders. For this purpose, it is important to develop new methods to fabricate micro-dies and choose suitable extrusion conditions for a micro-forming. Micro-dies with Ni were fabricated by LIGA technology. LIGA technology was capable to produce micro-extrusion dies with close tolerances, thick bearing length and adequate surface quality. Superplastic Al-78Zn powders have the great advantage in achieving deformation under low stresses and exhibiting good micro formability with average strain rates ranging from $10^{-3}$ to $10^{-2}\;s^{-1}$ and constant temperatures ranging from 503 to 563K. Al-78Zn powders were compacted into a cylindrical shape (${\Phi}3{\times}h10$) under compressive force of 10kN and, subsequently, the compacted powders were extruded at 563k in a hot furnace. Micro-extrusion has succeeded in forming micro-gear shafts.

• Korean Journal of Materials Research
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• v.13 no.1
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• pp.6-10
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• 2003

Electroplated Ni and Ni-W micro-molds using LIGA-like process for replication of micro-components such as microfluidic parts and micro optical parts have been investigated. In general, it is hard to produce micro-parts using conventional mechanical processes. Micro-mold formed by LIGA-like process could fabricate micro-parts with high aspect ratio. In this paper, fabrication and properties of electroplated Ni molds with varying applied current types as well as those of Ni-W molds were investigated. Ni molds fabricated under pulse-reverse current showed the highest hardness value of about 160 Hv. Ni-W molds showed the hardness of about 500 Hv which was much harder than that of Ni electroplated molds. The above results suggested that high quality micro-molds could be fabricated by using Ni electroplating of pulse-reverse type for core molds and sequential Ni-W alloys coating.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2004.11a
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• pp.249-254
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• 2004

광의 효율적 사용을 위해 표면에 마이크로 그루브가 새겨진 고성능 광학 부품의 개발이 활발하고, 이들 부품의 다량 생산을 위한 초정밀 금형제조기술이 각광을 받고 있다. 최근의 초정밀 미세 기계가공의 경우 간단한 공정으로 이러한 마이크로 그루브 금형을 제작할 수 있다. 특히 조명각 변조용 렌티큘러 렌즈와 같이 실린더형 그루브 금형의 경우에는 기존의 Lithography, MEMS, LIGA 등 광 에너지를 이용한 다른 제조방법들에서는 가공하기 어려운 점이 있으나, 기계가공에서는 쉽게 제작가능한 장점이 있다. 본 연구에서는 이러한 미세기계가공기술의 장점을 활용하여 U 형 마이크로 그루브를 가진 Lenticular 렌즈용 금형을 가공하고자 하였다. 가공에는 3 축 구동의 초정밀 미세 복합가공기와 단결정 천연 다이아몬드공구가 사용되었고, 가공방식은 마이크로 세이핑 공정을 적용하였으며, 가공 금형 재료에는 Brass와 무전해 Nickel이 사용되었다. 실험을 통하여 금형가공시의 절삭력, 칩 형상, 가공표면 등의 분석이 수행되었으며 이를 기반으로 여러 가지 가공문제점을 해결하고, 최종적으로 양호한 렌티큘러렌즈용 금형을 가공하였다.