Fabrication of Li2MnSiO4 Cathode Thin Films by RF Sputtering for Thin Film Li-ion Secondary Batteries and Their Electrochemical Properties (RF 스퍼터법을 이용한 Li2MnSiO4 리튬 이차전지 양극활물질 박막 제조 및 전기화학적 특성)
-
- Journal of the Korean Institute of Electrical and Electronic Material Engineers
- /
- v.30 no.7
- /
- pp.447-453
- /
- 2017